CN100356071C - Minitype jet pump and preparation method - Google Patents
Minitype jet pump and preparation method Download PDFInfo
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- CN100356071C CN100356071C CNB2004100097022A CN200410009702A CN100356071C CN 100356071 C CN100356071 C CN 100356071C CN B2004100097022 A CNB2004100097022 A CN B2004100097022A CN 200410009702 A CN200410009702 A CN 200410009702A CN 100356071 C CN100356071 C CN 100356071C
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- jet pump
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Abstract
The present invention provides a miniature jet pump and a preparation method thereof. A pump body comprises a drive structure and a suction structure, wherein the drive structure is composed of a jet nozzle and a drive cavity connected with the jet nozzle; the drive cavity is provided with a drive flow inlet hole; the suction structure comprises a suction inlet end, suction flow paths and a diffusion outlet; the jet nozzle is positioned in the diffusion outlet; the suction flow paths are arranged at both sides of the jet nozzle. High-pressure drive gas or liquid enters the drive cavity through the drive flow inlet hole, generates high-speed jet in the outlet of the jet nozzle, and simultaneously generate vortex vortexes in the boundary; the vortexes sucking the fluid in the suction flow paths enter the jet so that two kinds of mixed fluid with different current speed jointly flow into the diffusion outlet. The miniature jet pump is prepared by utilizing an MEMS technological design through two photolithography plates, has wide selection range of pump body material, and is easy to integrate with most of micro-fluid systems.
Description
Technical field
The invention belongs to micro fluid control, transmission, microactrator technical field, be specifically related to the miniature jet pump that a kind of employing microelectromechanical systems (MEMS) art designs is made.
Background technique
Fluid transport in the microstructure exists always because a lot of problems that small size is brought, the remaining bubble of the mobile existence of liquid in the micro channel for example, and at present the MEMS Micropump realizes that because of its complex structure, processing difficulty is bigger, and cost is higher and limited its extensive use.
Micropump is the core parts of microfluidic control system, adopt the micropump of MEMS technology processing mainly to be divided into mechanical fluid control system and on-mechanical liquid control system, the machinery micropump mainly comprises piezoelectric micropump, electromagnetism Micropump, mems electrostatic pump and Pneumatic Micropump etc., the common issue with of these several Micropumps is complex structures, the difficulty that processing realizes is bigger, fabricating cost is higher relatively, and driving need add complicated electric equipment; The on-mechanical Micropump mainly comprises electrohydrodynamic pump, magneto hydrodynamic pump etc., and these a few class Micropumps all are to drive with the mode that powers up, and electrically driven (operated) narrow limitation also clearly, can not drive non-charged molecule, be that heterogeneous body moves, device lacks flexibility, and the potentiality that further develop are less.And the import of existing a lot of micropump system and outlet all have movable member (as little valve arrangement), and this has just increased the difficulty of micropump processing, and in the working procedure of pump, terminal valve very easily damages, and has shortened the working life of Micropump simultaneously.General Biological Chip all is not reproducible utilization, and therefore above two kinds of Micropumps are all higher because of its cost, the realization difficulty is big, and can not extensive use in micro-fluid chip.
Summary of the invention
The present invention overcomes shortcomings such as above-mentioned micropump complex structure, preparation process's difficulty are big, and a kind of miniature jet pump is provided, and need not to add drive systems such as complicated electricity, magnetic, heat; There is not moving member in the micropump, simple in structure, be applicable to that the trace of various fluids transports.
Another characteristics of the present invention are: preparation process realizes that easily the selectable range of pump housing material is big, is easy to most of microfluid systems integrated.
Technological scheme of the present invention is as follows:
A kind of miniature jet pump, the pump housing comprises driving structure and suction structure, it is characterized in that: driving structure is made up of jet nozzle and the actuator chamber that is attached thereto, suction structure comprises suction entry end, suction runner and outlet diffusor, jet nozzle is positioned at the outlet diffusor place, the suction runner is located at the both sides of jet nozzle, under the driving force effect, the jet nozzle outlet port of actuator chamber can produce high-speed jet, produce vortex at its boundary simultaneously, the fluid that vortex entrainments in the suction runner enters jet, and the fluid-mixing of two kinds of different in flow rate flows into outlet diffusor jointly.
Described suction runner is made up of a plurality of runners that are parallel to each other, and the end of each runner is the jet nozzle shape, when fluid is flowed through runner terminal, can produce vortex at the jet boundary place of its generation, and the fluid that vortex entrainments in the adjacent channels enters jet.
Described suction entry end connects a micro-fluid chip.
