CN100363775C - Light interference display panel and its mfg. method - Google Patents
Light interference display panel and its mfg. method Download PDFInfo
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- CN100363775C CN100363775C CNB031577997A CN03157799A CN100363775C CN 100363775 C CN100363775 C CN 100363775C CN B031577997 A CNB031577997 A CN B031577997A CN 03157799 A CN03157799 A CN 03157799A CN 100363775 C CN100363775 C CN 100363775C
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Abstract
The present invention relates to an optical interference type display panel which comprises a base plate, an optical interference type reflection structure and a protective structure, wherein the optical interference type reflection structure comprises a plurality of variable color pixel units which are formed on the base plate, the protective structure is stuck to the base plate by sticking materials, and the optical interference type reflection structure is covered between the protective structure and the base plate. In this way, the sticking materials can be used for preventing the invasion of water, dust or oxygen in the air, and the protective structure is also used for reducing the damage chances of the optical interference type reflection structure because of external force collision.
Description
Technical field
The present invention relates to a kind of flat-panel screens and manufacture method thereof, and be particularly related to a kind of light interference type display panel and manufacture method thereof.
Background technology
Flat-panel screens is owing to have little, the lightweight characteristic of volume, at portable display device, and very advantageous in the monitor market of using, little space.Flat-panel screens is now removed LCD (LiquidCrystal Display, LCD), organic electric exciting light-emitting diode display (OrganicElectro-Luminescent Display, OLED) and plasma scope (Plasma Display Panel, PDP) or the like outside, a kind of plane display mode of light interference type that utilizes is suggested.
This one has low power consumption, quick response (Response Time) and bistable state characteristics such as (Bi-Stable) in itself by the formed display of light interference type changeable colour pixel unit array, the panel of display will be can be applicable to, particularly in the application of portable (Portable) product, for example mobile phone (MobilePhone), PDA(Personal Digital Assistant), portable computer (Portable Computer) or the like.
See also United States Patent (USP) the 5th, 835, No. 255, this patent has disclosed the adjustment element (Arrayof Modulation) of a visible light, and promptly a changeable colour pixel unit is used as flat-panel screens.See also Figure 1A, Figure 1A is the diagrammatic cross-section of existing changeable colour pixel unit.Each changeable colour pixel unit 100 is formed on the substrate 110, comprises twice wall (Wall) 102 and 104, and 102,104 on twice wall is supported by stilt 106 and forms a chamber (Cavity) 108.The distance that the twice wall is 102,104, just the length of chamber 108 is D.Wall 102 is a smooth incident electrode, has absorptivity, but the absorption portion visible light.104 on wall is a smooth reflecting electrode, utilizes driven can make it produce deformation.
Usually utilize the incident light source of white light as this changeable colour pixel unit 100, white light is blended together by the light of various different wave lengths in the visible light spectrum scope (Wave Length represents with λ).When incident light passes wall 102 and when entering in the chamber 108, only has the incident light of coincidence formula 1.1 medium wavelengths restriction to produce constructive interference and the output that is reflected in cavity 108, wherein N is a natural number.In other words,
2D＝Nλ
1 (1.1)
When the double length 2D of chamber 108 satisfies lambda1-wavelength λ
1Integral multiple the time, can make this lambda1-wavelength λ
1In this chamber 108, produce constructive interference, and export this wavelength X
1Reflected light.At this moment, observer's eyes are observed along the direction of incident light incident wall 102, can see that wavelength is λ
1Reflected light, therefore, for changeable colour pixel unit 100, it is in "open" state, is a bright attitude state.
Figure 1B illustrates the diagrammatic cross-section of changeable colour pixel unit 100 after adding voltage among Figure 1A.Please refer to Figure 1B, under the driving of voltage, wall 104 can produce deformation because of electrostatic attraction, sinks to the direction of wall 102.At this moment, the distance that the twice wall is 102,104, just the length of chamber 108 is also non-vanishing, but is d, and this d can equal zero.
That is to say that the D in the formula 1.1 will replace with d, in the wavelength of all light, the wavelength (λ of coincidence formula 1.1 is only arranged in the incident light
2) can in chamber 108, produce constructive interference, penetrate wall 102 and export via the reflection of wall 104.In this changeable colour pixel unit 100, it is λ that wall 102 is designed to wavelength
2Light have higher absorptivity, so all light in the incident light are all by filtering, the observer for observing along the direction of incident light incident wall 102 will can not see that any light is reflected out.Therefore, this moment, it was in "off" state, is a dark attitude state for changeable colour pixel unit 100.
