CN100360998C - Defect detection apparatus and method after panel breaking - Google Patents
Defect detection apparatus and method after panel breaking Download PDFInfo
- Publication number
- CN100360998C CN100360998C CNB200410088790XA CN200410088790A CN100360998C CN 100360998 C CN100360998 C CN 100360998C CN B200410088790X A CNB200410088790X A CN B200410088790XA CN 200410088790 A CN200410088790 A CN 200410088790A CN 100360998 C CN100360998 C CN 100360998C
- Authority
- CN
- China
- Prior art keywords
- panel
- image capture
- linear displacement
- motion
- microscope carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention provides a defect detecting device and a method after panel breakage, which comprises a carrying table part and at least an image pick-up part, wherein a panel with at least one side edge is born by the carrying table part. The carrying table part supplies the first linear displacement motion and the rotary motion. The image pick-up part is provided with a first scanning body and a second scanning body, and the scanning side of the first scanning body and the scanning side of the second scanning body are corresponding and are divided by the scanning space. The image pick-up part can supply the second linear displacement motion to adjust the scanning position, wherein the carrying table part causes the side edge to pass through the scanning space through at least one-time linear displacement motion and the rotary motion. Thus the image pick-up part picks up the image of the top surface adjacent to the side edge and the image of the bottom face adjacent to the side edge to detect the defect.
Description
Technical field
The present invention relates to defect detecting device and detection method behind a kind of panel breaking, defect detecting device and detection method behind particularly a kind of panel breaking that detects the side front of sliver rear panel and bottom surface defective by at least one image capture unit.
Background technology
Along with the large scale tft liquid crystal shows (TFT-LCD) technology evolution and glass substrate extension, tft liquid crystal display application product is by the application product of Information technology, for example computer display screens, mobile computer etc., extend to audio-visual and field of household appliances just gradually, wherein especially at home and abroad heat up gradually, can in market, play a decisive match with the rival of following Digital Television such as plasm TV and inner projection TV at giant displays such as domestic TVs.Because showing, tft liquid crystal utilizes control liquid crystal arrangement direction, produce different refractive indexes when allowing light pass through liquid crystal, cooperate colored filter and Polarizer (Polarizer) effect to produce image again, have high-resolution display capabilities and low power consuming, extremely frivolous advantage, make it have an opportunity to become next high definition digital TV (HDTV from generation to generation, High-DefinitionTelevision) main product, add the panel volume production technology of the higher algebraically of input that the big factory of domestic panel does one's utmost, make present LCD TV (Liquid Crystal Display Television) have the potentiality of high yield low price, can in the vast household electrical appliances market in the whole world, occupy a tiny space in future.
In the middle of the processing procedure of panel, can generally be divided into leading portion (Array), stage casing (Cell) and back segment (ModuleAssembly).In the processing procedure of stage casing, probably can be divided into and spill sept, applying, sliver, perfusion liquid crystal and the stage such as seal.Wherein at sliver in the stage because glass cracked characteristic easily, usually make face glass especially edge region produce condition of poor, so after face glass carries out sliver processing, for suitable important of the face glass Quality Detection after the processing.But present detection for this sliver process stage depends on the manpower visual detection more, so no matter the space of improvement is arranged all at detector efficiency and accuracy etc.Especially under the situation that panel size increases gradually, artificial visual detects and more and more is not easy, and manpower also can reduce the judgment of defective because of fatigue.
Summary of the invention
Fundamental purpose of the present invention provides defect detecting device and detection method behind a kind of panel breaking, utilizes the mode of robotization image capture to promote efficient, reduce cost and overcome large-scale panel and is difficult for the defective that detects.
Secondary objective of the present invention provides defect detecting device and detection method behind a kind of panel breaking, utilizes image capture unit to capture and the adjacent end face of panel side and the image of bottom surface, to improve the defects detection rate.
