CN100373721C - Ridge waveguide and two-D photonic crystal combined silicon-base Raman laser structure - Google Patents
Ridge waveguide and two-D photonic crystal combined silicon-base Raman laser structure Download PDFInfo
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- CN100373721C CN100373721C CNB2005100119007A CN200510011900A CN100373721C CN 100373721 C CN100373721 C CN 100373721C CN B2005100119007 A CNB2005100119007 A CN B2005100119007A CN 200510011900 A CN200510011900 A CN 200510011900A CN 100373721 C CN100373721 C CN 100373721C
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Abstract
The present invention relates to a silicon-based Longman laser structure with the combination of a ridge waveguide and a two-dimension photon crystal, which comprises SOI material, a ridge waveguide which is manufactured on the SOI material, a P type silicon which is manufactured on one side edge of the ridge waveguide, an N type silicon which is manufactured on the other side edge of the ridge waveguide, a rear reflecting mirror of a photon crystal, a front reflecting mirror of the photon crystal, wherein the rear reflecting mirror of the photon crystal is positioned on the rear end of the ridge waveguide and etched on the SOI material, and the front reflecting mirror of the photon crystal is positioned on the input end of the ridge waveguide and etched on the SOI material; a laser resonant cavity is formed from the front reflecting mirror of the photon crystal, the rear reflecting mirror of the photon crystal, and the ridge waveguide; the photon crystal performs a full reflection function.
Description
Technical field
The present invention is the silicon-base Raman laser structure that a kind of ridge waveguide combines with 2 D photon crystal, and with the end mirror of 2 D photon crystal as resonant cavity, the single mode ridge waveguide is made resonant cavity.
Background technology
On February 17th, 05, U.S.'s " nature " magazine has been reported first continuous wave silicon-base Raman laser (Haisheng Rong in the world, Richard Jones, Ansheng Liu, Oded Cohen, Dani Hak Alexander Fang, Mario Paniccia, A continuous-wave Raman siliconlaser, NATURE, 433 (2005) 725-728), this is the important milestone of silicon based opto-electronics device and integrated research thereof.
Being used for the main bottleneck of its development of semiconductor chip of deal with data at present is the arithmetic speed of chip, and the partly cause that causes this bottleneck is exactly the physical attribute of metal: there is resistance in metal, the arithmetic speed of limited chip; On the other hand, also can produce heat in the process of work.When the handling capacity of chip reaches when going up terabyte each second, the metal wire that uses is just not competent now, and replace metal wire with fiber waveguide, the propagation velocity of light in waveguide is more faster than the propagation velocity of electric current in metal wire, the light of different frequency can be propagated in same waveguide on the one hand in addition, has improved the transmission quantity of data so greatly.Fiber waveguide is mainly used in the side signal transmission face, then also is in conceptual phase for signal processing.
Present semiconductor chip is mainly by the silicon materials manufacturing, so silicon materials just become the first-selection of development optical signal processor, so, just can utilize existing ripe silicon technology batch process.But the ability of silicon aspect the control light signal is very limited, and the luminous efficiency of silicon is very low, therefore inserts laser in silicon materials, is a great challenge.On the contrary, make laser if use III-IV family material as active medium, it is integrated in the silicon again, mode makes that the cost of entire chip is too high in this, is difficult to the chip of realizing that large-scale production has economic benefit.People wish to develop a kind of silicon laser, and it is integrated in the chip, can produce the laser pulse that carries data message.
Graduate this achievement of Intel makes silicon based opto-electronics device and integrated research thereof march toward major step forward, the structure of the silicon-base Raman laser that they propose is that two end face coatings at ridge waveguide play the reflection of light effect, constitute the resonant cavity of laser with this, form an independent devices, see accompanying drawing 1, Fig. 2: device vertical view, entire device is to use with a slice silicon-on-insulator (SOI) material 11 to make, 12 is ridge waveguide, be serpentine, on 12 both sides are P-N knots, 13 N districts wherein for P-N knot, 14 P districts for the P-N knot, 15,16 for the multilayer in two end face platings of ridge waveguide increases anti-film, during laser works, pump light is coupled into ridge waveguide from the ridge waveguide front end face, and laser is exported from front end face.This kind structure has its shortcoming, need plate laminated reflective film at end face, and it is very high that the opposite end surface evenness requires, because at two end face coatings, this kind structure is unfavorable for integrated with other devices.And the present invention can address this problem.