Actuator chamber is provided with the driving fluid inlet opening, and high drive gas or liquid enter actuator chamber through the driving fluid inlet opening, produces high-speed jet in the jet nozzle outlet port.
Described actuator chamber is a seal chamber, produces jet by driving mode such as piezoelectricity, electromagnetism, static, marmem, finger pressures.
A kind of preparation method of miniature jet pump, step comprises:
(1) photoetching on the silicon chip, the driving structure that etches the miniature jet pump and suction structure, driving structure comprise jet nozzle and the actuator chamber that is attached thereto, and suction structure comprises suction ports, suction runner and outlet diffusor;
(2) adopt plastics, polymer, glass sheet or silicon chip as cover plate;
(3) silicon chip and cover plate are aimed at bonding.
A kind of preparation method of micropump, step comprises:
(1) preparation mould, adopt the molded or vacuum hot-pressing of three-dimensionally shaped processing to make plastics or polymer material pump body structure, this structure comprises the driving structure and the suction structure of miniature jet pump, driving structure comprises jet nozzle and the actuator chamber that is attached thereto, and suction structure comprises suction ports, suction runner and outlet diffusor;
(2) adopt plastics, polymer, glass sheet or silicon chip as cover plate;
(3) plastics or the polymer pump housing that make are aimed at bonding with cover plate.
Photoetching on cover plate, etching reach through hole figure are got through the hole in corresponding marked locations.
Photoetching on silicon chip, etch mould structure, adopt the molded or vacuum hot-pressing of three-dimensionally shaped processing to make plastics or polymer material pump body structure.
Technique effect of the present invention: the present invention is according to the two-dimentional turbulent jet theory of classics, used the air-flow with certain pressure and can produce this characteristic of high-speed jet at the micro nozzle place, a kind of miniature jet pump that utilized the MEMS technological design.According to the Classical Fluid Mechanics theory, finished designing and producing and testing of gas-gas, gas-liquid, liquid-gas, liquid-liquid miniature jet pump.This miniature jet pump is applicable to that the trace of various fluids transports, selectable range with simple in structure, pump housing material is big, technology realizes easily, driving mode simply need not to add characteristics such as drive system such as complicated electricity, magnetic, heat, it is integrated that it is easy to most of microfluid systems, prolong the working life of Micropump, improved the stability of its work.
The Biological Chip of well-known general meaning all is promptly to throw type, the sharpest edges of miniature jet pump are except adopting MEMS technology processing on the silicon chip, also comprise three-dimensionally shaped processing method such as method of molding and hot-pressing method based on plastics or polymer material, make its easily and some cheap plastics or polymer material chip integrated, this just greatly reduces the fabricating cost of entire chip.Thereby for it lays a solid foundation in extensive use biological, the medical science Detection range, we can be integrated in it the sample introduction of smooth realization response thing on PCR array chip or the chemical analysis chip.
The miniature jet pump driving pressure that reaches of the present invention is lower, and the pressure of 40kPa can make it start working, and general injector for medical purpose just can drive its work.
Description of drawings
Below in conjunction with accompanying drawing, this invention is made detailed description.
Fig. 1 is a miniature jet pump plane structure schematic representation of the present invention;
Fig. 2 miniature jet pump test structure principle schematic;
Fig. 3 is the matched curve of driving pressure and Jet injector back pressure relation;
The miniature jet pump plane structure schematic representation of multistage nozzle of Fig. 4 and usefulness;
Fig. 5 miniature jet pump technique is made the flow process sectional drawing;
The pump body structure electromicroscopic photograph that erodes away on Fig. 6 silicon chip.