As mentioned above, under the driving of voltage, wall 104 can produce deformation because of electrostatic attraction, sinks to the direction of wall 102, makes this changeable colour pixel unit 100 switch to "off" state by "open" state.And when changeable colour pixel unit 100 will be switched to the state of " opening " by "off" state, then must remove earlier in order to drive the voltage of wall 104 deformation, then, deformation restoring force own paddles one's own canoe, the wall 104 that loses the electrostatic attraction effect can revert to the original state as Figure 1A, makes this changeable colour pixel unit 100 present a "open" state.
Yet, above-mentioned light reflecting electrode (wall 104) is a thin layer (Membrane), its material is generally metal material, and (Micro Electro Mechanical System, MEMS) sacrificial layer technology in is made normally to utilize the micro electromechanical structure system.The thickness of this light reflecting electrode is extremely thin, therefore is very easy to just cause damage because of a little the touching of external force, thereby influences the ability of its actuating.And chamber 108 is a clearance (Air Gap), in order to above-mentioned two electrodes in interval (wall 102 and wall 104).Yet, in practical application, but damage the display quality of this changeable colour pixel unit 100 because of the influence of external environment through regular meeting.
For instance, airborne hydrone is very easy to be adsorbed in the chamber 108, because the length D of chamber 108 generally can be less than 1 μ m, therefore the hydrone of absorption can produce unnecessary electrostatic attraction between two electrodes, when this changeable colour pixel unit 100 will present the state of one " opening ", but can be because of the electrostatic attraction of hydrone, allow two electrodes adsorb mutually and be close together, make this changeable colour pixel unit 100 present one on the contrary state of " pass ".Perhaps, dust in air also may be adsorbed among the chamber 108, hinders the normal switch operation of light reflecting electrode.In addition, after airborne oxygen touches this two electrode, also can this two electrode of oxidation, thereby change the optics or the electric characteristics of this two electrode.
Summary of the invention
Purpose of the present invention just provides a kind of light interference type display panel, is not subjected to the destruction of external environment in order to protection light interference reflection structure wherein.
Another object of the present invention just provides a kind of light interference type display panel, is subjected to the chance that airborne hydrone, dust or oxygen destroy in order to the light interference reflection structure that reduces wherein.
Another purpose of the present invention just provides a kind of light interference type display panel, in order to the display quality of raising light interference type display panel, and increases its fiduciary level and prolongs its serviceable life.
According to above-mentioned purpose of the present invention, a kind of light interference type display panel is proposed, comprise a substrate, a light interference reflection structure and a protection structure.Light interference reflection structure comprises several changeable colour pixel units, is formed on the substrate.The protection structure is utilized a sticky material and base plate bonding, and light interference reflection structure is coated among both.So not only can utilize the invasion of sticky material, and utilize the protection structure to reduce light interference reflection structure and touch the chance that is damaged because of being subjected to external force with obstruct water in air molecule, dust or oxygen.
According to a preferred embodiment of the present invention, light interference reflection structure comprises several changeable colour pixel units.Sticky material will be protected the sealing all around of the adhesive surface of structure and substrate.The external form of protection structure is a slab construction, and a for example glass substrate, or other material is the substrate of glass, plastics, organic or inorganic macromolecular material.Sticky material is UV glue, hot-setting adhesive or other sticker.And, can add separation material (spacer) in the sticky material.In another preferred embodiment, the external form of protection structure also can be a ㄇ font structure.
The invention provides a kind of manufacture method of light interference type display panel, it is characterized in that, comprise following steps at least: a substrate is provided; Form a light interference reflection structure on this substrate; And utilize protection structure and this base plate bonding, make this interference of light reflection configuration between this protection structure and this substrate.
Manufacture of the present invention at first forms first electrode and sacrifice layer in regular turn on a substrate, form opening again and form stilt within it to be applicable in first electrode and sacrifice layer.In opening, form stilt, and then form second electrode on sacrifice layer and stilt.Remove sacrifice layer and form a chamber with a structure release etch processing procedure (Release Etch Process) again.Then, utilize a bonding protection structure and the substrate of sticky material, and when bonding, the pressing process that can impose makes the bonding more tight of protection structure and substrate.In addition, if utilize hot-setting adhesive, then can add a heating process, hot-setting adhesive can be heated and fix as sticky material.