Summary of the invention
The object of the present invention is to provide a kind of ridge waveguide to combine and constitute the silicon-base Raman laser structure of resonant cavity with 2 D photon crystal, this structure does not need at end face plating laminated reflective film, the opposite end surface evenness requires very low, and this kind structure is beneficial to integrated with other devices.
The silicon-base Raman laser structure that a kind of ridge waveguide of the present invention combines with 2 D photon crystal comprises:
One silicon-on-insulator material;
One ridge waveguide, this ridge waveguide is made on the silicon-on-insulator material;
One P type silicon, this P type silicon is produced on a side of ridge waveguide;
One N type silicon, this N type silicon is produced on another side of ridge waveguide;
Terminal reflector behind one photonic crystal, terminal reflector is positioned at the rear end of ridge waveguide behind this photonic crystal, is etched on the silicon-on-insulator material;
Terminal reflector is positioned at the input of ridge waveguide before the terminal reflector before one photonic crystal, this photonic crystal, is etched on the silicon-on-insulator material;
Terminal reflector and ridge waveguide are formed the resonant cavity of laser behind preceding terminal reflector of this photonic crystal and the photonic crystal, and photonic crystal plays the effect of completely reflecting mirror to light.
Wherein silicon-on-insulator material comprises: a silicon substrate; One silicon dioxide insulating layer, this silicon dioxide insulating layer is produced on the silicon substrate; One top layer silicon, this top layer silicon is produced on the silicon dioxide insulating layer.
Wherein the thickness of silicon dioxide insulating layer is the 1-2 micron, and the thickness of top layer silicon is the 1-5 micron.
Wherein ridge waveguide is the single mode waveguide that satisfies the ridge waveguide single mode condition, and the waveguide cross section is trapezoidal or rectangle, and integral body twist or rectangle or in a zigzag.
Wherein terminal reflector is triangular crystal lattice or square lattice behind preceding terminal reflector of photonic crystal and the photonic crystal, photonic crystal front end rows of mirrors number is got 4 and is drained into 6 rows, be incident chamber mirror, designed photonic crystal makes Raman light be positioned at the band gap place, and pump light is positioned at the passband place near band edge; The photonic crystal of terminal reflector row number is more than 7 rows, to the reflectivity height of flashlight and pump light behind the photonic crystal.
The present invention is etched with regularly arranged airport at the two ends of ridge waveguide be the structure that photonic crystal constitutes Raman laser, and this structure has following advantage:
1. this structure has very big flexibility, can realize by the physical dimension of adjusting the hole the different wave length reflection of light, and row's number in hole has determined the light reflectivity of corresponding wavelength.
2. make the resonant cavity that photonic crystals constitute laser at two end faces of ridge waveguide, can not will two end faces polishings of waveguide, plated film, reduced the complexity of technology.
3. laser resonant cavity has reduced the size of entire device twist.The quality factor in toroidal helical shape chamber is higher, more helps swashing lase.
4. adopt 2 D photon crystal higher than the reflectivity of one-dimensional grating as speculum, very high reflectivity is all arranged, and 2 D photon crystal is as integrated the created condition of chamber mirror for other devices of this laser and 2 D photon crystal in certain angular range.
5. with the speculum of photonic crystal as laser resonant cavity, photonic crystal can be etched in chip internal, apart from the edge certain distance, so be easy to integrate with other devices.
