CN1003735B - Coordinate-measuring instrument - Google Patents
Coordinate-measuring instrument Download PDFInfo
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- CN1003735B CN1003735B CN85106054.4A CN85106054A CN1003735B CN 1003735 B CN1003735 B CN 1003735B CN 85106054 A CN85106054 A CN 85106054A CN 1003735 B CN1003735 B CN 1003735B
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention relates to a coordinate measuring apparatus. A measuring member is connected with workpieces to be measured, and the shape, etc. of the workpieces are measured by moving the measuring member. One support of the measuring apparatus is supported by a guide track, and the position of the support can be adjusted at the X axis direction and the Z axis direction. The other support can move at the direction of the guide track. A slide guide track is framed between the supports, and the position of the slide guide track can be adjusted at the X axis direction and the Z axis direction by a positional adjusting mechanism which is arranged on a connecting part between the slide guide track and the supports. When an adjusting member which is arranged on the slide guide track tightly contacts the supporting plane of a support member, the adjusted slide guide track does not move along the moving direction of a slide block.
Description
The present invention relates to a kind of coordinate measuring apparatus.In this coordinate measuring apparatus, measuring head can be two or morely moving on axially of intersecting vertically mutually, and as in bidimensional or 3 D measuring instrument, and the shape of measured workpiece etc. can be measured from this measuring head mobile.
Because the measuring accuracy height of two peacekeeping 3 D measuring instruments, they have been widely used in each industrial circle.In this two peacekeeping 3 D measuring instruments, can contact with the surface of measured workpiece at the measuring head that bidimensional or three-dimensional move, and from the moving of measuring head, measure the shape etc. of this workpiece.
This 3 D measuring instrument is equipped with a mechanism, can move on axially at the X that intersects vertically mutually, Y and Z by this mechanism's measuring head.
Can adopt a plurality of columns that are vertically mounted on the plate top surface in three mechanisms that are used for the traverse measurement head on axially, on these columns, be equipped with two parallel to each other at the upwardly extending guide rail of Y-axis, also can be on these guide rails at the upwardly extending beam crossbearer of X-axis along Y-axis to moving, slide is installed on the guide rail of this root beam and can moves along X axis, also have an axle to be installed on this slide and also can move axially along Z, a measuring head is fixed on the end of this root axle.In other words, above-mentioned entire mechanism is to constitute and position reference is substrate plate or other pedestal with stack manner.
Therefore, there is such shortcoming in traditional structure, and promptly pillar construction must bear load at measuring head when each coordinate moves axially, so this physical dimension is big and measurement range is very limited.In addition, each column will be perpendicular to base plate or similarly on the pedestal and require parallelly relatively to place.Have, the height of each column will accurately be processed and assemble again, and adjustment should reach micron dimension, will spend a large amount of work like this.
In addition, a main scale is installed on the base plate along the column moving direction, and the cuing scale relative with main scale is installed on the column, and the position of column is measured out by these chis.Yet, if main scale is placed, easily be damaged and be subjected to the pollution of surrounding environment up, will bring difficulty to the measuring position like this.
On the other hand, if main scale is placed towards side direction, though can avoid damaging and pollute, the locking button or the similar locking member that are used for locking column just must be installed in its end face, the result causes locking button etc. to be protruded upward by the end face of base plate, will make troubles to the loading, unloading measured workpiece like this.
In addition, each column should be perpendicular on base plate or the similar pedestal and require parallel staggered relatively, their height must accurately be processed and assemble, assemble mechanism subsequently by these column supportings, make it parallel with the Z axle and vertical with X, Y successively, and then after this assembling mechanism mixes up, each chi is installed is kept parallel with slide by predetermined tolerance, complex procedures requires the skill level very high like this.
This will cause the machining precision of a part very big to the overall precision influence.Do not proofread and correct at that time and improvement if defect occurs, finally cause all adjustment and assembling to carry out again in the starting stage.In addition, assembling workman's technical merit is very big to the overall precision influence.
UK Patent Application GB2112522 discloses a kind of coordinate measuring apparatus, and wherein carriage rail is by column supporting location and adjusting.But the disclosed structure of the document can not be avoided producing scale error on the column because of slide bumps against.