Light interference type display panel of the present invention provides protection structure and a base plate bonding, and light interference reflection structure is coated on wherein, can avoid so directly touching because of external force and destroy light interference reflection structure.And, utilize that employed sticky material seals light interference reflection structure when bonding, can effectively avoid external environment, for example airborne hydrone, dust or oxygen, touch light interference reflection structure and produce electrostatic attraction or its metallic film of oxidation, and destroy its optics or electric characteristics.Therefore, the present invention can promote the display quality of light interference type display panel, reduces the incidence of defective, and prolongs the life-span of its use.
Description of drawings
Below in conjunction with accompanying drawing the specific embodiment of the present invention is described in further detail.
In the accompanying drawing,
Figure 1A is the diagrammatic cross-section of existing changeable colour pixel unit;
Figure 1B is the diagrammatic cross-section of changeable colour pixel unit 100 after adding voltage among Figure 1A;
Fig. 2 A is the diagrammatic cross-section of a preferred embodiment of the present invention;
Fig. 2 B is the diagrammatic cross-section of another preferred embodiment of the present invention; And
Fig. 3 A to Fig. 3 B is the manufacture method according to a preferred embodiment of the present invention.
Embodiment
In order to protect light interference reflection structure in the light interference type display panel not to be subjected to the destruction of external environment, the present invention proposes a kind of light interference reflection structure.
Light interference type display panel of the present invention comprises a substrate, a light interference reflection structure and a protection structure.Light interference reflection structure comprises several changeable colour pixel units, is formed on the substrate.The protection structure is utilized a sticky material and base plate bonding, and light interference reflection structure is coated among both.So not only can utilize the invasion of sticky material, and utilize the protection structure to reduce light interference reflection structure and touch the chance that is damaged because of being subjected to external force with obstruct water in air molecule, dust or oxygen.
Fig. 2 A is the diagrammatic cross-section of a preferred embodiment of the present invention.Light interference reflection structure is made up of several changeable colour pixel units, in order to represent conveniently only with a variable pixel unit 100, to represent the light interference reflection structure in the light interference type display panel of the present invention in explanation and figure.Shown in Fig. 2 A, a dull and stereotyped protection structure 200a utilizes sticky material 202 and substrate 110 to bind, and wherein this substrate 110 can for example be the substrate of a glass substrate or a pair of visible transparent.Like this, flat board protection structure 200a just can reduce the chance that external force touches changeable colour pixel unit 100.
And; in this embodiment; sticky material 202 is protected flat board the sealing all around of the adhesive surface of structure 200a and substrate 110, makes that changeable colour pixel unit 100 and external environment are isolated, the damage changeable colour pixel unit 100 to avoid airborne hydrone, dust or oxygen to invade.
As mentioned above, airborne hydrone is if enter the chamber 108 of changeable colour pixel unit 100, because the distance D of chamber 108 is quite little, so the change that the electrostatic attraction of hydrone can be relative is big, the problem that causes the switch of changeable colour pixel unit 100 to switch smoothly.If oxygen touches the metallic film in the changeable colour pixel unit, for example light incident electrode and light reflecting electrode, then because the very easy oxidation of metallic film, so oxygen can the oxidized metal film, and destroys the optics and the electric characteristics of changeable colour pixel unit 100.
Sticky material among the present invention can be hedged off from the outer world the changeable colour pixel unit when bonding protection structure and substrate in the lump, and isolated degree is high more, and it is good more to prevent that then the changeable colour pixel unit is subjected to the extraneous effect of destroying.According to a preferred embodiment of the present invention, when mode bonding protection structure and the substrate of sticky material with sealing, when being sealed in the changeable colour pixel unit wherein fully, this moment fiduciary level and the serviceable life of changeable colour pixel unit all can significantly be promoted.
In this embodiment, dull and stereotyped protection structure 200a is a glass substrate, or other material is the substrate of glass, plastics, organic or inorganic macromolecular material.Sticky material 202 uses UV glue or hot-setting adhesive.Yet other sticky material that is applicable to bonding dull and stereotyped protection structure 200a and substrate 110 also can apply to not limited by present embodiment among the present invention.