Description of drawings
In order to further specify content of the present invention and characteristics, below in conjunction with drawings and Examples the present invention is done a detailed description, wherein:
Fig. 1 is the structure vertical view of existing silicon-base Raman laser;
Fig. 2 is the photonic crystal structure vertical view that combines with ridge waveguide;
Fig. 3 is annular ridge waveguide and photon crystal reflecting mirror integrated structure vertical view;
Fig. 4 is the cross-sectional view of ridge waveguide and waveguide both sides P-N knot;
Fig. 5 is combine with the ridge waveguide schematic perspective view of the end face of silicon-base Raman laser that constitutes of photonic crystal.
Embodiment
See also shown in Figure 3ly, the silicon-base Raman laser structure that a kind of ridge waveguide of the present invention combines with 2 D photon crystal comprises:
One SOI material 1; This SOI material 1 comprises: a silicon substrate 9; One silicon dioxide insulating layer 8, this silicon dioxide insulating layer 8 is produced on the silicon substrate 9; One top layer silicon 7, this top layer silicon 7 is produced on the silicon dioxide insulating layer 8; The thickness of this silicon dioxide insulating layer 8 is the 1-2 micron, and the thickness of top layer silicon 7 is the 1-5 micron;
One ridge waveguide 2, this ridge waveguide 2 is made on the SOI material 1, and this ridge waveguide 2 is the single mode waveguide of the single mode condition that satisfies ridge waveguide, and the waveguide cross section is trapezoidal or rectangle, and integral body is twist or rectangle or in a zigzag or other shapes;
One P type silicon 3, this P type silicon 3 is produced on a side of ridge waveguide 2;
One N type silicon 4, this N type silicon 4 is produced on another side of ridge waveguide 2;
Wherein terminal reflector 6 is triangular crystal lattice or square lattice behind preceding terminal reflector 5 of photonic crystal and the photonic crystal, terminal reflector 5 row's numbers are less before the photonic crystal, get about 4 rows, are incident chamber mirror, designed photonic crystal makes Raman light be positioned at the band gap place, and pump light is positioned at the passband place near band edge; The photonic crystal of terminal reflector 6 row number is more behind the photonic crystal, is more than 7 rows, and is all very high to the reflectivity of flashlight and pump light.
Make SOI material 1 structure of ridged waveguide structure and form, see Fig. 4 and Fig. 5 by three parts, monocrystalline substrate 9, silicon dioxide insulating layer 8, thickness are the 1-2 micron, top layer silicon 7, thickness 3 μ m.Adopt photoetching and dry etching method on SOI material 1, to make a spiral ridge waveguide 2.Ridged waveguide structure sees also shown in Figure 4, ridge waveguide 2 is the big core diameter single-mode waveguide of square-section, also can be the big core diameter single-mode waveguide of trapezoid cross section, the ridge waveguide of big core diameter has higher coupling efficiency to the pump light of input, and integral body twist or other shapes.On the both sides of ridge waveguide 2 are a pair of P-N knots, promptly make the p type island region silicon 3 and the N type district silicon 4 of appropriate area respectively in ridge waveguide 2 both sides.N type silicon 2 and P type silicon 3 adopt ion injection method to form, and plate electrode at N type silicon 3 and P type silicon 4 upper surfaces, form PN junction.
The single chip integrated silicon-base Raman laser structure of being convenient to that described ridge waveguide combines with 2 D photon crystal has extensibility, terminal reflector 5 places are the input of pump light before the photonic crystal, it also is the output of flashlight, can be before photonic crystal the outside of terminal reflector 5 add a photon crystal reflecting mirror that tilts 45 ° of placements, flashlight can be reflected the vertical direction with the chamber, be convenient to integrated with other devices like this.