The object of the present invention is to provide a kind of coordinate measuring apparatus, make the end face of its base plate utilize enlarged areas to increase measurable scope, each column and carriage rail are convenient to assembling and are adjusted, and can not produce measuring error between the operating period and manufacturing expense is cheap.
The invention is characterized in that a kind of coordinate measuring apparatus comprises: pair of guide rails, they stretch out from the opposite flank of base plate; One column also can be moved along it by above-mentioned guide rail support; The carriage rail crossbearer is on these columns and can support a slide of being with measuring head movably; By the mobile shape etc. of measuring of measuring head, a column is bearing on the guide rail, can carry out the position adjustment on the direction that intersects vertically on perpendicular to the direction of plate top surface and with this vertical direction; Another column is bearing on another root guide rail, it can move on a guide rail direction and can not move in vertical direction, also has posture adjusting device, be installed in the connecting portion between carriage rail and each column, the posture that this posture adjusting device can be used to change carriage rail makes that measuring head at least can be two axial enterprising line position adjustment that intersect vertically mutually, when being contained in that the enterprising line position of carriage rail is regulated and fixing each regulating element and above-mentioned column when being in predetermined end in contact, the carriage rail that mixes up posture is fixed on the slide moving direction and can not moves.
Each accompanying drawing has shown a kind of embodiment of the present invention.
Fig. 1 is the general assembly front view;
Fig. 2 is the side view of Fig. 1;
Fig. 3 is the engagement state between guide rail and the column approach end;
Fig. 4 is the state that engages between guide rail and another column approach end;
Fig. 5 is a posture adjusting device;
Fig. 6 is the front view at the main position of carriage rail;
Fig. 7 is the cut-open view of Fig. 6 along VII-VII line;
Fig. 8 is the cut-open view of slide.
Put up with an embodiment below and be described, this embodiment is the situation that the present invention is applied to a kind of 3 D measuring instrument.
Fig. 1 illustrates the front view of 3 D measuring instrument and Fig. 2 is the side view of Fig. 1.Below with reference to these figure explanations, base plate 11 is the rectangle hexahedron, it is L shaped handle 13 that xsect is housed in its front and back, and guide rail 16 parallel to each other is installed on the relative side of base plate by the many fulcrums 15 that stretch out that meet at right angles of the side from base plate 11 along vertical (Y direction) of base plate 11 with 17.
Front and back ends at a guide rail 16 all is equipped with retainer 18, retainer 18 supporting one root post fine motion guide rail 19 before and after passing, and this guide rail and guide rail 16 are parallel and can move up in Y-axis.Rotary micromotion button 19A, this fine motion guide rail 19 can be in the Y-axis fine motion that makes progress.Vibroshock 20 is housed on the inside surface of each retainer 18, when on column 41 and 42, bumping, is used for absorbing vibration.
As shown in Figure 3, an above-mentioned guide rail 16 is contained on the top side location that is lower than base plate 11, and it is to stretch out from the side of base plate 11, and its xsect is rounded, at its lower surface a surface level part 21 is arranged.Main scale 22 is contained on the position of this surface level part 21.This chi constitutes a detector, is used for surveying column 41 in the position that Y-axis makes progress, and the scale of micron dimension is arranged on this chi.The junction piece 23 of an above-mentioned column 41 cooperates with guide rail 16, it is contained in the front and back ends of column along on the guide rail vertical (Y direction), one group of roller is respectively arranged, every group of roller comprises three rollers 24,25 and 26, these rollers can also have a micromotion mechanism 30 along its vertical rolling on the periphery of guide rail 16.
Roller 24,25 and 26 is arranged to make its normal separately to become 120 ° of orientation to place with respect to the periphery of guide rail 16, and wherein roller 24 is positioned on the end face of guide rail 16.Roller 24,25 and 26 can be made centering type, departs from scheduled volume of pivot 24A, 25A and 26A center of each roller.It is adjustable to adopt this arrangement mode, each roller 24,25 and 26 position on its normal to make, thereby each roller can be contacted reliably with guide rail 16.Micromotion mechanism 30 comprises the supporting sleeve 31 that is contained in the junction piece 23; Movably counterpart 32 is housed in this supporting sleeve 31, and the periphery of column fine motion guide rail 19 is slidingly matched with it; A locking button 33 is bearing on the supporting sleeve 31 pivotally, and what be used for mobile counterpart 32 to Fig. 3 right-handly becomes one when column fine motion guide rail 19 and column 41 are needed by counterpart 32.Threaded portion at locking button 33 front ends can be screwed on the counterpart 32, and button flatly stretches out from the side of junction piece 23.