In addition, it should be noted that dull and stereotyped protection structure 200a with substrate 110 when bonding, usually can be through a pressing process, impose one and defeat to close dull and stereotyped protection structure 200a is being bonded together more closely with substrate 110.For fear of when the pressing; dull and stereotyped protection structure 200a damages the wall 104 of changeable colour pixel unit 100 by pressure; or being subjected to the situation that external force produces skew or tilts toward the substrate place after avoiding when protecting structure, the present invention also can add separation material (spacer) in sticky material 202.
Fig. 2 B is the diagrammatic cross-section of another preferred embodiment of the present invention.In this embodiment, protection structure provided by the present invention is ㄇ font protection structure 200b, and this ㄇ font protection structure 200b one has the slab construction of extending sidewall.Same; ㄇ font protection structure 200b utilizes sticky material 202 and substrate 110 bonding; so not only can reduce the chance that external force touches changeable colour pixel unit 100, and can avoid airborne hydrone, dust or oxygen to invade and damage changeable colour pixel unit 100.
Fig. 3 A to Fig. 3 B is the manufacture method synoptic diagram of the preferred embodiment of Fig. 2 A.As previously mentioned, conveniently in explanation and figure, only represent light interference reflection structure in order to represent with a variable pixel unit.Please refer to Fig. 3 A, on a substrate 309, form earlier electrode 310 and sacrifice layer 311 in regular turn, in electrode 310 and sacrifice layer 311, form opening 312 again and form stilt 306 within it to be applicable to.Then, in opening 312, form stilt 306, form electrode 314 then on sacrifice layer 311 and stilt 306.
Please refer to Fig. 3 B, remove the sacrifice layer 311 shown in Fig. 3 A and form chamber 316 (position of sacrifice layer 311) with a structure release etch processing procedure (Release Etch Process), the length D of chamber 316 is the thickness of sacrifice layer 311.Then, flat board protection structure 304 utilizes sticky material 308 and substrate 309 bonding, and when bonding, the pressing process that can impose makes the bonding more tight of dull and stereotyped protection structure 304 and substrate 309.In addition, if utilize hot-setting adhesive, then can add a heating process, hot-setting adhesive can be heated and fix as sticky material 308.
Above interpretation has the manufacture method of the light interference type display panel of dull and stereotyped protection structure; and the light interference type display panel with ㄇ font protection structure among Fig. 2 B; therefore its manufacture method is also quite similar with the manufacture method shown in Fig. 3 A and Fig. 3 B, only it is done explanation simply below.
At first, on a substrate, form a light interference reflection structure, comprise first electrode, second electrode and the stilt between two electrodes.Then, utilize bonding ㄇ font protection structure of sticky material and substrate.Same, when bonding, can impose the pressing process and make the bonding more tight of ㄇ font protection structure and substrate.Like this, can make and finish the light interference type display panel that has ㄇ font protection structure among Fig. 2 B.
Light interference type display panel of the present invention provides protection structure and a base plate bonding, and light interference reflection structure is coated on wherein, can avoid so directly touching because of external force and destroy light interference reflection structure.And, utilize that employed sticky material seals light interference reflection structure when bonding, can effectively avoid external environment, for example airborne hydrone, dust or oxygen, touch light interference reflection structure and produce electrostatic attraction or its metallic film of oxidation, and destroy its optics or electric characteristics.Therefore, the present invention can promote the display quality of light interference type display panel, reduces the incidence of defective, and prolongs the life-span of its use.
Be understandable that; for the person of ordinary skill of the art; can make other various corresponding changes and distortion according to technical scheme of the present invention and technical conceive, and all these changes and distortion all should belong to the protection domain of the appended claim of the present invention.
Claims (13)
1. a light interference type display panel is characterized in that, comprises at least:
One substrate;
One protection structure is utilized a sticky material and this base plate bonding; And
One light interference reflection structure, between this substrate and this protection structure, described light interference reflection structure comprises a regulator array,
Wherein said substrate and described protection structure are through sealing to prevent that described light interference reflection structure from being damaged by external environment condition.
2. light interference type display panel according to claim 1 is characterized in that, each light regulator comprises at least:
One first electrode;
One second electrode becomes to be arranged in parallel with this first electrode; And
One stilt between this first electrode and this second electrode, forms a chamber.
