CN100399005C - Manufacturing method of thermal shear stress sensor device based on vacuum bonding process - Google Patents
Manufacturing method of thermal shear stress sensor device based on vacuum bonding process Download PDFInfo
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- CN100399005C CN100399005C CNB2005100122387A CN200510012238A CN100399005C CN 100399005 C CN100399005 C CN 100399005C CN B2005100122387 A CNB2005100122387 A CN B2005100122387A CN 200510012238 A CN200510012238 A CN 200510012238A CN 100399005 C CN100399005 C CN 100399005C
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- Prior art keywords
- silicon
- shear stress
- silicon nitride
- nitride film
- stress sensor
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- 238000000034 method Methods 0.000 title claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 title abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 44
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 42
- 239000010703 silicon Substances 0.000 claims abstract description 42
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 29
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 22
- 229920005591 polysilicon Polymers 0.000 claims abstract description 22
- 238000005530 etching Methods 0.000 claims abstract description 14
- 238000005260 corrosion Methods 0.000 claims abstract description 9
- 230000007797 corrosion Effects 0.000 claims abstract description 9
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 238000001259 photo etching Methods 0.000 claims abstract description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000010931 gold Substances 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052796 boron Inorganic materials 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 238000004140 cleaning Methods 0.000 claims abstract description 3
- 230000008020 evaporation Effects 0.000 claims abstract description 3
- 238000001704 evaporation Methods 0.000 claims abstract description 3
- 239000010408 film Substances 0.000 claims description 34
- 238000005516 engineering process Methods 0.000 claims description 29
- 239000012528 membrane Substances 0.000 claims description 12
- 238000005498 polishing Methods 0.000 claims description 11
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 7
- 230000004224 protection Effects 0.000 claims description 7
- 229910018503 SF6 Inorganic materials 0.000 claims description 6
- 239000003292 glue Substances 0.000 claims description 6
- 238000000206 photolithography Methods 0.000 claims description 6
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims description 6
- 229960000909 sulfur hexafluoride Drugs 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000003628 erosive effect Effects 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000001117 sulphuric acid Substances 0.000 claims description 2
- 235000011149 sulphuric acid Nutrition 0.000 claims description 2
- 238000004377 microelectronic Methods 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
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Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100122387A CN100399005C (en) | 2005-07-21 | 2005-07-21 | Manufacturing method of thermal shear stress sensor device based on vacuum bonding process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2005100122387A CN100399005C (en) | 2005-07-21 | 2005-07-21 | Manufacturing method of thermal shear stress sensor device based on vacuum bonding process |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1900668A CN1900668A (en) | 2007-01-24 |
CN100399005C true CN100399005C (en) | 2008-07-02 |
Family
ID=37656598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005100122387A Expired - Fee Related CN100399005C (en) | 2005-07-21 | 2005-07-21 | Manufacturing method of thermal shear stress sensor device based on vacuum bonding process |
Country Status (1)
Country | Link |
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CN (1) | CN100399005C (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102817082B (en) * | 2011-06-08 | 2016-06-01 | 无锡华润华晶微电子有限公司 | A kind of preparation method of silicon fiml |
CN102519657B (en) * | 2011-11-22 | 2013-12-11 | 上海交通大学 | Two-dimensional vector flexible thermo-sensitive micro-shearing stress sensor, and array and preparation method thereof |
CN105140155B (en) * | 2015-07-15 | 2018-06-05 | 桂林电子科技大学 | A kind of method for adhering piece for GaAs MMIC reduction process |
CN108117041A (en) * | 2017-12-22 | 2018-06-05 | 中国科学院半导体研究所 | The preparation method of movable micro-nano structure based on dense boron-doping silicon |
CN110828626B (en) * | 2018-08-09 | 2021-02-26 | 上海新微技术研发中心有限公司 | Semiconductor structure and forming method thereof |
CN110868681B (en) * | 2019-11-29 | 2021-09-14 | 绍兴中芯集成电路制造股份有限公司 | MEMS microphone warpage compensation method and MEMS microphone wafer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6596624B1 (en) * | 1999-07-31 | 2003-07-22 | International Business Machines Corporation | Process for making low dielectric constant hollow chip structures by removing sacrificial dielectric material after the chip is joined to a chip carrier |
US20050017313A1 (en) * | 2002-08-07 | 2005-01-27 | Chang-Feng Wan | System and method of fabricating micro cavities |
CN1587993A (en) * | 2004-07-15 | 2005-03-02 | 上海交通大学 | Bragg raster hydrogen sensor and its preparing process |
-
2005
- 2005-07-21 CN CNB2005100122387A patent/CN100399005C/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6596624B1 (en) * | 1999-07-31 | 2003-07-22 | International Business Machines Corporation | Process for making low dielectric constant hollow chip structures by removing sacrificial dielectric material after the chip is joined to a chip carrier |
US20050017313A1 (en) * | 2002-08-07 | 2005-01-27 | Chang-Feng Wan | System and method of fabricating micro cavities |
CN1587993A (en) * | 2004-07-15 | 2005-03-02 | 上海交通大学 | Bragg raster hydrogen sensor and its preparing process |
Also Published As
Publication number | Publication date |
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CN1900668A (en) | 2007-01-24 |
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GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHA Free format text: FORMER OWNER: INST OF MICROELECTRONICS, C. A. S Effective date: 20130415 Owner name: INST OF MICROELECTRONICS, C. A. S Effective date: 20130415 |
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Free format text: CORRECT: ADDRESS; FROM: 100029 CHAOYANG, BEIJING TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20130415 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee after: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) Corp. Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee before: Institute of Microelectronics of the Chinese Academy of Sciences |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080702 Termination date: 20180721 |
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CF01 | Termination of patent right due to non-payment of annual fee |