Embodiment:
Fig. 1 is the plane structure schematic representation of miniature jet pump provided by the invention.The main body of this miniature jet pump comprises driving structure and suction structure, driving structure is made up of jet nozzle 4 and the actuator chamber 2 that is attached thereto, wherein actuator chamber 2 is provided with driving fluid inlet opening 1, driving fluid inlet opening 1 is positioned at pairing a certain position, actuator chamber 2 tops, be the interface that is connected with exterior line, actuator chamber 2 can be square, circle or ellipse etc.Actuator chamber 2 and jet nozzle 4 have constituted the driving structure that produces jet together.The present invention also can be with actuator chamber 2 sealings, process the pump chamber film by micro-machined method, sticking thereon piezo-electric sheet, magnetic sheet, marmem film or respectively add skim electrode in the upper and lower surface of pump chamber, also can pass through piezoelectricity, modes such as electromagnetism and static or finger pressure drive and produce jet, drive its work.When jet is injected in the static environment, and the surface of discontinuity place between the stationary fluid produces vortex on every side, vortex entrainments surrounding fluid and enters jet, in company with the original fluid continuous-flow of penetrating forward, thereby formation negative pressure, can be by the sectional shape of change jet nozzle and the size of circular crosssection, outlet port, the service behaviour of control miniature jet pump.Suction structure comprises suction ports, suction runner 3 and outlet diffusor 5, and suction runner 3 is located at the both sides of jet nozzle.The working procedure of miniature jet pump of the present invention is as follows: squeeze into high pressure draught in driving fluid inlet opening 1, through actuator chamber 2, outlet port at jet nozzle 4 produces high-speed jet, jet fluid and have the discontinuous surface of discontinuity of speed on every side between the stationary fluid, general inevitable being interfered of surface of discontinuity, lose stable, thereby the outlet port at suction runner 5 produces vortex, the gas that vortex entrainments in the both sides suction runner 3 enters jet, constantly move simultaneously, distortion, division produces turbulent fluctuation, its influence forms the mixing layer of inside and outside two free turbulent fluctuations gradually to the development of inside and outside both sides, because the lateral transport of momentum, entrainment that the fluid that enters is obtained momentum and flow into outlet diffusor 5 forward in company with the original fluid that penetrates, form the mixing section of different runner inner fluids, in mixing layer, form certain current gradient, shear layer appears, fluid originally loses momentum and underspeeds, the main effect of outlet diffusor 5 is that the kinetic energy with jet nozzle 4 outlet ports changes pressure energy into, so continuous work is to reach the purpose that vacuumizes.Regulate the size of each structure of miniature jet pump, can realize the control of different flow scope.After pump shapes in addition, can control the flow of miniature jet pump then by regulating the pressure values of propellant.
Designed entrance cavity 6 and inlet 7 in the left side of the miniature jet pump pump housing for the ease of measuring us, as shown in Figure 2, inlet 7 is positioned at a certain position on entrance cavity top.In actual applications, entrance cavity 6 can be designed to the micro-fluid chip of various patterns, the suction ports of miniature jet pump links to each other with entrance cavity 6, gas or liquid in the suction chip, thereby produce negative pressure at chip internal, traction liquid is full of chip, and the mode of negative pressure traction flow of fluid can be avoided producing bubble in the inside of micro-fluid chip.
We use Bernoulli's equation respectively on the circular crosssection of (being the outlet port of the ingress of propellant to jet) and nozzle exit in driving pipeline:
Here P
PumpBe the pressure of propellant, V
0Be the speed of nozzle exit gas, P
LossBe the loss of manifold pressure, P
0Be that gas-static power is barometric pressure, P
sBe the negative pressure that the jet expansion place produces. thus formula we can obtain the flow velocity V of nozzle exit
0
According to the two-dimensional incompressible equidensity turbulent jet theory that contracts. the speed V on the jet axis
mWith Entrainment Velocity V
cCan be expressed as:
Here b
0Be the width of nozzle, x is jet face and outgoing initial point distance, and the value of ε is the empirical value 0.154 that draws according to experiment.
The mean velocity of any fluid that Jet injector drives
Can get by the following formula estimation
Here d is the water conservancy diameter of pipeline, and Δ P is the pressure reduction that produces, and μ is the viscosity coefficient of liquid, and l is a pipe range.
The back pressure of miniature jet pump is measured: driving suction port 1 place at device squeezes into high drive gas, 7 places that enter the mouth connect a capillary glass tube, vertically insert the end of glass capillary in the water, under different gas-powered pressure, the Metacentre Height difference of rising liquid level, so we can draw the relation curve of different driving pressure and back pressure.With reference to figure 3, as can be seen: the result is basic and theory-compliant is linear, and the working pressure of miniature jet pump is lower.
In order to improve the efficient of Jet injector, can adopt the pump housing form of multistage nozzle arrangements and usefulness.Referring to Fig. 4, the suction runner is several runners, and each runner is parallel to each other, and the end of runner forms nozzle; When fluid is flowed through runner terminal, can produce high-speed jet in the outlet port, produce vortex at its boundary simultaneously, the fluid that vortex entrainments in the adjacent channels enters jet.
Except gas-gas miniature jet pump, we also can obtain gas-liquid according to same principle, liquid-liquid and liquid-gas jet pump, but owing to the surface tension effects of liquid under the miniature scale is remarkable, resistance increases, and corresponding driving pressure also can increase.
Miniature jet pump type of service can also produce fluid in the jet suction intermediate conduit for: both sides air inlet, be about to driving structure and suction structure exchange function, be specially suction port 7 and inject high drive gas, outlet at the suction runner 3 of both sides produces jet, jet boundary produces vortex, entrainments the gas in jet nozzle 4 and the actuator chamber.
