CN100399093C - Leveling and focusing mechanism - Google Patents
Leveling and focusing mechanism Download PDFInfo
- Publication number
- CN100399093C CN100399093C CNB2005101121150A CN200510112115A CN100399093C CN 100399093 C CN100399093 C CN 100399093C CN B2005101121150 A CNB2005101121150 A CN B2005101121150A CN 200510112115 A CN200510112115 A CN 200510112115A CN 100399093 C CN100399093 C CN 100399093C
- Authority
- CN
- China
- Prior art keywords
- leveling
- present
- flexible hinge
- lever
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Abstract
The present invention relates to a leveling and focusing mechanism which comprises at least three flexible adjusting mechanisms. The present invention realizes lifting action by the flexible adjusting mechanisms, wherein two flexible adjusting mechanisms are symmetrically distributed. When the loading quality of the present invention is very large, the present invention can still obtain a higher mechanical intrinsic frequency. The present invention has the advantages of very good rigidity of cams, very effective transfer power, low dissipation, and low heat quantity generated by the friction of the cams. An indirect driving means which is formed by levers can reach the accuracy of submicron under the operating conditions of high loading, small stroke, and compact structure by servo control, and the present invention can well solve a coupling problem and a jamming force problem. The leveling and focusing system has good anti-jamming characteristics and dynamic property, and the present invention is easy to realize.
Description
Technical field
The present invention relates to a kind of leveling and focusing mechanism, the flexible leveling and focusing mechanism of particularly a kind of big load sub-micron.
Background technology
Along with the development of integrated circuit technique, also more and more higher to the requirement of chip integration, just require the photoetching lines of lithographic equipment more and more thinner.And the raising of litho machine photoetching resolution depends on the increase of its lithographic objective numerical aperture NA and reducing of operation wavelength.The reducing of the increase of lithographic objective numerical aperture NA and operation wavelength directly caused the structure of object lens to become very complicated, and weight also increases considerably.
Technology related to the present invention can be consulted disclosed Chinese utility model patent 99231709.6 on March 29th, 2000, and this utility model discloses a kind of focus adjusting mechanism with big stroke, high guiding accuracy, nanoscale fine motion resolution.This focus adjusting mechanism adopts high rotating speed constant speed motor to drive the large transmission ratio planetary gear reducer, be delivered to leading screw by shaft coupling, has adopted small angle inclination flexible hinge parallel-crank mechanism that horizontal shift is converted into the displacement of vertical direction again, to finish focusing.This focus adjusting mechanism can be used in the precision instrument and equipments such as projection mask aligner.
But, under limited space and very big load-up condition, reach other leveling and focusing precision of submicron order, above-mentioned structure can not meet the demands.
Summary of the invention
The object of the present invention is to provide a kind of leveling and focusing mechanism that satisfies big load-up condition, and can guarantee to satisfy other leveling and focusing precision of submicron order.
The present invention is achieved by the following technical solutions: a kind of leveling and focusing mechanism, comprise at least three soft readjustment mechanisms, realize lifting action by soft readjustment mechanism, wherein, two soft readjustment mechanisms are symmetrically distributed, it is characterized in that: soft readjustment mechanism comprise Z to regulate support, support Z to the leaf spring of regulating support, be fixed on the motor of Z on the lever of regulating support, be connected in that main drive shaft, frictionally on the motor shaft drive with the contacted cam of main drive shaft, the axle of described cam is fixed on Z on the holder of regulating support.
Main drive shaft is a barrel shaped structure.
Z comprises contiguous block, two sheets of flexible hinge, lever, holder to regulating support, wherein, contiguous block is connected to lever by flexible hinge, and lever is connected on the holder by flexible hinge, described holder comprises two I-shape constructions, is positioned at the latter half of holder.
Flexible hinge is a plum-shaped structure.By changing the elasticity that the flexible hinge physical dimension can change flexible hinge.The structure of a plurality of soft readjustment mechanism is identical.
The present invention still can obtain a higher mechanical eigenfrequency when the quality of load is very big.Cam rigidity is fine, transmitted power is very effective, and it is low to dissipate, and the fricative heat of cam is little.The indirect type of drive that lever forms, under big load, little stroke, compact conformation operating mode, can reach sub-micrometer precision by servocontrol, and solved coupled problem and perturbed force problem well, make the leveling and focusing system have noiseproof feature and dynamic property preferably, and realize easily.