On the other hand, as shown in Figure 4, the junction piece 27 of another column 42 cooperates with guide rail 17, and it is contained in the front and back ends of column along on the guide rail vertical (Y direction), and one group of roller is respectively arranged, and every group of roller comprises two rollers 28 and 29.These rollers 28 and 29 normal become 180 ° of orientation to place with respect to the periphery of guide rail 17, are placed on respectively on the end face and bottom surface of guide rail 17, and roller 28 and 29 can be made centering type, departs from scheduled volume of pivot 28A and 29A center of each roller.Adopt this arrangement mode, the position of roller 28 and 29 on its normal made adjustable, thereby each roller can be contacted reliably with guide rail 17.In this case, two rollers 28 and 29, just to make on axial (X-direction) of fulcrum 15 be movably to column 42.
The end that is used for supporting carriage rail 46 at pillar 41 and 42 is equipped with the posture that posture adjusting device 51 is used for changing carriage rail 46 respectively; The surface forms pressure-bearing surface 52 respect to one another within it.As shown in Figure 5, this posture adjusting device 51 comprises four posture regulators 53,54,55 and 56, and they are contained on each relative position of column 41 or 42 upper and lower of face before or after carriage rail 46; With screw 57, each screw 57 is contained on column 41 and 42 positions relative with the bottom surface of carriage rail 46, the bottom surface that is used for supporting carriage rail 46.In the posture regulator 53 to 56 each all is made of following part: be fixed on the reinforcing nut 58 on column 41 or 42, and the available locating sleeve of reinforcing in the nut 58 59 that is threaded into, its front end withstands the front or the back of carriage rail 46; With bolt 60, it passes locating sleeve 59 and is threaded with carriage rail 46.
On the other hand, as shown in Figure 6, carriage rail 46 is equipped with U-shaped regulating part 61 and 62 in its opposite end, and it can be regulated and the fixed position, and slide 71 is contained in the middle of them movably.As shown in Figure 7, each regulating part 61 and 62 composed as follows: first a L shaped regulating part 63, nestle up the front and the bottom surface of carriage rail 46, I shape second regulating part 64 nestles up the back of carriage rail 46; With a bolt 65, it passes the top of carriage rail 46 screw-ins first regulating part 63 and fixes from the top of second regulating part 64.Adopt this arrangement, first and second regulating parts 63 and 64 can carry out the position adjustment with respect to carriage rail 46.In addition, each part in first and second regulating parts 63 and 64 all is provided with abutted surface 66, and the pressure-bearing surface 52 that forms on this face and column 41 and 42 is relative.This abutted surface 66 contacts Face to face with pressure-bearing surface 52, so that when slide move, owing to it starting, stop and reason such as collision can not take place at the thread pitch place become flexible.All being provided with screw jack 67 on each part in first and second regulating parts 63 and 64 is used to place bolt 68 pressure-bearing surface 52 of win regulating part 63 or second regulating part 64 and column 41 or 42 is fastened.In addition, the slightly larger in diameter of each screw jack 67 is in the diameter of bolt 68, so that when adjusting the posture of carriage rail 46, first and second regulating parts 63 and 64 can be fastened on column 41 and 42.
In addition, as Fig. 6 and shown in Figure 8, four rollers 72 to 75 are housed on the relative side of slide 71, they roll on the edge of the front and back of carriage rail 46; Also have two rollers 76 and 77 in addition, they roll on the end face of carriage rail 46 and bottom surface.A position sensor 79 is housed in slide 71, and this detector matches with being installed in the main scale 78 of carriage rail 46 back on vertically, is used for surveying the position of slide 71.Micromotion mechanism 80 is housed above slide 71 because the moving of slide fine motion guide rail 48, this micromotion mechanism 80 can be on X axis fine motion slide 71, on the front of slide, fix an axle supporting base 91.Micromotion mechanism 80 comprises bearing 81, and it is fixed on the slide 71; A counterpart 82 is installed in this bearing 81 movably, and can be slidingly matched with slide fine motion guide rail 48; Locking button 83 is used for mobile counterpart 82 on the direction that intersects vertically with slide fine motion guide rail 48, becomes one when by this counterpart 82 slide fine motion guide rail 48 and slide 71 being needed.Micromotion mechanism 80 substantially be installed in junction piece 23 in the structure of micromotion mechanism 30 the same.
Axle supporting base 91 is equipped with an axle 92, it can be on the direction that intersects vertically respectively with guide rail 16,17 and carriage rail 46 vertical moving (Z-direction), on a side of its underpart, lock button 93 in conjunction with being equipped with, be used on the position of needs, pinning axle 92 by screw thread.An activation signal probe 94 is fixed on the bottom of axle 92 as measuring head.
To be described with regard to the assembling and the method for adjustment of present embodiment below.At first, column 41 and 42 is bearing on two guide rails 16 and 17 of base plate 11, make its end face vertical with base plate 11, parallel to each other and separately by predetermined distance, adjust the posture of the carriage rail 46 of crossbearers on two columns 41 and 42 subsequently with posture adjusting device 51.
In order to carry out this adjustment, at first a standard-sized object is installed on the base plate 11, adjust as follows afterwards: each bolt 60 that unclamps on the posture regulator 53 to 56 arrives suitable degree.Straight line moves each locating sleeve 59 and screw 57, X-axis and Z on axially respectively accurately mobile activation signal probe 94 contact with standard-sized object.
After finishing above-mentioned adjustment, first regulating part 63 in the regulating part 61 and 62 and the abutted surface 66 of second regulating part 64 are fastened on each pressure-bearing surface 52 of column 41 and 42, with bolt 68 inserting bolt jacks 67, whereby first and second regulating parts 63 and 64 are fixed on column 41 and 42 afterwards.
Then, be fastenedly connected each bolt 65 of first and second regulating parts 63 and 64, the abutted surface 66 by regulating part 61 and 62 is fastening with the pressure-bearing surface 52 of column 41 and 42, and carriage rail 46 and column 41 and 42 are fixed together.
When finishing by above-mentioned adjusting, the same with traditional 3 D measuring instrument, activation signal probe 94 can move at three-dimensional, in turn contacts with measured workpiece, measures each size, shape of this workpiece etc.
In this case, even owing to slide 71 bumps against on regulating part 61 and 62 moving on the X axis, between regulating part 61,62 and column 41,42, can not produce scale error, this is because the abutted surface 66 of regulating part 61 and 62 and the pressure-bearing surface 52 of column 41 and 42 tighten together, thereby can not influence measuring accuracy.
In the present embodiment, because column 41 and 42 is side supports by base plate 11, the whole area of the end face of base plate 11 all is effective measured zone like this, thereby can do forr a short time by the base plate 11 that the stone or the materials similar of costliness makes.In like manner, the manufacturing cost of measuring instrument also can descend, and then measuring instrument can be undersized, and installing space also can reduce like this.In addition, owing on the end face of base plate 11, do not have barrier, unrestricted with the loading, unloading that cause workpiece, even can install than the also big workpiece of base plate 11 end faces, the posture of An Zhuaning is also unrestricted in addition.The whole surface of base plate 11 is opened wide, and the position that the operator stood is unrestricted, thereby very easy to use.The overall dimensions of measuring instrument is little, is convenient to move.
In addition, the xsect of above-mentioned guide rail 16 is rounded, and a surface level part 21 is arranged in its bottom surface, and main scale 22 is fixed on this surface level 21, and main scale 22 neither can damage like this, does not also have pollutant and is stained with on the main scale 22, can protect main scale 22 like this.
Have again, three rollers 24 to 26 and an above-mentioned guide rail 16 120 ° of orientation are at interval arranged and wherein roller 24 places the top of guide rail 16, the load of this structure can be stably sustained and locking button 33 and similar locking device can be fixed on the side of junction piece 23 like this, thereby locking button 33 etc. can not stretch out from the end face of base plate 11, and the loading and unloading of workpiece can not met difficulty like this.