To achieve the above object, the invention provides defect detecting device behind a kind of panel breaking, it comprises: a microscope carrier portion, carry a panel, and this panel has at least one side, and this microscope carrier portion provides this panel to carry out the motion of first linear displacement and rotatablely moves; Described microscope carrier portion comprises:
One linear guides body provides this panel to carry out the motion of first linear displacement;
One rotary body, it is connected and provides with this linear guides body and rotatablely moves, and this rotary body moves by this first linear displacement and moves on this linear guides body; And
One load plate body is connected with this rotary body and carries this panel, and rotatablely moves by this and to rotate; And
At least one image capture portion has:
One slide rail body, it is positioned at a side of this microscope carrier portion, and this slide rail body also has a support that can carry out the motion of second linear displacement;
At least the first sweep volume is connected with support, and this first sweep volume can scan and one of them adjacent end face of described side; And
At least the second sweep volume is connected with this support, and the scan-side of this second sweep volume is corresponding with the scan-side of this first sweep volume, this scanning of second sweep volume and one of them adjacent bottom surface of described side;
Wherein, microscope carrier portion passes through this image capture portion with the motion of first linear displacement with this panel, makes this microscope carrier portion be rotated motion;
To achieve the above object, the present invention also provides defect inspection method behind a kind of panel breaking,, be used to check the defective at a panel area edge, this panel has several sides, and this detection method comprises the following steps:
(a) provide a defect detecting device, this defect detecting device includes a microscope carrier portion and at least one image capture portion, and this panel is carried in this microscope carrier portion, and described microscope carrier portion comprises:
One linear guides body provides this panel to carry out the motion of first linear displacement;
One rotary body, it is connected and provides with this linear guides body and rotatablely moves, and this rotary body moves by this first linear displacement and moves on this linear guides body; And
One load plate body is connected with this rotary body and carries this panel, and rotatablely moves by this and to rotate; And
This image capture portion adjusts scanning position with the motion of one second linear displacement, this scanning of image capture portion and described side one of them an adjacent end face and a bottom surface;
(b) this panel is placed in this microscope carrier portion, one of them is parallel to this first linear displacement motion direct of travel to make described side, and with this second linear displacement motion this image capture portion is adjusted to the appropriate location;
(c) carry out the motion of first linear displacement, one of them passes through this image capture portion to make described side, makes this image capture portion capture the image of this end face and this bottom surface;
(d) rotatablely move this panel rotation special angle with this, make to be parallel to this first linear displacement direction of motion, and this image capture portion is adjusted to the appropriate location with this second linear displacement motion with one of them another adjacent side of described side;
For the ease of further understanding feature of the present invention, purpose and function, describe the relevant thin portion structure and the design concept of device of the present invention in detail below in conjunction with accompanying drawing.
Description of drawings
Fig. 1 is the three-dimensional combination of the preferred embodiment synoptic diagram of defect detecting device behind the panel breaking of the present invention;
Fig. 2 is the second sweep volume schematic perspective view in the preferred embodiment of defect detecting device behind the panel breaking of the present invention;
Fig. 3 A to Fig. 3 C is the detection light source synoptic diagram;
Fig. 4 A is a defect inspection method process flow diagram behind the panel breaking of preferred embodiment of the present invention;
Fig. 4 B is the flow chart of data processing synoptic diagram in the defect inspection method flow process behind the panel breaking of preferred embodiment of the present invention;
Fig. 5 A is that the preferred embodiment of defect detecting device behind the panel breaking of the present invention detects the panel schematic perspective view;
Fig. 5 B is that the preferred embodiment panel of defect detecting device behind the panel breaking of the present invention passes through the scanning area front elevational schematic;
Fig. 6 utilizes the detection board front-view schematic diagram that defect detecting device is formed behind the panel breaking of the present invention.
Description of reference numerals: defect detecting device behind 2 panel breakings; 21 microscope carrier portions; 211 linear guides bodies; 212 rotary bodies; 213 load plate bodies; 22 image capture portions; 221 slide rail portions; 222 supports; 223 first sweep volumes; 2231 line sweep video cameras; 2231a optical axis hole; 2232 line sweep video cameras; 2232a optical axis hole; 224 second sweep volumes; 2241 line scan cameras; The 2241a image is folded to mirror; 2241b optical axis hole; 225 scanning spaces; 3 testing processes; 31～36 steps; 361～363 steps; 4 defect checking machine platforms; 41 microscope carrier portions; 411 load plate bodies; 412 rotary bodies; 413 linear guides bodies; 42 image capture bodies; 421 slide rail portions; 422 first sweep volumes; 423 supports; 424 second sweep volumes; 43 cylinders; 44 marble table portions; 45 air shock absorbers; 46 support portions; 5 panels; 51,52 short sides; 53,54 long sides; The motion of 61 first linear displacements; The motion of 62 second linear displacements; 63 rotatablely move; 71 light sources; 72 optical axis holes; 73 panels; 9 panels; 91 sides.
