CN100360903C - Method for measuring variation of gas liquid temperature, absorption, concentration, component and refraction rate - Google Patents
Method for measuring variation of gas liquid temperature, absorption, concentration, component and refraction rate Download PDFInfo
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- CN100360903C CN100360903C CNB2005100307627A CN200510030762A CN100360903C CN 100360903 C CN100360903 C CN 100360903C CN B2005100307627 A CNB2005100307627 A CN B2005100307627A CN 200510030762 A CN200510030762 A CN 200510030762A CN 100360903 C CN100360903 C CN 100360903C
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Abstract
A method for measuring the variation of the temperature, the absorption, the concentration, components and refractive indexes of a gas and a liquid samples belongs to the technical field of measurement. Laser beam focusing is used for radiating to a waveguide structure of an upper metallic film, a sample cavity and a lower metallic film, partial light signals are absorbed by the waveguide structure, so alternately dark and bright stripes occur in reflected light spots; for high sensitive properties such as the variation of the temperature, the absorption, the concentration, the components and the refractive indexes of the liquid and the gas samples for measure in the sample cavity, the stripes can be used for realizing the high sensitive and real-time measurement of the variation of the temperature, the absorption, the concentration, the components and the refractive indexes of the liquid and the gas samples through detecting the dark and bright stripes of the light spots. The present invention has the characteristics of substantiality and obvious progress, and can be widely used for the high sensitive, low consumption, fast and real-time measurement of the variation of the temperature, the absorption, the concentration, the components and the refractive indexes of various liquids and gases, particularly real-time concentration and reaction process detection in biochemical reactions.
Description
Technical field
What the present invention relates to is a kind of method of field of measuring technique, particularly a kind of method of measuring gas-liquid temperature, absorption, concentration, component and variations in refractive index.
Background technology
Along with the development of laser technology, laser sensor has been obtained significant progress in the application aspect solution concentration and the absorptiometry.The temperature of liquid, gas, absorption, concentration, component or the like characteristic, all closely bound up with its refractive index, when above-mentioned these characteristics change, can cause that all its refractive index takes place by corresponding the variation.By the surface plasma Detection Techniques, reveal method such as mould waveguide Detection Techniques, subtle change that can refractive index is carried out highly sensitive detection.The monitoring of this just feasible temperature to liquid or gas, absorption, concentration, component or the like characteristic can be converted into the monitoring to its refractive index, and and then the subtle change of refractive index can be converted into the change in optical signal that is detected of amplification, thereby separate the respective change of reading in the testing liquid.These methods are applied in the extensive fields such as physics, chemistry, biology, medicine widely.But in actual applications, ubiquity detection sensitivity not high enough, require problem such as height for the polarization characteristic of surveying light signal, become and limited the obstacle that it further develops.
Find that through literature search U.S. Patent number is to prior art: 6903815, name is called: the optical waveguide sensor that is used for glucose measurement---device, system and method.The related device of this technology be about form the multiple film layer structure between two coupling gratings, wherein, the ground floor of multiple film layer structure is a substrate layer; The second layer is a ducting layer, and its refractive index is higher than first and third layer; The 3rd layer is biochemical enzymes and reagent layer, and the 4th is the porous gel layer; Layer 5 is sieve shape conductive layer (sieve shape metallic diaphragm).The 4th and the composition to be measured only controlled in the solution to be measured of layer 5 and device enter the 3rd layer, not actual participation sensing and measuring process.In first, second and third layer, the refractive index of the second layer is the highest, and taking second place in both sides, forms typical optical waveguide structure, and wherein, the second layer is a ducting layer, and first and the 3rd layer is respectively clad up and down.The polarized light that is coupled into this device by the incident coupling grating transmits in the second layer, and part is infiltrated first and the 3rd layer.Optical signals outgoing coupling grating through this optical waveguide transmission is coupled out this device, and is received and handled by a light intensity detector.When composition to be measured in the solution to be measured infiltrates system and the 3rd layer contacted the time by above-mentioned contrary electron ion, will with the 3rd layer a series of biochemical reactions take place, and change the 3rd layer refractive index, thereby cause the transport property of this optical waveguide to change, and cause that further wherein the light signal of transmission changes.The light intensity sniffer that this variation is placed by outgoing coupling grating place captures.So just realized coming concentration of glucose variation in the sensing solution to be measured by sensed light signal.But because in this structure, sample is placed in the evanescent field of light wave (the 3rd layer), in this one deck, the energy of light wave is decayed rapidly, the interaction of light wave and sample to be tested is very limited, though this has directly caused the measurement sensitivity of this method higher than existing classic method, is difficult to further improve on this basis.
Summary of the invention
The present invention is directed to the deficiencies in the prior art.A kind of method of measuring gas-liquid temperature, absorption, concentration, component and variations in refractive index is provided.Make it adopt upper strata metal film-sample cavity-lower metal film three-decker, in this structure, middle sample layer refractive index is the highest, double layer of metal film up and down, and refractive index is lower; Like this, just sample to be tested is placed the ducting layer of waveguiding structure, improved the sensitivity of measuring greatly.
The present invention is achieved by the following technical solutions, the present invention utilizes laser beam to be focused into and is mapped in the waveguiding structure of upper strata metal film-sample cavity-lower metal film, part optical signals is absorbed by waveguiding structure, so cause occurring in the flare light and dark striped; And then utilize these stripeds to be opposite to the testing liquid in the sample cavity, the highstrung characteristic of temperature, absorption, concentration, component and variations in refractive index of gas sample, realize temperature, absorption, concentration, component and variations in refractive index high sensitivity and measure in real time by detection for liquid, gas sample to hot spot light and shade striped.
Below the present invention is further illustrated, concrete steps are as follows:
The first step: select material and relevant parameters, form the waveguiding structure of upper strata metal film-sample cavity-lower metal film; Metal membrane material is selected silver, gold, aluminium, copper, requires its real part of permittivity ε in the optical frequency scope
r≤-8, specific inductive capacity imaginary part ε
1≤ 5.0; The thickness of upper strata metal film is between 5nm～70nm, and the thickness of sample cavity is between 10 μ m～2mm, and the lower metal film thickness is greater than 10nm;
Second step: select lambda1-wavelength and incident angle.The operation wavelength of LASER Light Source is selected in 560nm～1300nm scope, is focused into after the laser beam of laser instrument output is restrainted through expansion to be mapped in the above-mentioned waveguiding structure, selects incident angle, and requirement can be observed the light and shade striped in flare;
The 3rd step: the opposite side at above-mentioned waveguiding structure detects the outgoing hot spot, variation by light and shade striped in the monitoring outgoing hot spot, and it striped with master sample contrasted, just can realize detecting in the above-mentioned waveguiding structure temperature of testing liquid, gas sample, absorption, concentration, component and change of refractive in the sample cavity.
In the waveguiding structure of upper strata metal film-sample cavity-lower metal film, the refractive index of middle layer of material is the highest, takes second place in both sides, and middle one deck is called ducting layer, and both sides are called clad or overlayer.In this structure, light wave is propagated in ducting layer with the oscillating field form, and the concentration of energy of light wave here, and is also the strongest with the interaction of ducting layer medium.Therefore, if sample to be tested is placed the ducting layer of waveguide, just can improve the sensitivity of detection significantly.
Laser beam is focused into and is mapped in the above-mentioned waveguiding structure, if the light signal of certain incident angle be able to satisfy the waveguide-coupled condition, will be coupled in the waveguiding structure, and the light signal of other incident angles can be reflected out.And,, like this, be coupled in the waveguide with regard to the light that has a series of angles in the incident light, so will form light and dark striated flare because the waveguide-coupled condition has the feature of quasi periodic.The refractive index of ducting layer is one of principal element of decision waveguide-coupled condition, therefore, when in the sample cavity during as the refractive index generation subtle change of the sample to be tested of ducting layer, corresponding variation also can take place in the waveguide-coupled condition, thereby brings the variation of light and shade striped in the flare.And the characteristics such as temperature, absorption, concentration and component of testing liquid, gas sample are closely related in the refractive index of sample layer and the sample cavity, and this comes the variation measurement of above-mentioned characteristic is become possibility by the variation that detects the light and shade striped with regard to making.
Among the present invention, the creationary ducting layer that sample to be tested is placed optical waveguide structure, and come temperature, absorption, concentration, component and the variations in refractive index of liquid, gas sample are made detection by the variation of light and shade striped in the detection of reflected hot spot, improved the sensitivity of surveying significantly; And, also reduced for the requirement of surveying light path because this structure is insensitive for surveying the polarisation of light characteristic.
The present invention is widely used in measurement, the especially biochemical reaction of temperature, absorption, concentration, component and variations in refractive index of multiple liquid or gas real-time concentration and measures and the course of reaction detection.The present invention has realized high sensitivity, low consumption amount, real-time measurement fast.
Embodiment
Example 1:
The first step: form the waveguiding structure of upper strata metal film-sample cavity-lower metal film, the upper strata thickness of metal film is 5nm, and sample cavity thickness is 1mm, and the lower metal film thickness is 10nm.Metal adopt gold (ε under the 560.0nm wavelength=-8.2+i1.79), sample adopts air, dielectric coefficient (refractive index square) is 1.00;
Second step: optical maser wavelength is 560.0nm, is focused into behind the expansion bundle to be mapped in the said structure, and incident angle is 2 °.Light and dark striped appears in the outgoing hot spot;
The 3rd step: the opposite side at above-mentioned waveguiding structure detects the outgoing hot spot, and writes down the angle that its light and shade striped moves.
Show that according to calculating the detection to sample dielectric coefficient (refractive index square) can reach 2 * 10
-6(the light and shade striped moves 1.436 * 10
-3Degree).The mobile variation of different sample dielectric coefficients and light and shade striped is listed in the following table in the sample cavity.
| The sample dielectric coefficient | The light and shade striped moves (per mille degree) |
| 1.00+4×10 -61.00+2×10 -61.00 1.00-2×10 -61.00-4×10 -6 | 2.872 1.436 0.00 1.436 2.872 |
Example 2:
The first step: form the waveguiding structure of upper strata metal film-sample cavity-lower metal film, the upper strata thickness of metal film is 25nm, and sample cavity thickness is 2mm, and the lower metal film thickness is 32nm.Metal adopt gold (ε under the 690.0nm wavelength=-14.4+i1.22), sample adopts pure water, dielectric coefficient (refractive index square) is 1.77;
Second step: optical maser wavelength is 690.0nm, is focused into behind the expansion bundle to be mapped in the said structure, and incident angle is 5 °.Light and dark striped appears in the outgoing hot spot;
The 3rd step: the opposite side at above-mentioned waveguiding structure detects the outgoing hot spot, and writes down the angle that its light and shade striped moves.
Show that according to calculating the detection to sample dielectric coefficient (refractive index square) can reach 2 * 10
-6(the light and shade striped moves 0.632 * 10
-3Degree).The mobile variation of different sample dielectric coefficients and light and shade striped is listed in the following table in the sample cavity.
| The sample dielectric coefficient | The light and shade striped moves (per mille degree) |
| 1.77+4×10 -61.77+2×10 -6 | 1.321 0.632 |
| 1.77 1.77-2×10 -6 1.77-4×10 -6 | 0.00 0.632 1.321 |
Example 3:
The first step: form the waveguiding structure of upper strata metal film-sample cavity-lower metal film, the upper strata thickness of metal film is 60nm, and sample cavity thickness is 10 μ m, and the lower metal film thickness is 90nm.Metal adopt gold (ε under the 1300.0nm wavelength=-67.9+i6.60), sample adopts pure water, dielectric coefficient is (refractive index square) 1.77;
Second step: optical maser wavelength is 1300.0nm, is focused into behind the expansion bundle to be mapped in the said structure, and incident angle is 30 °.Light and dark striped appears in the outgoing hot spot;
The 3rd step: the opposite side at above-mentioned waveguiding structure detects the outgoing hot spot, and writes down the angle that its light and shade striped moves.
Show that according to calculating the detection to sample dielectric coefficient (refractive index square) can reach 1 * 10
-5(the light and shade striped moves 0.646 * 10
-3Degree).The mobile variation of different sample dielectric coefficients and light and shade striped is listed in the following table in the sample cavity.
| The sample dielectric coefficient | The light and shade striped moves (per mille degree) |
| 1.77+2×10 -51.77+1×10 -51.77 1.77-1×10 -51.77-2×10 -5 | 1.292 0.646 0.000 0.646 1.292 |
Claims (4)
1, a kind of method of measuring gas-liquid temperature, absorption, concentration, component and variations in refractive index, it is characterized in that, utilize laser beam to be focused into and be mapped in the waveguiding structure of upper strata metal film-sample cavity-lower metal film, part optical signals is absorbed by waveguiding structure, so cause occurring in the flare light and dark striped; And then utilize temperature, absorption, concentration, component and the variations in refractive index highstrung characteristic of these stripeds for the testing liquid that places sample cavity, gas sample, realize temperature, absorption, concentration, component and variations in refractive index high sensitivity and measure in real time by detection for liquid, gas sample to hot spot light and shade striped; Concrete steps are as follows:
The first step: select material and relevant parameters, form the waveguiding structure of upper strata metal film-sample cavity-lower metal film; Metal membrane material is selected silver, gold, aluminium or copper, and it is real part of permittivity ε in the optical frequency scope
r≤-8, specific inductive capacity imaginary part ε
i≤ 5.0;
Second step: select lambda1-wavelength and incident angle, the operation wavelength of LASER Light Source is selected in 560nm～1300nm scope, the laser beam of laser instrument output is mapped in the above-mentioned waveguiding structure through expanding to be focused into behind the bundle, selects incident angle, and requirement can be observed the light and shade striped in flare;
The 3rd step: the opposite side at above-mentioned waveguiding structure detects the outgoing hot spot, variation by light and shade striped in the monitoring outgoing hot spot, and it striped with master sample contrasted, realize detection to temperature, absorption, concentration, component and the variations in refractive index of testing liquid, gas sample in the sample cavity in the above-mentioned waveguiding structure.
2, the method for measurement gas-liquid temperature according to claim 1, absorption, concentration, component and variations in refractive index is characterized in that the thickness of upper strata metal film is between 5nm～70nm.
3, the method for measurement gas-liquid temperature according to claim 1, absorption, concentration, component and variations in refractive index is characterized in that, the thickness of sample cavity is between 10 μ m～2mm.
4, the method for measurement gas-liquid temperature according to claim 1, absorption, concentration, component and variations in refractive index is characterized in that the lower metal film thickness is greater than 10nm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100307627A CN100360903C (en) | 2005-10-27 | 2005-10-27 | Method for measuring variation of gas liquid temperature, absorption, concentration, component and refraction rate |
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|---|---|---|---|
| CNB2005100307627A CN100360903C (en) | 2005-10-27 | 2005-10-27 | Method for measuring variation of gas liquid temperature, absorption, concentration, component and refraction rate |
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| CN1758027A CN1758027A (en) | 2006-04-12 |
| CN100360903C true CN100360903C (en) | 2008-01-09 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105891152A (en) * | 2014-10-01 | 2016-08-24 | 上海光刻电子科技有限公司 | Refractive index measurement method with wide range |
| CN108762322B (en) * | 2018-06-05 | 2020-12-08 | 温州派瑞机械科技有限公司 | Domestic self-made drink concentration control device |
| CN108955774A (en) * | 2018-09-05 | 2018-12-07 | 东北大学 | Reflection-type optical fibre sensor for seawater salinity and temperature simultaneously measuring |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0487992A2 (en) * | 1990-11-24 | 1992-06-03 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Optical sensor |
| US5917966A (en) * | 1995-12-14 | 1999-06-29 | Motorola Inc. | Interferometric optical chemical sensor |
| WO2002044697A1 (en) * | 2001-10-02 | 2002-06-06 | Commissariat A L"Energie Atomique | Refractometer with blazed bragg gratings |
| JP2005003662A (en) * | 2003-05-21 | 2005-01-06 | Furukawa Electric Co Ltd:The | Method and apparatus for measuring concentration of liquid and liquid concentration detecting sensor |
| US6903815B2 (en) * | 2001-11-22 | 2005-06-07 | Kabushiki Kaisha Toshiba | Optical waveguide sensor, device, system and method for glucose measurement |
| CN1685213A (en) * | 2002-10-07 | 2005-10-19 | 英国国防部 | Waveguide structure |
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2005
- 2005-10-27 CN CNB2005100307627A patent/CN100360903C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0487992A2 (en) * | 1990-11-24 | 1992-06-03 | Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. | Optical sensor |
| US5917966A (en) * | 1995-12-14 | 1999-06-29 | Motorola Inc. | Interferometric optical chemical sensor |
| WO2002044697A1 (en) * | 2001-10-02 | 2002-06-06 | Commissariat A L"Energie Atomique | Refractometer with blazed bragg gratings |
| US6903815B2 (en) * | 2001-11-22 | 2005-06-07 | Kabushiki Kaisha Toshiba | Optical waveguide sensor, device, system and method for glucose measurement |
| CN1685213A (en) * | 2002-10-07 | 2005-10-19 | 英国国防部 | Waveguide structure |
| JP2005003662A (en) * | 2003-05-21 | 2005-01-06 | Furukawa Electric Co Ltd:The | Method and apparatus for measuring concentration of liquid and liquid concentration detecting sensor |
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