With reference to figure 5, the miniature jet pump can be realized by following process program:
Scheme one, MEMS processing technology
1, technique for processing silicon chip, concrete technological process is as follows:
1) shown in Fig. 5-a on the silicon chip 9 photoetching development expose the part (being the pump body structure of minisize diffusion pump) of wanting etching;
2) shown in Fig. 5-b, erode away pump body structure on the silicon chip 9, concrete corrosion depth is determined (dry etching and wet etching all can) according to performance index.
2, the processing technology of cover plate, concrete technological process is as follows:
Shown in Fig. 5-c, photoetching etches punching mark 12 on the cover plate 11 of materials such as glass or plastics, polymer, silicon chip; Shown in Fig. 5-d, get through hole 13 (with the connection mouth of exterior line) on the cover plate 11;
3, silicon chip and cover plate are aimed at bonding.
Shown in Fig. 5-e, the intact silicon chip 10 of etching is aimed at bonding (comprising methods such as anode linkage and polymer-bound) with the cover plate 14 that has openning hole.
This designed microjet pump of patent just can be realized micro-pump structure by two reticle, a version is designed for etching pump body structure on the silicon, other one aims at glass punching design, the reticle of glass punching can not done in some cases, and this has further reduced the cost of making again.
The electromicroscopic photograph of the pump body structure on the silicon chip that Fig. 6 finishes for etching, main structure comprises: actuator chamber 2, suction runner 3, jet nozzle 4, outlet diffusor 5.
Scheme two, three dimensional mold method for processing forming
1, at first be to make the negative norm tool, its manufacturing process is that concrete steps are identical with the etch step of scheme one silicon chip at silicon chip surface photoetching and the complementary structure that erodes away the minisize diffusion pump pump housing.Mould also can adopt other material to make, as SU8 etc.
2, employing is based on the three-dimensionally shaped method such as the processing methods such as method of molding or hot-pressing method of some plastics and polymer material, utilize the negative norm tool to make the pump housing of some plastics or polymer material (as PDMS, PFPE and PMMA etc.), little method of molding is specific as follows: at first will be convenient to drag mould by long one layer of polymeric on the silicon chip as the negative norm tool, the polymer with fluidised form is coated on the silicon mould, vacuumizes then, the polymer hot setting, the demoulding obtains and the pump body structure of negative norm tool pattern complementation.Aim at bonding with the cover plate (comprising materials such as plastics, polymer and silicon chip) of punching at last, realize the structure of Micropump.
3, adopt plastics, polymer, glass sheet or silicon chip as cover plate, as the inlet opening is arranged on the cover plate, photoetching on cover plate, etching reach through hole figure are got through the hole in corresponding marked locations.
4, will aim at bonding with cover plate with the plastics or the polymer pump housing that the negative norm tool makes.
This three-dimensionally shaped processing method based on plastics and polymer material makes that this kind miniature jet pump is easy and some cheap material chips are integrated, this just greatly reduces the fabricating cost of entire chip, thereby lays a solid foundation in extensive use biological, the medical science Detection range for it.
Claims (9)
1, a kind of miniature jet pump, the pump housing comprises driving structure and suction structure, it is characterized in that: driving structure is made up of jet nozzle and the actuator chamber that is attached thereto, suction structure comprises the suction entry end, suction runner and outlet diffusor, jet nozzle is positioned at the outlet diffusor place, the suction runner is located at the both sides of jet nozzle, under the driving force effect, the jet nozzle outlet port of driving structure can produce high-speed jet, produce vortex at its boundary simultaneously, the fluid that vortex entrainments in the suction runner enters jet, and the fluid of two kinds of different in flow rate mixes the common outlet diffusor that flows into, and described suction runner is made up of a plurality of runners that are parallel to each other, the end of each runner is the jet nozzle shape, when fluid is flowed through runner terminal, can produce vortex at its boundary, the fluid that vortex entrainments in the adjacent channels enters jet.
2, miniature jet pump as claimed in claim 1 is characterized in that: described suction entry end connects a micro-fluid chip.
3, miniature jet pump as claimed in claim 1, it is characterized in that: actuator chamber is provided with the driving fluid inlet opening, and high drive gas or liquid enter actuator chamber through the driving fluid inlet opening, produce high-speed jet in the jet nozzle outlet port.
4, miniature jet pump as claimed in claim 1 is characterized in that: described actuator chamber is a seal chamber, produces jet by piezoelectricity, electromagnetism, static, marmem or finger pressure driving mode.
5, a kind of method for preparing the described miniature jet pump of claim 1, step comprises:
(1) photoetching on the silicon chip, the driving structure that etches the miniature jet pump and suction structure, driving structure is made up of jet nozzle and the actuator chamber that is attached thereto, and suction structure comprises suction entry end, suction runner and outlet diffusor;
(2) adopt polymer, glass sheet or silicon chip as cover plate;
(3) silicon chip and cover plate are aimed at bonding.
6, miniature jet pump preparation method as claimed in claim 5 is characterized in that: photoetching on cover plate, etching reach through hole figure, get through the hole in corresponding marked locations.
7, miniature jet pump preparation method as claimed in claim 5 is characterized in that: photoetching on silicon chip, the driving structure that etches the miniature jet pump and suction structure, and step comprises:
(1) at the coated mask material optical resist of silicon chip surface;
(2) photoetching development exposes the part of wanting etching;
(3) dry method or wet etching.
8, a kind of method for preparing the described miniature jet pump of claim 1, step comprises:
(1) preparation negative norm tool, adopt the little molded or vacuum hot-pressing of three-dimensionally shaped processing to make the polymer material pump body structure, this structure comprises the driving structure and the suction structure of miniature jet pump, driving structure is made up of jet nozzle and the actuator chamber that is attached thereto, and suction structure comprises suction entry end, suction runner and outlet diffusor;
(2) adopt polymer, glass sheet or silicon chip as cover plate;
(3) the polymer pump housing that makes is aimed at bonding with cover plate.
9, miniature jet pump preparation method as claimed in claim 8 is characterized in that: photoetching on cover plate, etching reach through hole figure, get through the hole in corresponding marked locations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100097022A CN100356071C (en) | 2004-10-25 | 2004-10-25 | Minitype jet pump and preparation method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100097022A CN100356071C (en) | 2004-10-25 | 2004-10-25 | Minitype jet pump and preparation method |
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| CN1601115A CN1601115A (en) | 2005-03-30 |
| CN100356071C true CN100356071C (en) | 2007-12-19 |
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| CNB2004100097022A Expired - Fee Related CN100356071C (en) | 2004-10-25 | 2004-10-25 | Minitype jet pump and preparation method |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100434728C (en) * | 2005-04-07 | 2008-11-19 | 北京大学 | Minisize diffusion pump and preparation method thereof |
| US8109083B2 (en) * | 2007-11-05 | 2012-02-07 | Cummins Filtration Ip, Inc. | Aspirator support structure |
| CA2749878C (en) * | 2009-02-12 | 2014-04-01 | The Board Of Trustees Of The University Of Illinois | Magnetically driven micropump |
| JP6003020B2 (en) * | 2011-08-03 | 2016-10-05 | ソニー株式会社 | Microchip and fine particle analyzer |
| CN103864000B (en) * | 2014-02-28 | 2016-02-03 | 西南交通大学 | A kind of electric conjugation fluidic micropumps |
| DE102015224624B3 (en) * | 2015-12-08 | 2017-04-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Free-jet metering system for delivering a fluid into or under the skin |
| US20200386243A1 (en) * | 2017-04-10 | 2020-12-10 | 3M Innovative Properties Company | Powder jet pump |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5224843A (en) * | 1989-06-14 | 1993-07-06 | Westonbridge International Ltd. | Two valve micropump with improved outlet |
| JP2002356224A (en) * | 2001-03-30 | 2002-12-10 | Trinity Ind Corp | Ejector, minute solid piece recovering device and fluid conveyor |
| US20030223880A1 (en) * | 2002-05-29 | 2003-12-04 | Yung-Chiang Chung | A pneumatic driving device for micro fluids wherein fluid pumping is governed by the control of the flow and direction of incident plural gas streams |
| US20040172966A1 (en) * | 2003-03-05 | 2004-09-09 | Yukikatsu Ozaki | Ejector with tapered nozzle and tapered needle |
-
2004
- 2004-10-25 CN CNB2004100097022A patent/CN100356071C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5224843A (en) * | 1989-06-14 | 1993-07-06 | Westonbridge International Ltd. | Two valve micropump with improved outlet |
| JP2002356224A (en) * | 2001-03-30 | 2002-12-10 | Trinity Ind Corp | Ejector, minute solid piece recovering device and fluid conveyor |
| US20030223880A1 (en) * | 2002-05-29 | 2003-12-04 | Yung-Chiang Chung | A pneumatic driving device for micro fluids wherein fluid pumping is governed by the control of the flow and direction of incident plural gas streams |
| US20040172966A1 (en) * | 2003-03-05 | 2004-09-09 | Yukikatsu Ozaki | Ejector with tapered nozzle and tapered needle |
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