Embodiment
See also the three-dimensional combination of the preferred embodiment synoptic diagram of defect detecting device behind the panel breaking of the present invention shown in Figure 1.That defect detecting device 2 can the detection faces panel area behind this panel breaking is damaged, break, split and defective or bad such as defective material.Defect detecting device 2 has a microscope carrier portion 21 and a pair of image capture portion 22 behind this panel breaking.A panel 9 can be carried in this microscope carrier portion 21, and this panel 9 has at least one side 91, an adjacent end face 92 and the bottom surface 93 of being connected to of this side.
This microscope carrier portion has a linear guides body 211, a rotary body 212 and a load plate body 213.This linear guides body 211 can provide linear displacement motion 61.This rotary body 213 is connected with this linear guides body 211 and can moves on this linear guides body 211 by this first linear displacement motion 61.This rotary body 212 can also provide one to rotatablely move 63.This load plate body 213 is connected with this rotary body 212 and can provides carrying this panel 9, and rotatablely moves by this and 63 to rotate.
This image capture portion 22 has a slide rail body 221, one first sweep volume 223 and at least one second sweep volume 224.This slide rail body 221 is positioned at a side of this microscope carrier portion 21, and one second linear displacement motion 62 can be provided.This slide rail body 221 also has a support 222, moves on this slide rail body by this second linear displacement motion 62, to adjust the scanning position of this first sweep volume 223 and this second sweep volume 224.This first sweep volume 223 is made of line sweep video camera 2231,2232 (Line scan camera).This first sweep volume can scan the image of the adjacent end face 92 of acquisition and this side 91.This second sweep volume 224 is connected with this support 222, and this second sweep volume is a line scan camera 2241.Wherein, the scan-side of this second sweep volume 224 and this second sweep volume 224 usefulness one scan spaces 225 corresponding with the scan-side of this first sweep volume 223 separate mutually with this first sweep volume 223.This second sweep volume can scan the image of the adjacent bottom surface 93 of acquisition and this side 91.
This this second linear displacement to image capture portion 22 is moved 62 tracks on same straight line, and this is center line to image capture portion 22 with this first linear displacement 61 tracks that move, and lays respectively at the move both sides of 61 tracks of this first linear displacement.
In the present embodiment, this line sweep video camera 2231,2232 also has an optical axis hole 2231a, 2232a, can provide light to enter to provide when scanning required brightness.This line scan camera 2241 also has an optical axis hole 2241a and an image is folded to mirror 2241b (consulting Fig. 2).This optical axis hole 2241a can provide light to enter brightness required so that photoscanning to be provided.This image is folded to the front end that mirror 2241b is positioned at this line scan camera 2241, the image penetration with the adjacent bottom surface 92 of this side can be directed into this line sweep video camera 2241.In present embodiment, this first linear displacement 61 tracks and this second linear displacement 62 track quadratures that move that move.
Required brightness when described light provides the detection faces board defect.Basically in order to reach the purpose of implementing detection, providing of this light can be divided three classes, one is axial light source (consulting Fig. 3 A), it provides a light source 71, and the light that this light source is emitted imports to this panel 73 via the physical phenomenon of reflection with light again via an optical axis hole 72 that is arranged at this image scanner 74.It is two for forward light source (consulting Fig. 3 B), and it provides light source 71, utilizes ray cast that this light source the emits front to this panel 73, with provide image scanner 74 scannings the brightness of palpus.And backlight (consulting Fig. 3 C), it provides light source 71, and the ray cast of utilizing this light source to emit arrives the back side of this panel 73.And the light source mode of being implemented is in the present embodiment got on the panel by image scanner 74 for utilizing axial light source, detects the defective of panel so that image scanner 74 enough brightness to be provided.
For the flow process of the whole Device Testing method of detailed description, please continue to consult Fig. 4, this figure is a defect inspection method process flow diagram behind the panel breaking of the present invention.This testing process 3 can be checked the defective of a rectangular panel 5, this rectangular panel 5 has a pair of short side 51,52 and a pair of long side 53,54, this is to short side and an adjacent end face 55 and the bottom surface 56 of being connected to of long side, and this detection method comprises the following steps:
Step 31 provides a defect detecting device 2 (consulting Fig. 5 A), and this defect detecting device 2 comprises a microscope carrier portion 21 and a pair of image capture portion 22.This microscope carrier portion 21 can provide this rectangular panel 5 of carrying and provide this rectangular panel 5 to carry out one first linear displacement motion 61 and between a linear guides body 211 two ends and rotatablely move 63, this image capture portion 22 can one second linear displacement motion 62 adjust scanning position, this image capture portion 22 also has one first sweep volume 223 and one second sweep volume 224, this first sweep volume 223 is corresponding with the scan-side of this second sweep volume 224 and isolated with one scan space 225, this image capture portion 22 can be in this scanning space 225 scan-image.Wherein, this this second linear displacement to image capture portion 22 is moved 62 tracks on same straight line, and this is center line to image capture portion 22 with this first linear displacement 61 tracks that move, and lays respectively at the move both sides of 61 tracks of this first linear displacement.