The parameter of terminal reflector 5 satisfies pump light is had high transmission before the photonic crystal, and flashlight is had the effect of higher reflection, and terminal reflector 6 parameters satisfy pump light and output laser are had high reflex behind the photonic crystal.The manufacture method of two photon crystal reflecting mirrors is as follows: the SiO of growth 200nm left and right thickness on the top layer silicon 7 of SOI
2, at SiO
2Go up the photoresist that evenly applies about 200nm, utilize the electron beam plating method on photoresist at location definition figure, then respectively with photoresist and SiO corresponding to the both ends of the surface of ridge waveguide
2Make mask dry etching method on top layer silicon 7 and form photon crystal structure, dry etching method can adopt reactive ion beam or inductively coupled plasma lithographic method, forms structure as shown in Figure 5, and dark circles is represented the airport of etching.As an example wherein, terminal reflector 5 lattices are taken as 0.26 λ, aperture 0.08 λ before the photonic crystal, terminal reflector 6 lattice constants 0.30 λ behind the photonic crystal, aperture 0.09 λ, the triangular crystal lattice that is arranged as of airport distributes, and the degree of depth of airport is the thickness of SOI top material layer silicon 7.The combination of 2 D photon crystal and ridge waveguide sees also shown in Figure 5: terminal reflector 6 lays respectively at the front end face and the rear end face place of ridge waveguide 2 behind preceding terminal reflector 5 of photonic crystal and the photonic crystal, and the direction of the airport of terminal reflector 6 is perpendicular to ridge waveguide 2 behind preceding terminal reflector 5 of photonic crystal and the photonic crystal.
Implementation procedure of the present invention is: in conjunction with consulting Fig. 3, Fig. 3 is the schematic diagram of the embodiment of the invention, when starting working, Raman laser between the N type silicon 3 of P-N knot and P type silicon 4, adds about 20V left and right sides voltage, pumping laser adopts the semiconductor laser of the 1550nm of Er ion amplifier amplification, the about 4W of power, pump light terminal reflector 5 incidents before the photonic crystal, 5 pairs of pump lights of terminal reflector have high transmission effect before the photonic crystal, pump light enters spiral ridge waveguide 2, the material silicon of ridge waveguide 2 is raman gain medium, pump light excites ridge waveguide 2 silicon materials to obtain stimulated Raman scattering light, terminal reflector 6 places behind the other end photonic crystal of pump light arrival ridge waveguide 2,6 pairs of pump lights of terminal reflector have high reflex behind the photonic crystal, pump light almost all is reflected back toward in the ridge waveguide 2, propagates in ridge waveguide 2 and amplifies, and obtains stronger stimulated Raman scattering light, terminal reflector 5 places before pump light arrives photonic crystal, the outgoing raman laser.Terminal reflector 5 and back terminal reflector 6 all have high reflex to the stimulated Raman scattering light in the ridge waveguide before the photonic crystal, 6 pairs of stimulated Raman scattering reflection of lights of terminal reflector rate reaches more than 99.99% behind the photonic crystal, 5 pairs of stimulated Raman scattering light of terminal reflector have the reflection about 70% before the photonic crystal, when the gain of ridge waveguide 2 medium during greater than loss, stimulated Raman scattering light is vibration back and forth in ridge waveguide 2, forms laser terminal reflector 5 places outgoing before photonic crystal.
The resonance wavelength of laser depends on the length of ridge waveguide 2, and two resonator surfaces of laser depend on before the photonic crystal behind the terminal reflector 5 and photonic crystal row's number of airport in the terminal reflector 6 to the reflectivity of pump light and laser, reflection wavelength depends on the size and the interval of airport, and we can satisfy the need of work of device by geometry designs.Ridge waveguide is not limited to curved shape shown in Figure 3, can be other shapes also, forms laser generation as long as satisfy Raman gain greater than the transmission optical loss.
Claims (5)
1. silicon-base Raman laser structure that ridge waveguide combines with 2 D photon crystal comprises:
One silicon-on-insulator material;
One ridge waveguide, this ridge waveguide is made on the silicon-on-insulator material;
One P type silicon, this P type silicon is produced on a side of ridge waveguide;
One N type silicon, this N type silicon is produced on another side of ridge waveguide;
Terminal reflector behind one photonic crystal, terminal reflector is positioned at the rear end of ridge waveguide behind this photonic crystal, is etched on the silicon-on-insulator material;
Terminal reflector is positioned at the input of ridge waveguide before the terminal reflector before one photonic crystal, this photonic crystal, is etched on the silicon-on-insulator material;
Terminal reflector and ridge waveguide are formed the resonant cavity of laser behind preceding terminal reflector of this photonic crystal and the photonic crystal, and photonic crystal plays the effect of completely reflecting mirror to light.
2. the silicon-base Raman laser structure that ridge waveguide according to claim 1 combines with 2 D photon crystal is characterized in that wherein silicon-on-insulator material comprises: a silicon substrate; One silicon dioxide insulating layer, this silicon dioxide insulating layer is produced on the silicon substrate; One top layer silicon, this top layer silicon is produced on the silicon dioxide insulating layer.
3. the silicon-base Raman laser structure that ridge waveguide according to claim 2 combines with 2 D photon crystal is characterized in that, wherein the thickness of silicon dioxide insulating layer is the 1-2 micron, and the thickness of top layer silicon is the 1-5 micron.
4. the silicon-base Raman laser structure that ridge waveguide according to claim 1 combines with 2 D photon crystal, it is characterized in that, wherein ridge waveguide is the single mode waveguide that satisfies the ridge waveguide single mode condition, and the waveguide cross section is trapezoidal or rectangle, and integral body twist or rectangle or in a zigzag.
5. the silicon-base Raman laser structure that ridge waveguide according to claim 1 combines with 2 D photon crystal, it is characterized in that, wherein terminal reflector is triangular crystal lattice or square lattice behind preceding terminal reflector of photonic crystal and the photonic crystal, photonic crystal front end rows of mirrors number is got 4 and is drained into 6 rows, be incident chamber mirror, designed photonic crystal makes Raman light be positioned at the band gap place, and pump light is positioned at the passband place near band edge; The photonic crystal of terminal reflector row number is more than 7 rows, to the reflectivity height of flashlight and pump light behind the photonic crystal.
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| CNB2005100119007A CN100373721C (en) | 2005-06-09 | 2005-06-09 | Ridge waveguide and two-D photonic crystal combined silicon-base Raman laser structure |
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| CNB2005100119007A CN100373721C (en) | 2005-06-09 | 2005-06-09 | Ridge waveguide and two-D photonic crystal combined silicon-base Raman laser structure |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US7561761B2 (en) * | 2007-01-03 | 2009-07-14 | Hewlett-Packard Development Company, L.P. | Photonic systems and methods for encoding data in carrier electromagnetic waves |
| WO2012061166A1 (en) * | 2010-10-25 | 2012-05-10 | Binoptics Corporation | Long semiconductor laser cavity in a compact chip |
| CN103018827B (en) * | 2012-12-25 | 2014-08-06 | 南京邮电大学 | High-Q-value miniature circular resonant cavity device and preparation method thereof |
| CN110265869B (en) * | 2018-10-15 | 2020-09-15 | 中国科学院半导体研究所 | Photonic crystal laser for display and imaging |
| CN114068736B (en) * | 2021-10-18 | 2023-06-02 | 武汉光谷信息光电子创新中心有限公司 | Photoelectric detector |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040026843A1 (en) * | 2001-04-02 | 2004-02-12 | Walter Roth | Device for the detachable mounting of workpieces on machinng devices |
| CN1547792A (en) * | 2001-07-05 | 2004-11-17 | 独立行政法人科学技术振兴机构 | Two-dimensional photonic crystal surface-emission laser |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040026843A1 (en) * | 2001-04-02 | 2004-02-12 | Walter Roth | Device for the detachable mounting of workpieces on machinng devices |
| CN1547792A (en) * | 2001-07-05 | 2004-11-17 | 独立行政法人科学技术振兴机构 | Two-dimensional photonic crystal surface-emission laser |
Non-Patent Citations (1)
| Title |
|---|
| A continuous-wave Raman silicon laser. Haisheng Rong et al.Nature,Vol.433 . 2005 * |
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