3. light interference type display panel according to claim 1 is characterized in that, this protection structure is a slab construction or a ㄇ font structure.
4. light interference type display panel according to claim 1 is characterized in that, the material of this protection structure is a glass substrate.
5. light interference type display panel according to claim 1; it is characterized in that; the material of this sticky material comprises a separation material, utilizes this separation material to make and keeps a preset distance between this protection structure and this substrate, to avoid this this interference of light reflection configuration of protection structure contact injury.
6. light interference type display panel according to claim 1 is characterized in that, the material of this sticky material comprises a UV glue or a hot-setting adhesive.
7. the manufacture method of a light interference type display panel is characterized in that, comprises following steps at least:
One substrate is provided;
Form a light interference reflection structure on this substrate, described light interference reflection structure comprises a regulator array; And
Utilize protection structure and this base plate bonding, make this interference of light reflection configuration between this protection structure and this substrate,
Wherein said substrate and described protection structure are through sealing to prevent that described light interference reflection structure from being damaged by external environment condition.
8. manufacture method according to claim 7 is characterized in that, forms this light interference reflection structure on this substrate, and the step that described light interference reflection structure comprises a regulator array comprises at least:
On this substrate, form one first electrode;
On this first electrode, form a sacrifice layer;
Within this sacrifice layer and this first electrode, form several first openings;
Form a stilt among these first openings at each;
On this sacrifice layer and these stilts, form one second electrode; And
Remove this sacrifice layer with a structure release etch processing procedure etching.
9. manufacture method according to claim 7 is characterized in that, this protection structure is a slab construction or a ㄇ font structure.
10. manufacture method according to claim 7 is characterized in that, the material of this protection structure is glass, plastics, organic or inorganic macromolecular material.
11. manufacture method according to claim 7 is characterized in that, this step for adhering comprises utilizes bonding this protection structure of a sticky material and this substrate.
12. manufacture method according to claim 11; it is characterized in that; the material of this sticky material comprises a separation material, utilizes this separation material to make and keeps a preset distance between this protection structure and this substrate, to avoid this this interference of light reflection configuration of protection structure contact injury.
13. manufacture method according to claim 11 is characterized in that, the material of this sticky material comprises a UV glue or a hot-setting adhesive.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB031577997A CN100363775C (en) | 2003-08-26 | 2003-08-26 | Light interference display panel and its mfg. method |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB031577997A CN100363775C (en) | 2003-08-26 | 2003-08-26 | Light interference display panel and its mfg. method |
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| Publication Number | Publication Date |
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| CN1591094A CN1591094A (en) | 2005-03-09 |
| CN100363775C true CN100363775C (en) | 2008-01-23 |
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| CNB031577997A Expired - Fee Related CN100363775C (en) | 2003-08-26 | 2003-08-26 | Light interference display panel and its mfg. method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102724824A (en) * | 2011-03-29 | 2012-10-10 | 鸿富锦精密工业（深圳）有限公司 | An electronic device casing and a manufacture method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6303986B1 (en) * | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
| US20020015215A1 (en) * | 1994-05-05 | 2002-02-07 | Iridigm Display Corporation, A Delaware Corporation | Interferometric modulation of radiation |
| US20030072070A1 (en) * | 1995-05-01 | 2003-04-17 | Etalon, Inc., A Ma Corporation | Visible spectrum modulator arrays |
-
2003
- 2003-08-26 CN CNB031577997A patent/CN100363775C/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020015215A1 (en) * | 1994-05-05 | 2002-02-07 | Iridigm Display Corporation, A Delaware Corporation | Interferometric modulation of radiation |
| US20030072070A1 (en) * | 1995-05-01 | 2003-04-17 | Etalon, Inc., A Ma Corporation | Visible spectrum modulator arrays |
| US6303986B1 (en) * | 1998-07-29 | 2001-10-16 | Silicon Light Machines | Method of and apparatus for sealing an hermetic lid to a semiconductor die |
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| CN1591094A (en) | 2005-03-09 |
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Owner name: QUALCOMM MEMS SCIENCE & TECHNOLOGY CO.,LTD. Free format text: FORMER OWNER: YUANTAI SCIENCE, TECHNOLOGY + INDUSTRY CO. LTD. Effective date: 20060512 |
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