Step 32, end in this linear guides body 211 is placed in this microscope carrier portion 21 with this rectangular panel 5, make this be parallel to this first linear position motion 61 direct of travels, and this is adjusted to the appropriate location to image capture portion 22 with this second linear displacement motion 62 to short side 51,52;
Step 33, carry out this first linear displacement motion 61, make this to short side 51,52 by this scanning space 225 to image capture portion 22, make bottom surface 56 images (consulting Fig. 5 B) that end face 55 images that these first sweep volume, 223 scanning acquisitions and this weak point side 51,52 are adjacent and the 224 scanning acquisitions of this second sweep volume and this weak point side 51,52 are adjacent;
Step 34, the other end in this linear guides body 211 rotatablely moves 63 with these panel 5 rotations 90 degree with this, make adjacent this of short side 51,52 to be parallel to this first linear displacement 61 directions of moving to long side 53,54, and this is adjusted to the appropriate location to image capture portion 22 with this second linear displacement motion 62 with this;
Step 35, carry out this first linear displacement motion 61, make this long side 53,54 by this scanning space 225 to image capture portion 22, make bottom surface 56 images that end face 55 images that the 223 scanning acquisitions of this first sweep volume and this long side 53,54 are adjacent and the 224 scanning acquisitions of this second sweep volume and this long side 53,54 are adjacent, to finish the image capture action;
Step 36 is finished image data and is handled;
Wherein, this step 36 also comprises the following steps:
361 carry out image surveys long calculation;
362 carry out defective judges;
363 display defect data and deposit database in.
Can cooperate several sides (as hexagon) to detect about above-mentioned testing process, suitable angle makes this side be parallel to this first linear displacement 61 directions of moving as long as this rotatablely moves 63 rotations, and this rotatablely moves 63 to implement plural number time this first linear displacement motion 61, plural number time this second linear displacement motion 62 and plural number time, finishes the flow process of whole detection immediately.Wherein but these defect detecting device 2 detection faces board sizes 1 were up to 65 o'clock.
Please continue to consult the detection board front-view schematic diagram that defect detecting device is formed behind the panel breaking of the present invention of utilizing shown in shown in Figure 6.This defect checking machine platform 4 has a microscope carrier portion 41, a pair of image capture portion 42, a cylinder 43, a marble table portion 44, at least one air shock absorber 45 and a support portion 46.This microscope carrier portion 41 is positioned on the desktop of this marble table portion 44, this is connected with this cylinder 43 to image capture portion 42, this cylinder 43 is connected in this marble table portion 44, this air shock absorber 45 is positioned at the opposite side of these marble table portion 44 desktops and is connected with this marble table portion 44, to provide this microscope carrier portion 41 and this to image capture portion 42 shockproof and balances.This support portion 46 is connected with this air shock absorber 45 can provide support this marble table portion 44.
Wherein this microscope carrier portion 41 also includes a load plate body 411, a rotary body 412 and a linear guides body 413.This image capture portion 42 also includes a slide rail body 421, at least one first sweep volume 422, a support 423 and at least one second sweep volume 424.In the front describes in detail, write as for this microscope carrier portion 41 and this function mode, seldom do explanation at this to image capture portion 42.
In addition, though in preferred embodiment, utilize a pair of image capture unit to reach the purpose of detection, but under spirit of the present invention, utilize single image capture unit also can achieve the goal, this rotatablely moves 63 and this first linear displacement motion 61 of cooperating plural number time as long as utilize plural number time, can reach the effect of detection equally.
The above only is preferred embodiment of the present invention, can not limit the scope of the invention with this.Therefore, all equalizations of doing according to claim of the present invention change and modify, and will not lose main idea of the present invention place, also do not break away from the spirit and scope of the present invention, all should be considered as further enforcement of the present invention.