Three rollers 24 to 26 are arranged as the aforementioned like that with the position relation of an above-mentioned guide rail 16, and relative another guide rail 17 with 29 of two rollers 28 is arranged in vertical direction each other in 180 ° of orientation, so column 41 and 42 can carry out by the offset of regulating roller 24,25,26,28 and 29 independent of one another in the adjustment on the X axis and their adjustment on Z is axial.Adopt this arrangement mode, reach relatively easy many of the adjusting operation of micron dimension.
After total installed, the accurate adjusting by activation signal probe 94 finished itself.Use posture adjusting device 51 to adjust, do not need senior package technique in very short time, just can finish assembly working like this.In addition, high-precision part reduces owing to can adjust therefore after assembling, and is easy to adjust, guaranteeing that manufacturing cost descends widely under the prerequisite of precision, owing to also adjust easily, improved the transport performance of instrument like this when transportation.
In addition, it is by regulating part 61 and 62 rather than by posture adjusting device that carriage rail 46 is fixed on column 41 and 42, and it must not be moved on the moving direction of slide 71.Therefore, even owing to reasons such as moving of slide 71 cause slide 71 to bump against regulating part 61 and 62, at regulating part 61,62 and column 41, can not produce scale error between 42 yet, this is because regulating part 61 and 62 abutted surface 66 are fastened to the cause on the pressure-bearing surface 52 of column 41 and 42, therefore can not influence accuracy of measurement.
In the above-described embodiments, described a kind of contact type measurement header structure, promptly the activation signal probe 94, yet according to needs of the present invention, not necessarily be limited to this measuring head, also can use other contact type measurement head, for example electrostatic capacitive measuring head, laser measuring apparatus or similar measuring head.
The present invention not necessarily is limited to 3 D measuring instrument, also can be used for the two-dimensional measurement instrument, and wherein measuring head is made on three one of axial directions and can not be moved, or is used for the measuring instrument of other type, for example profile measurer.But the present invention is used on the 3 D measuring instrument, especially for best results on the high measuring instrument of large scale and manufacturing cost.
As described above, effective utilization of its plate top surface of coordinate measuring apparatus provided by the invention is improved; Widened measurement range; The difficulty of work-handling is resolved.In addition, the assembling of column, carriage rail etc. and adjustment are carried out easily, and can not produce error during use.
Claims (21)
1, a kind of coordinate measuring apparatus comprises:
Pair of guide rails is stretched out from the opposite flank of base plate;
One column is bearing on the above-mentioned pair of guide rails, and can move along this guide rail; With
A carriage rail, crossbearer and support a slide that has measuring head movably on an above-mentioned column;
An above-mentioned column is bearing on the above-mentioned guide rail, makes it can carry out the position adjustment on perpendicular to the direction that above-mentioned plate top surface direction reaches and above-mentioned direction intersects vertically;
Another above-mentioned column is bearing on another above-mentioned guide rail, it can be moved on an above-mentioned guide rail direction and can not move in vertical direction; Also comprise
Posture adjusting device, be installed on each connecting portion between above-mentioned carriage rail and above-mentioned each column, the posture that this posture adjusting device can be used to change above-mentioned carriage rail makes that above-mentioned measuring head at least can be two axial enterprising line position adjustment that intersect vertically mutually, wherein, go out the shape of workpiece etc. by the traverse measurement of above-mentioned measuring head, when the invention is characterized in that can carry out position adjustments and each regulating element of fixing and above-mentioned each column on being contained in carriage rail is in predetermined end in contact, the carriage rail that mixes up posture is fixed on the slide moving direction and must not moves, above-mentioned regulating element and the end in contact between the column form as follows: the pressure-bearing surface that forms on two columns that are disposed opposite to each other is with relative with it, the abutted surface that is located on the above-mentioned regulating part abuts one another together, each above-mentioned pressure-bearing surface be with the direction that axially intersects vertically of above-mentioned carriage rail on stretch.
2, according to the described a kind of coordinate measuring apparatus of claim 1, it is characterized in that above-mentioned its xsect of a guide rail is rounded, there is a surface level partly to be used for fixing a main scale in its bottom surface.
3, by the described a kind of coordinate measuring apparatus of claim 2, it is characterized in that an above-mentioned column by three roller bearings on an above-mentioned guide rail, each normal of roller becomes 120 ° of orientation to arrange with respect to the periphery of above-mentioned guide rail, above-mentioned each roller can become eccentric state, and one of them roller is in the tip position of above-mentioned track cross-section.
4,, it is characterized in that the xsect of another above-mentioned guide rail totally is two roller bearings of another circular, above-mentioned column by becoming 180 ° of orientation to arrange in vertical direction by the described a kind of coordinate measuring apparatus of claim 1.
5, by the described a kind of coordinate measuring apparatus of claim 1, it is characterized in that above-mentioned posture adjusting device is installed in respectively on each above-mentioned column, each posture adjusting device comprises:
Four posture regulators are arranged on the position relative with the upper and lower of the front or rear face of above-mentioned carriage rail, can carry out the position adjustment with respect to above-mentioned carriage rail; With
A screw is used to support the bottom surface of above-mentioned carriage rail and can move point-blank.
6, by the described a kind of coordinate measuring apparatus of claim 5, it is characterized in that above-mentioned posture regulator comprises:
A nut is fixed on the column;
A locating sleeve is connected with above-mentioned nut thread, nestles up above-mentioned carriage rail at its front end; With
A bolt can pass above-mentioned locating sleeve with being threaded onto on the above-mentioned carriage rail.
7, by the described a kind of coordinate measuring apparatus of claim 1, it is characterized in that above-mentioned regulating part takes the shape of the letter U, above-mentioned carriage rail is included in this U-shaped spare, and the top of above-mentioned U-shaped web member is connected to each other by a bolt, and above-mentioned whereby regulating part is fixed on the above-mentioned carriage rail.
8, by the described a kind of coordinate measuring apparatus of claim 7, it is characterized in that above-mentioned regulating part is to be combined by L shaped first regulating part and I type second regulating part.
9, by the described a kind of coordinate measuring apparatus of claim 7, it is characterized in that above-mentioned regulating part with bolt to above-mentioned abutted surface.
10, by the described a kind of coordinate measuring apparatus of claim 1, it is characterized in that a column micromotion mechanism is installed in the bottom of an above-mentioned column, stretch with the end face of a locking button forming above-mentioned micromotion mechanism from above-mentioned base plate, its direction that stretches is not that this locking button is stretched out from end face.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN85106054.4A CN1003735B (en) | 1985-08-10 | 1985-08-10 | Coordinate-measuring instrument |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN85106054.4A CN1003735B (en) | 1985-08-10 | 1985-08-10 | Coordinate-measuring instrument |
Publications (2)
Publication Number | Publication Date |
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CN85106054A CN85106054A (en) | 1987-04-01 |
CN1003735B true CN1003735B (en) | 1989-03-29 |
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ID=4794856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN85106054.4A Expired CN1003735B (en) | 1985-08-10 | 1985-08-10 | Coordinate-measuring instrument |
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CN (1) | CN1003735B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102010046927A1 (en) * | 2010-09-29 | 2012-03-29 | Carl Zeiss Industrielle Messtechnik Gmbh | Walk-in cover for a coordinate measuring machine |
EP3274654B1 (en) | 2015-03-26 | 2020-04-29 | Carl Zeiss Industrielle Messtechnik GmbH | Method, device and computer program product for determining dimensional properties of a measured object |
CN107548449B (en) * | 2015-04-21 | 2019-11-12 | 卡尔蔡司工业测量技术有限公司 | Method and apparatus for determining the actual size feature of measurand |
EP3901563B1 (en) * | 2020-04-21 | 2022-12-14 | Carl Zeiss Industrielle Messtechnik GmbH | Method and device for determining a measuring strategy for measuring a measurement object and program |
CN112284313B (en) * | 2020-10-27 | 2022-02-18 | 深圳市勤丽华铖科技有限公司 | High-precision double-measuring-head measuring block comparator |
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1985
- 1985-08-10 CN CN85106054.4A patent/CN1003735B/en not_active Expired
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