Description of drawings
Fig. 1 is the location map of three soft readjustment mechanisms of the present invention;
Fig. 2 is the synoptic diagram of leveling and focusing servo loop of the present invention;
Fig. 3 is the synoptic diagram of soft readjustment of the present invention mechanism;
Fig. 4 is the front elevation of flexible hinge of the present invention;
Fig. 5 is the cut-open view of flexible hinge of the present invention along A-A.
Embodiment
Leveling and focusing mechanism of the present invention is used for making it accurately to keep in one plane in Z, Rx, the load of three direction adjusted of Ry.It comprises at least three soft readjustment mechanisms with same structure, and this soft readjustment mechanism has determined the performance of leveling and focusing, mainly is made of to regulating support, servomotor, inverted cam and leaf spring etc. Z.Z is a part to regulating support, is processed into parts such as contiguous block, lever, two flexible hinges and holder.Flexible hinge can change elasticity by changing physical dimension, and contiguous block is connected on the lever by it, and lever is connected on the holder by it.Contiguous block is used to connect load, and holder is used for Z is fixed to leaf spring to regulating support, comprises two I-shaped flexible structures in the holder.The several sensors detection of dynamic is passed through in the position that loads on Z, Rx and the Ry direction, feeds back to servomotor during fructufy.
In specific embodiments of the invention, adopted 3 drivings to regulate a load that surpasses 100kg, three soft readjustment Distribution of Institutions positions with same structure as shown in Figure 1, F
2, F
3The governor motion symmetry assembling at two places can reduce to load on the tilt quantity on Rx and the Ry direction.Another soft readjustment mechanism is at F
1The place.Load on Z to the position detect and feed back to servomotor by three capacitive transducers and control in real time, the processing of load and governor motion and rigging error are by feedforward compensation, servo loop as shown in Figure 2.Among the figure, K
p, K
vBe the parameter of PD controller, s is the complex variable of Laplace transform, and M is a quality.Sensor feeds back to the set-point after the physical location of controll plant, add the effect of perturbed force and servo force, by PD controller drives controll plant to desired location.
The structure of soft readjustment mechanism as shown in Figure 3.Servomotor is by main drive shaft 1 friction inverted cam 2, make it to rotate an angle, camshaft is fixed on Z on the holder 7 of regulating support, when main drive shaft 1 and motor from lifting, Z is to lever 6 lifting thereupon of regulating support, the contiguous block 4 that is fixed together by flexible hinge 5 liftings and load then, thus the position of load finally regulated.The such contiguous block in three places is used for allowing three Z of adaptive load when leveling and focusing (each Z is to the direction difference of regulating riding to regulating support inclination in different directions, but load is a rigid body, can only tilt to a direction), and net result to be the contiguous block 4 at three places respectively rotate an angle (direction that tilts with lever is opposite), make still maintenance level of load.In the adjustment process, produced coupling in the horizontal direction, made the elastic construction distortion of Z in the holder 7 of regulating support to be fixed on also real-time deformation of the leaf spring of Z below regulating support, so decoupling zero.The main drive shaft 1 that is connected with servomotor is made barrel-shaped, with the level that adapts to inverted cam 2 to inclination.I-shaped flexible structure 3 has partly been eliminated level that Z produces to coupling by elastic deformation when regulating support at leveling and focusing.
The structure of flexible hinge 5 as shown in Figure 4 and Figure 5, in the present embodiment, flexible hinge has adopted plum-shaped structure, in actual use, can change the elasticity of flexible hinge by the physical dimension that changes flexible hinge, to satisfy different needs.
Z among the present invention is two functions below the adjusting support has: and height (Z) of (1) regulating load and inclination (Rx, Ry); (2) load is fixed on the flexible support (leaf spring).
Z can avoid mechanical resonance well to the connection of regulating support, fixing and be adjusted in certain rigidity is arranged under certain bandwidth.This structure can not cause the hysteresis problem when regulating, and the stream time of this part also can meet the demands, and at Z an extreme lower position is arranged upwards by the structure proof load, this position assurance sensor can Mechanical Contact not arranged with load.Two I-shaped flexible structures of the latter half have partly been eliminated level that Z produces to coupling by elastic deformation when regulating support at leveling and focusing.
Servomotor is contained in Z on the lever construction of regulating support, and main drive shaft and inverted cam are by frictional fit, and camshaft is fixed on Z to regulating on the fixed part of support, and when regulating, motor drives lever work from lifting.Lever construction forms indirect drive form, when having solved leveling and focusing well to level to coupled problem and perturbed force problem, reduced the influence of THE CAM PROFILE ERROR exponentially, made the leveling and focusing system have noiseproof feature and dynamic property preferably, and realized easily degree of regulation.
Z is connected to holder and the leaf spring of regulating support.The function of leaf spring is as follows: (1) upwards supports Z to regulating support with very high rigidity at Z; (2) Z is fixed and makes it be easy to elastic deformation on X, Y direction to regulating support, be convenient to level to vertical decoupling zero; (3) changing Z when regulating support or installation load, on X, Y, three directions of Z, provide reference by location; (4) elimination of level is to the next error of thermal dilation belt; (5) when changing Z, prevent that sensor from contacting with load machinery to the adjusting support.
Through test, when load quality was 120kg, correlation parameter was as shown in the table:
When perturbed force was 10kg, the Z that drives indirectly under (the lever ratio is 4: 1) and direct driving (promptly without lever) mode to the error contrast was: 32nm and 5277nm at Z.
The present invention still can obtain a higher mechanical eigenfrequency when the quality of load is very big.Cam rigidity is fine, transmitted power is very effective, and it is low to dissipate, and the fricative heat of cam is little.The indirect type of drive that lever forms, under big load, little stroke, compact conformation operating mode, can reach sub-micrometer precision by servocontrol, and solved coupled problem and perturbed force problem well, make the leveling and focusing system have noiseproof feature and dynamic property preferably, and realize easily.
Claims (6)
1. leveling and focusing mechanism, comprise at least three soft readjustment mechanisms, realize lifting action by soft readjustment mechanism, wherein, two soft readjustment mechanisms are symmetrically distributed, it is characterized in that: soft readjustment mechanism comprise Z to regulate support, support Z to the leaf spring of regulating support, be fixed on the motor of Z on the lever of regulating support, be connected in that main drive shaft, frictionally on the motor shaft drive with the contacted cam of main drive shaft, the axle of described cam is fixed on Z on the holder of regulating support.
2. leveling and focusing mechanism according to claim 1 is characterized in that: main drive shaft is a barrel shaped structure.
3. leveling and focusing mechanism according to claim 1 and 2, it is characterized in that: Z comprises contiguous block, two sheets of flexible hinge, lever, holder to regulating support, wherein, contiguous block is connected to lever by flexible hinge, lever is connected on the holder by flexible hinge, described holder comprises two I-shape constructions, is positioned at the latter half of holder.
4. leveling and focusing mechanism according to claim 3 is characterized in that: flexible hinge is a plum-shaped structure.
5. leveling and focusing mechanism according to claim 3 is characterized in that: by changing the elasticity that the flexible hinge physical dimension can change flexible hinge.
6. leveling and focusing mechanism according to claim 1 is characterized in that: the structure of a plurality of soft readjustment mechanism is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101121150A CN100399093C (en) | 2005-12-27 | 2005-12-27 | Leveling and focusing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101121150A CN100399093C (en) | 2005-12-27 | 2005-12-27 | Leveling and focusing mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1837879A CN1837879A (en) | 2006-09-27 |
| CN100399093C true CN100399093C (en) | 2008-07-02 |
Family
ID=37015328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101121150A Active CN100399093C (en) | 2005-12-27 | 2005-12-27 | Leveling and focusing mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100399093C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101261455B (en) * | 2008-04-17 | 2010-06-02 | 上海微电子装备有限公司 | Device and method for photo-etching machine focusing system performance evaluation |
| CN109240042A (en) * | 2018-07-18 | 2019-01-18 | 电子科技大学 | A kind of SP photoetching electrostatic microspur suspension structure scheme exposed for non-contact, spot scan |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2371569Y (en) * | 1999-05-27 | 2000-03-29 | 中国科学院光电技术研究所 | Focusing mechanism |
| CN1670627A (en) * | 2005-02-23 | 2005-09-21 | 上海微电子装备有限公司 | Accurate adjustable positioning device |
-
2005
- 2005-12-27 CN CNB2005101121150A patent/CN100399093C/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2371569Y (en) * | 1999-05-27 | 2000-03-29 | 中国科学院光电技术研究所 | Focusing mechanism |
| CN1670627A (en) * | 2005-02-23 | 2005-09-21 | 上海微电子装备有限公司 | Accurate adjustable positioning device |
Non-Patent Citations (4)
| Title |
|---|
| 分步快速投影光刻机精密快速定位工件台研究. 谢传钵.光电工程，第23卷第4期. 1996 |
| 分步快速投影光刻机精密快速定位工件台研究. 谢传钵.光电工程，第23卷第4期. 1996 * |
| 柔性调平机构概念设计. 余志伟，于靖军，孙明磊，宗光华.北京航空航天大学学报，第31卷第7期. 2005 |
| 柔性调平机构概念设计. 余志伟，于靖军，孙明磊，宗光华.北京航空航天大学学报，第31卷第7期. 2005 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1837879A (en) | 2006-09-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6388733B1 (en) | Exposure apparatus with an anti-vibration structure | |
| US6327024B1 (en) | Vibration isolation apparatus for stage | |
| CN102043351B (en) | Leveling and focusing mechanism and mask platform with same | |
| US6538829B2 (en) | Optical element mount comprising an optical element holding frame | |
| CN107991901B (en) | Voice coil motor displacement actuator simulation platform | |
| US9760022B2 (en) | Lithography machine workpiece table and vertical position initialization method thereof | |
| WO2018076339A1 (en) | Six-degree-of-freedom microdisplacement regulating device for optical element, projection objective and lithography machine | |
| CN103278906B (en) | Axial vernier device for lens with flexible ring piece structure | |
| CN106338805B (en) | Optical element six-degree of freedom micro-displacement regulating device, projection objective and litho machine | |
| CN100399093C (en) | Leveling and focusing mechanism | |
| CN107942622B (en) | Three-degree-of-freedom precise adjustment parallel mechanism based on double flexible pairs | |
| CN101206410A (en) | Balance mass orientation system for workpiece platform | |
| CN103472555B (en) | Dual-motor optical element axial adjustment device | |
| EP2098750B1 (en) | Vibration suppression apparatus, exposure apparatus, and method of manufacturing device | |
| US20230365375A1 (en) | Rigid-flexible coupling mechanism with variable rod length for fibre bundle tension control | |
| CN107145041A (en) | Optical element six degree of freedom location adjusting device, projection objective and litho machine | |
| CN102809902B (en) | Balancing mass system of photoetching machine | |
| CN101042539A (en) | Hanger bearing image-forming system and light scribing device | |
| TWI721475B (en) | Workpiece stage system and photoetching equipment | |
| CN103901576A (en) | Fine adjustment mechanism of movable lens | |
| CN201170805Y (en) | Six-dimension intelligent adjusting device for optical platform | |
| CN107209463B (en) | Device for the operating element position especially in optical system | |
| CN1182541C (en) | Reactor control-rod driving mechanism with adjustable magnetic damper | |
| CN107664923B (en) | Micro-motion stage for photoetching motion stage system and control method thereof | |
| TWI712831B (en) | Optical device for a lithography apparatus and lithography apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI MICROELECTRONIC EQUIPMENT CO., LTD.; APP Free format text: FORMER OWNER: SHANGHAI MICROELECTRONIC EQUIPMENT CO., LTD. Effective date: 20070824 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20070824 Address after: 201203 Zhangjiang East Road, Zhangjiang hi tech park, Shanghai, No. 1525 Applicant after: Shanghai Micro Electronics Equipment Co., Ltd. Co-applicant after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Address before: 201203 Zhangjiang East Road, Zhangjiang hi tech park, Shanghai, No. 1525 Applicant before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee after: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525 Co-patentee before: Shanghai Micro And High Precision Mechine Engineering Co., Ltd. Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |
|
| CP01 | Change in the name or title of a patent holder |