Claims (8)
1, defect detecting device behind a kind of panel breaking, it is characterized in that: it comprises:
A panel is carried in one microscope carrier portion, and this panel has at least one side, and described microscope carrier portion comprises:
One linear guides body provides this panel to carry out the motion of first linear displacement;
One rotary body, it is connected and provides with this linear guides body and rotatablely moves, and this rotary body moves by this first linear displacement and moves on this linear guides body; And
One load plate body is connected with this rotary body and carries this panel, and rotatablely moves by this and to rotate; And
At least one image capture portion has:
One slide rail body, it is positioned at a side of this microscope carrier portion, and this slide rail body also has a support that can carry out the motion of second linear displacement;
At least the first sweep volume is connected with support, and this first sweep volume can scan and one of them adjacent end face of described side; And
At least the second sweep volume is connected with this support, and the scan-side of this second sweep volume is corresponding with the scan-side of this first sweep volume, this scanning of second sweep volume and one of them adjacent bottom surface of described side;
Wherein, microscope carrier portion passes through this image capture portion with the motion of first linear displacement with this panel, makes this microscope carrier portion be rotated motion.
2, defect detecting device behind the panel breaking as claimed in claim 1, it is characterized in that: this image capture portion comprises the first image capture portion and the second image capture portion, second linear displacement movement locus of this first image capture portion and the second linear displacement movement locus of this second image capture portion are on same straight line, and this first image capture portion and this second image capture portion are center line with this first linear displacement movement locus, lay respectively at the both sides of this first linear displacement movement locus.
3, defect detecting device behind the panel breaking as claimed in claim 1 is characterized in that: first sweep volume also includes an optical axis hole, provides light to enter to provide when scanning required brightness.
4, defect detecting device behind the panel breaking as claimed in claim 1, it is characterized in that: second sweep volume also comprises:
One optical axis hole provides light to enter to provide when scanning required brightness; And
One image is folded to mirror, is positioned at the front end of this second sweep volume, the image penetration of this bottom surface can be directed into this second sweep volume.
5, defect detecting device behind the panel breaking as claimed in claim 1 is characterized in that: also have:
One marble top provides this microscope carrier portion of storing and this image processing portion;
One air shock absorber is positioned at the opposite side of this marble table portion desktop and is connected with this marble table portion, so that microscope carrier portion and this shockproof and balance of image capture portion to be provided; And
One support portion is connected to support this marble table portion with this balance portion.
6, defect inspection method behind a kind of panel breaking is used to check the defective at a panel area edge, and this panel has several sides, it is characterized in that: this detection method comprises the following steps:
(a) provide a defect detecting device, this defect detecting device includes a microscope carrier portion and at least one image capture portion, and this panel is carried in this microscope carrier portion, and described microscope carrier portion comprises:
One linear guides body provides this panel to carry out the motion of first linear displacement;
One rotary body, it is connected and provides with this linear guides body and rotatablely moves, and this rotary body moves by this first linear displacement and moves on this linear guides body; And
One load plate body is connected with this rotary body and carries this panel, and rotatablely moves by this and to rotate; And
This image capture portion adjusts scanning position with the motion of one second linear displacement, this scanning of image capture portion and described side one of them an adjacent end face and a bottom surface;
(b) this panel is placed in this microscope carrier portion, one of them is parallel to this first linear displacement motion direct of travel to make described side, and with this second linear displacement motion this image capture portion is adjusted to the appropriate location;
(c) carry out the motion of first linear displacement, one of them passes through this image capture portion to make described side, makes this image capture portion capture the image of this end face and this bottom surface;
(d) rotatablely move this panel rotation special angle with this, make to be parallel to this first linear displacement direction of motion, and this image capture portion is adjusted to the appropriate location with this second linear displacement motion with one of them another adjacent side of described side.
7, defect inspection method behind the panel breaking as claimed in claim 6 is characterized in that: further repeating step (c) is to step (d), to capture whole images of these several sides.
8, defect inspection method behind the panel breaking as claimed in claim 6 is characterized in that: step (d) also comprises image data treatment step (f) afterwards, and this step (f) comprises the following step:
(f1) carry out image and survey long calculation;
(f2) carrying out defective judges;
(f3) display defect data and deposit database in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410088790XA CN100360998C (en) | 2004-11-03 | 2004-11-03 | Defect detection apparatus and method after panel breaking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410088790XA CN100360998C (en) | 2004-11-03 | 2004-11-03 | Defect detection apparatus and method after panel breaking |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1769963A CN1769963A (en) | 2006-05-10 |
| CN100360998C true CN100360998C (en) | 2008-01-09 |
Family
ID=36751354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410088790XA Active CN100360998C (en) | 2004-11-03 | 2004-11-03 | Defect detection apparatus and method after panel breaking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100360998C (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100803046B1 (en) * | 2007-03-28 | 2008-02-18 | 에스엔유 프리시젼 주식회사 | Vision inspection system and method for inspecting workpiece using the same |
| WO2008136153A1 (en) * | 2007-04-25 | 2008-11-13 | Sharp Kabushiki Kaisha | Liquid crystal display panel and its inspecting method |
| CN101996910B (en) * | 2009-08-25 | 2012-05-30 | 中芯国际集成电路制造(上海)有限公司 | Method for detecting testing structure of semiconductor device |
| CN103871917B (en) * | 2012-12-07 | 2016-12-28 | 中芯国际集成电路制造(上海)有限公司 | The method preparing semiconductor failure analysis sample |
| CN103680369A (en) * | 2013-12-03 | 2014-03-26 | 京东方科技集团股份有限公司 | Testing device and testing method of displayer module |
| CN104714315B (en) * | 2013-12-12 | 2017-07-25 | 珠海格力电器股份有限公司 | The fracturing strengh test tool and method of liquid crystal glue frame bonding |
| CN104950492B (en) * | 2015-07-09 | 2019-01-18 | 成都天奥测控技术有限公司 | Liquid crystal display defect automatic checkout system |
| CN107015385A (en) * | 2017-03-24 | 2017-08-04 | 惠科股份有限公司 | Detection method and detection device for display panel |
| CN107024783B (en) * | 2017-04-19 | 2023-05-23 | 苏州日和科技有限公司 | Multidimensional angle adjusting device for liquid crystal panel detection camera |
| CN111186702A (en) * | 2020-03-10 | 2020-05-22 | 陈壮 | Batch transferring device for automobile wire harness shells |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171963A (en) * | 1990-05-21 | 1992-12-15 | Ntn Corporation | Laser processing device and laser processing method |
| JPH0735701A (en) * | 1993-07-23 | 1995-02-07 | Sharp Corp | Visual pattern inspection equipment |
| JP2000275594A (en) * | 1999-03-24 | 2000-10-06 | Olympus Optical Co Ltd | Substrate inspecting device |
-
2004
- 2004-11-03 CN CNB200410088790XA patent/CN100360998C/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171963A (en) * | 1990-05-21 | 1992-12-15 | Ntn Corporation | Laser processing device and laser processing method |
| JPH0735701A (en) * | 1993-07-23 | 1995-02-07 | Sharp Corp | Visual pattern inspection equipment |
| JP2000275594A (en) * | 1999-03-24 | 2000-10-06 | Olympus Optical Co Ltd | Substrate inspecting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1769963A (en) | 2006-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7808630B2 (en) | Inspection apparatus for liquid crystal display device and inspection method using same | |
| US20120038780A1 (en) | Apparatus and method for inspecting display device | |
| KR101146722B1 (en) | Inspecting apparatus of pannel for display | |
| CN106814084A (en) | A kind of new panel surface defect detecting system | |
| CN100360998C (en) | Defect detection apparatus and method after panel breaking | |
| CN104081192A (en) | Apparatus and method for photographing glass defects in multiple layers | |
| CN102375252A (en) | Array test device and array test method | |
| US20150279020A1 (en) | Display Panel Characterization System With Flatness and Light Leakage Measurement Capabilities | |
| CN105044942B (en) | The contraposition of liquid crystal display panel checks equipment and contraposition inspection method | |
| JP3378795B2 (en) | Display device inspection apparatus and inspection method | |
| CN107621707A (en) | A kind of liquid crystal screen back light source module surface defect automatic optical detecting system | |
| CN108680343A (en) | A kind of flexible screen detection method and detection device | |
| CN111735609A (en) | Demura detection method and device for display screen | |
| CN204882389U (en) | Optical detection device | |
| CN108121110A (en) | Liquid crystal display device and the electronic device including liquid crystal display device | |
| CN107065248B (en) | Optical compensation method and system of display panel | |
| CN105823780B (en) | Panel detection device and method | |
| CN101408520A (en) | Detection method and system for discriminating flaws of inner and outer layers | |
| US8786851B2 (en) | System for testing distortion of liquid crystal display device | |
| CN2864893Y (en) | Plane display panel detecting instrument with accurate positioning unit | |
| KR100911331B1 (en) | Array tester and method for measuring a point of substrate of the same | |
| CN207379945U (en) | Optical image detection device | |
| KR102350996B1 (en) | Inspection apparatus for particle of glass using optical lens | |
| CN104806931A (en) | Backlight module and display device | |
| CN210294098U (en) | Optical equipment for screen detection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |