CN105443450A - Structure of microfluidic chip series micro device - Google Patents

Structure of microfluidic chip series micro device Download PDF

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Publication number
CN105443450A
CN105443450A CN201510815408.9A CN201510815408A CN105443450A CN 105443450 A CN105443450 A CN 105443450A CN 201510815408 A CN201510815408 A CN 201510815408A CN 105443450 A CN105443450 A CN 105443450A
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micro
gas
liquid
passage
valve
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CN201510815408.9A
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CN105443450B (en
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彭兴跃
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Xiamen Core Biotechnology Co Ltd
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Individual
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1065—Multiple transfer devices
    • G01N35/1074—Multiple transfer devices arranged in a two-dimensional array
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F1/00—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped
    • F04F1/18—Pumps using positively or negatively pressurised fluid medium acting directly on the liquid to be pumped the fluid medium being mixed with, or generated from the liquid to be pumped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0017—Capillary or surface tension valves, e.g. using electro-wetting or electro-capillarity effects
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0021—No-moving-parts valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N13/00—Investigating surface or boundary effects, e.g. wetting power; Investigating diffusion effects; Analysing materials by determining surface, boundary, or diffusion effects
    • G01N13/02—Investigating surface tension of liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0621—Control of the sequence of chambers filled or emptied
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0688—Valves, specific forms thereof surface tension valves, capillary stop, capillary break
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/08—Regulating or influencing the flow resistance
    • B01L2400/082—Active control of flow resistance, e.g. flow controllers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1095—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices for supplying the samples to flow-through analysers
    • G01N35/1097—Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices for supplying the samples to flow-through analysers characterised by the valves

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Abstract

The invention discloses a structure of a microfluidic chip series micro device, namely a micro pump formed by combing two micro valves and a micro piston. Each micro valve comprises a gas channel and three fluid channels, wherein gas is fed into one end of the gas channel, the other end of the gas channel is communicated with one end of the middle fluid channel through a gradually-narrowed micro channel, and the two sides of the micro channel are communicated with one ends of the other two fluid channels through two gradually-narrowed micro channels respectively; the other end of the middle fluid channel and the other end of the fluid channel on one side are combined into a liquid inlet, and the other end of the fluid channel on the other side is a liquid outlet. The micro piston comprises a gas channel and a fluid channel, wherein gas is fed into one end of the gas channel, and the other end of the gas channel is communicated with the middle section of the fluid channel through a gradually-narrowed micro channel; one end of the fluid channel is connected with the liquid outlet of one micro valve, and the other end of the fluid channel is connected with the liquid inlet of the other micro valve. The micro device can be formed by etching a hard chip material at a time.

Description

A kind of structure of microfluidic circuit chip series micro device
The present invention is the applying date: 2010-09-14, application number: 201080069777.3(PCT application number: PCT/CN2010/076904), title: the divisional application of " a kind of structure of microfluidic circuit chip series micro device ".
Technical field
The present invention relates to the technical field of microfluidic circuit chip manufacturing, special relevant with the micro-pump structure of microflow chip series micro device.
Background technique
The technology with bright prospects that the every field laboratory researches such as chip lab (Labonachip) is very fast the be widely used in life science of current development, chemistry and physics and routine medical detect.Microfluidic circuit (also crying micro-fluidic in China) chip (Microfluidicchip) technology is then the backbone technology in chip lab.Because microfluid is that the transport carrier of material in chip lab is (as the various dissolved compounds in aqueous phase, cell in culture medium etc.), the fluid how on control chip in micro passage and various chip micro device flows accurately, shift thus drive the normal work of microfluidic circuit chip.Therefore, the most basic and most important constituent elements in microfluidic circuit chip, namely micro device (microdevices) be exactly the pump (i.e. Micropump) of microfluid on chip, the static pressure transducer of valve (i.e. switch), induction microfluid pressure or experience the velocity transducer of microfluid speed.
Because the manufacturing process of the micro devices such as existing Micropump, micro-valve is complicated, not desirable performance, although the researcher in this field is making efforts always for this reason, and continuous invented techniques new process, the technological deficiency of the micro device such as Micropump, micro-valve is still the technical bottleneck of restriction microfluidic circuit chip extensive use.Such as, the pump (instead of built-in chip type pump) being placed in chip exterior is still the device of main driving chip inner fluid.The design and running of existing micro device adopts several modes such as electricity, magnetic and barrier film control.Such as, electroosmotic pump (electroosmoticpump) or electric power valve (electrokineticgatingvalve), because the direct effect of voltage is not only suitable for all fluid systems, also can the Chemical Physics environment of interference system.If adopt this magnetic control, ferrofluid (ferrofluidicpump) then can be adopted to utilize the movement of the mobile control ferrofluid of external permanent magnets to the operation of the switch and pump that carry out valve, but ferrofluid itself can contact with the fluid system in chip microfluidic circuit, outside permanent magnet controls also complexity and not easily automation.What current employing was maximum is barrier film controlling method, namely utilize can the material of deformation as PDMS(polydimethylsiloxane), apply at barrier film the running that pressure change comes control valve and pump outward.The advantage of diaphragm pump (diaphragmpump) works together reliably effectively, similar mechanical pump, but shortcoming also clearly, as deformable materials must be used as barrier film, so just can not avoid this material may to the pollution of system or interference, in addition the complexity of this province of diaphragm pump make the cost that manufactures and the life-span all undesirable.
Therefore, there is above various defect in the microfluidic circuit chip key technologies such as existing micro-valve, Micropump, especially, for glass-chip (there is best optical quality and chemical quality), because glass is non deformable hard material, built-in pump valve system cannot be manufactured on glass-chip, make further developing of glass-chip be subject to great restriction.
Summary of the invention
The object of the present invention is to provide a kind of structure of microfluidic circuit chip series micro device, make microfluidic circuit control the most basic micro device can in hard cores sheet material an etch-forming.
In order to reach above-mentioned purpose, solution of the present invention is:
A structure for microfluidic circuit chip series micro device, is comprised a gas channel and at least one fluid passage, is communicated with between gas channel and each fluid passage by micro passage; Described micro device is Micropump, is combined into by two micro-valves and a micro-piston; Each micro-valve comprises a gas channel and three fluid passages, one termination gas of gas channel, the other end of gas channel is communicated with by one end with a middle fluid passage, a micro passage narrowed gradually, the both sides of this micro passage are communicated with one end of two fluid passages respectively by a micro passage narrowed gradually again, the other end of intermediate liquid passage and the other end of side fluid passage merge into liquid entering hole, and the opposite side of opposite side fluid passage is liquid outlet; Micro-piston comprises a gas channel and a fluid passage, one termination gas of gas channel, the other end of gas channel is communicated with the stage casing of fluid passage by a micro passage narrowed gradually, and one end of fluid passage is connected with the liquid outlet of a micro-valve and the other end is connected with the liquid entering hole of another micro-valve.
After adopting such scheme, the most basic micro device (Micropump) of microfluidic circuit chip of the present invention is controlled by the micro-circuit of the gas of the pressure on the number of chip internal, micro device utilizes micropore to intercept gas phase and liquid phase, without any movable part, also without the need to any special ventilative or flexible material,---pressure difference of liquid two-phase drives gas---the liquid interface by gas thus make micro device realize the functions such as its sensed pressure, switch stream, the conveying of liquid effective power.Micro device at hard material (as glass) last etch-forming, can be convenient to the integrated a large amount of micro device of low cost, and additive method also can be adopted on other materials to reach the structure of chip and this several basic micro device.
Accompanying drawing explanation
Fig. 1 a to Fig. 1 c is the schematic diagram of fluid pressure susceptor;
Fig. 2 a to Fig. 2 c is the schematic diagram of micro-valve;
Fig. 3 a to Fig. 3 c is the schematic diagram of micro-piston;
Fig. 4 a to Fig. 4 b is the schematic diagram of Micropump;
Fig. 5 a is that the middle liquid-vapor interface of micro-valve (MISVA) is to the response of gas pressure;
Fig. 5 b is the Move Mode of liquid-vapor interface in M channel direction under different gas pressure;
Fig. 5 c is the Move Mode of liquid-vapor interface in left and right (L and R) channel direction under different gas pressure;
Fig. 5 d is the digital pneumatic drive pattern of micro-valve;
Fig. 5 e is that micro-valve is to the pressure-actuated reaction of digital oxidizing gases;
Fig. 6 a is the leak-testing of micro-valve under right channel pressure;
Fig. 6 b is the scope that micro-valve bears the reverse pressure of right side (R) passage;
Fig. 6 c is the leak-testing of micro-valve under left side (L) and downside (M) channel pressure;
Fig. 6 d is the scope that micro-valve bears left side (R) passage and downside (M) reverse pressure;
Fig. 7 a is the dynamic test that Micropump promotes bubble;
Fig. 7 b is the output power of Micropump different cycles;
Fig. 7 c the shortest pump cycle and maximum pump export the change under backpressure;
Relation between Fig. 7 d pump head and pump output speed;
Fig. 8 is the mode adopting the running of digitizing gas Stress control Micropump.
Embodiment
A kind of microfluidic circuit chip series micro device that the present invention discloses, in structural design, this serial micro device comprises a gas channel and at least one fluid passage, is communicated with between gas channel and each fluid passage by micro passage (capillary tube).
Theoretical foundation of the present invention is: in micro passage, liquid-vapor interface has in the pressure difference of gas-liquid two-phase and the movement direction of liquid-vapor interface the relation determined, utilizes this relation can reach the object of two aspects: the movement of A liquid-vapor interface can reflect the pressure difference of gas-liquid two-phase; B controls the movement of liquid-vapor interface by the pressure difference controlling gas-liquid two-phase.
Be described with specific embodiment below.
Refer to the schematic diagram that Fig. 1 a to Fig. 1 c is fluid pressure susceptor.Fluid pressure susceptor is included in a gas channel 11 and a fluid passage 12 of chip formation.One termination gas of gas channel 11, experience gas pressure, the other end of gas channel 11 is an aperture by one end that the 13(micro passage, micro passage 13 that narrows gradually is narrow) be communicated with one end of fluid passage 12, another termination liquid of fluid passage 12, experience and fluid pressure.
The working principle of fluid pressure susceptor (MISEN, amicrosurfacetensionsensor) is: can hold gas and liquid in the middle of the micro passage 13 on chip.---liquid---Gu mutual interfacial tension difference forms gas---arc (being commonly called as meniscus) at liquid interface due to gas, the non-zero net result of this gas with certain curvature---liquid interface upper surface tension force needs the difference of pressure between gas-liquid two-phase to maintain balance, otherwise interface will be moved.This effect is also known as capillarity.This capillary power strengthens along with the reduction of capillary diameter.For the micro passage 13 on chip, capillary intensity strengthens along with the reducing of width of micro passage 13 being equivalent to capillary diameter.If design the geometrical shape being similar to long-narrow triangular mesh that width zooms in gradually on micro passage 13, so, being positioned at the gas of this triangle micro passage 12 diverse location---liquid interface will have the capillarity of varying strength, correspond to gas in various degree---the pressure difference of liquid two-phase.Like this, under the promotion of two-phase pressure difference, the pressure difference of observable gas---position at liquid interface just shows gas---liquid two-phase.When the pressure of gas is fixed and is known, as Fig. 1 a, the liquid pressure of reduction increases gas---the pressure difference of liquid two-phase, makes to bring about the desired sensation---, and liquid interface is moved (see Fig. 1 b) towards flow direction.If the pressure of liquid continues to reduce, then interface can move to the summit (Fig. 1 c) that triangle connects fluid passage always.This summit is actually connection pressure pick-up (MISEN) and fluid passage obtains micropore (MISTA, amicrosurfacetensionalveolus), gas in micropore---liquid interface, owing to having maximum curvature or capillarity, makes to bring about the desired sensation---and liquid interface here can be stopped.Like this, gas---the position at liquid interface just shows the pressure with gas, and this section of leg-of-mutton micro passage just performs the task of pressure pick-up.If fluid pressure is constant, then this susceptor can be used to the pressure of measurement gas.
Refer to the schematic diagram that Fig. 2 a to Fig. 2 c is micro-valve (MISVA, amicrosurfacetensionvalve).Micro-valve is included in a gas channel 21 and three fluid passages 22,23,24 that chip is formed.One termination gas of gas channel 22, the other end of gas channel 22 is communicated with one end of a fluid passage 22 by a micro passage narrowed gradually 25, the micro passage 26(micropore that the both sides of this micro passage 25 narrow gradually respectively by one again) the micro passage 27(micropore that is communicated with (entrance as liquid flows into) with one end of a fluid passage 23 and narrowed gradually by one) be communicated with one end of a fluid passage 24 (outlet as liquid outflow), the other end of three fluid passages 22,23,24 connects liquid separately.
Due to the inherent larger gas of micropore (MISTA) the liquid interface that---can form stable gas under the pressure difference of liquid two-phase---, this interfacial barrier liquid or gas are by the interface in micropore, and in fact this serve the effect stopping fluid.When this gas---time micropore is left at liquid interface, fluid just can flow through micropore again.Respectively opening an aperture (MISTA) is connected (see Fig. 2 a in the both sides of fluid pressure susceptor (MISEN) with two fluid passages, the fluid passage on usual top is connected with one of them side canal), gas---movement at liquid interface makes be full of (see Fig. 2 b and Fig. 2 c) by gas in MISEN and form stable gas in the aperture of both sides---liquid interface (MISTA) thus the connection of liquid barrier passage when gas pressure raises, reach the object cutting off flow of fluid, this is the equal of the closing function performing micro-valve.When gas pressure reduces, gas---liquid interface is moved back in original gas channel, and MISEN is full of by liquid again, and fluid passage is communicated with again, and this is equivalent to the opening state of micro-valve.The gas pressure of gas channel is in a high position under control or low level is just closed or opens micro-valve.Due to without any movable part, this valve is long-life without wearing and tearing.
Certainly, micro-valve also can comprise a gas channel and two fluid passages, one termination gas of gas channel, the other end of gas channel is communicated with one end of a fluid passage by a micro passage narrowed gradually, and this micro passage only has side (left side or the right) to be communicated with one end of another one fluid passage by a micro passage narrowed gradually (micropore) again, the other end of two fluid passages connects liquid separately.
Fig. 5 a to Fig. 5 e describes gas---the pressure difference of liquid two-phase and gas---liquid interface is the relation of position and repeated reliability test result in the susceptor.Specifically, Fig. 5 a is that the middle liquid-vapor interface of micro-valve (MISVA) is to the response of gas pressure.In the micro-valve of V-arrangement, liquid-vapor interface can move down (to M passage) along with the increase of gas pressure (figure middle and upper part), also can move by L and R passage to the left and right sides.In figure, thick line A represents the metering system of displacement distance.Fig. 5 b is the Move Mode of liquid-vapor interface in M channel direction under different gas pressure.Gas-liquid interface is subject to moving around to M passage of the impact of air pressure go, and the distance of its movement is measured, and (see Fig. 5 a), its direction is marked by arrow.Fig. 5 c is the Move Mode of liquid-vapor interface in left and right (L and R) channel direction under different gas pressure.Gas-liquid interface is subject to moving around to L or R passage of the impact of air pressure go, and the distance of its movement is measured, and (see Fig. 5 a), its direction is marked by corresponding arrow.Fig. 5 d is the digital pneumatic drive pattern of micro-valve.Air pressure is set to 2kPa and 4kPa, and air pressure is repeatedly changed between two pressure, can drive the switch of micro-valve.Fig. 5 e is that micro-valve is to the pressure-actuated reaction of digital oxidizing gases.The realization of micro-threshold switch function is realized by the movement of gas-liquid interface.The periodicity order-driven gas-liquid interface of digital pneumatic reliably accurately moves regularly, thus realizes the switching function (being namely communicated with the function of miniflow and disconnection miniflow) of valve.
Fig. 6 a to Fig. 6 d is the test result of micro-valve performance.Data show micro-valve can bear the pressure of 1.5kPa and non-leakage.Specifically, Fig. 6 a is the leak-testing of micro-valve under right channel pressure.Under certain backpressure (PR from right channel), the reverse movement of liquid-vapor interface, when liquid-vapor interface hold can't stand pressure and with another passage UNICOM time, valve produce leak.Fig. 6 b is the scope that micro-valve bears the reverse pressure of right side (R) passage.When from right channel pressure increase time, liquid-vapor interface moves under the effect of the pressure, when pressure is close to 2kPa, liquid-vapor interface be moved beyond limit, produce leak, the flow velocity of this leakage uprises suddenly.Fig. 6 c is the leak-testing of micro-valve under left side (L) and downside (M) channel pressure.Under certain backpressure (PL from left channel L and PM from lower side canal M), the reverse movement of liquid-vapor interface, when liquid-vapor interface hold can't stand pressure and with another passage UNICOM time, valve produces and leaks.Fig. 6 d is the scope that micro-valve bears left side (R) passage and downside (M) reverse pressure.When from right channel pressure increase time, liquid-vapor interface moves under the effect of the pressure, when pressure is close to 1.6-1.7kPa, liquid-vapor interface be moved beyond limit, produce leak, the flow velocity of this leakage uprises suddenly.
Refer to the schematic diagram that Fig. 3 a to Fig. 3 c is micro-piston.Micro-piston is included in a gas channel 31 and a fluid passage 32 that chip is formed.One termination gas of gas channel 31, the other end of gas channel 31 is communicated with the stage casing of fluid passage 32 by a micro passage narrowed gradually 33, and the two ends of fluid passage 32 all connect liquid.
Working principle as fluid pressure susceptor MISEN is identical, but be long by channels designs and the space of even width to hold gas---the movement at liquid interface also enters fluid passage Here it is micro-piston (MISTON, amicrosurfacetensionpiston) with micropore to intercept gas.This micro-piston limits by the volume of length to micro-piston.When gas pressure is in low level, interface is moved towards gas direction, and the liquid in fluid passage flows into MISTON(and sees Fig. 3 a to Fig. 3 c).When gas pressure is in a high position, interface is moved towards flow direction, and the liquid in MISTON is injected into fluid passage under the effect of gas pressure.
The function mode of micro-piston is similar to micro-pressure susceptor.
Refer to the schematic diagram that Fig. 4 a to Fig. 4 b is Micropump.Micropump (MISPU) is combined into by two micro-valves, 41,43 and micro-piston 42 as power micro device.Micro-valve 41 comprises a gas channel 411 and three fluid passages 412, 413, 414, micro-valve 43 comprises a gas channel 431 and three fluid passages 432, 433, 434, micro-valve 41, the structure of 43 as previously mentioned, wherein, micro-the other end of valve 41 fluid passage 412 and the other end of fluid passage 413 merge into the liquid entering hole of micro-valve 41, the opposite side of fluid passage 414 is the liquid outlet of micro-valve 41, micro-the other end of valve 43 fluid passage 432 and the other end of fluid passage 433 merge into the liquid entering hole of micro-valve 43, the opposite side of fluid passage 434 is the liquid outlet of micro-valve 43.Micro-piston 42 comprises a gas channel 421 and a fluid passage 422, and as previously mentioned, in Micropump, one end of fluid passage 422 is connected with the liquid outlet of micro-valve 41 structure of micro-piston 42 and the other end is connected with the liquid entering hole of micro-valve 43.
Micro-valve 41 is as inlet valve, and micro-valve 43 is as outlet valve (the two is commutative), and 42, micro-piston, as sucking and injection device, utilizes the Stress control of a series of digitizing gas can obtain stable pump and exports.When inlet valve is opened, (a), outlet valve cuts out Fig. 4, and micro-piston 42 sucks liquid from inlet valve.After micro-piston 42 is full of by liquid, close inlet valve, open outlet valve (Fig. 4 b), the liquid in micro-piston 42 is extruded from outlet valve.So far, a work cycle of Micropump terminates.Constantly circulate, then liquid is constantly inhaled into from inlet valve and is injected into next micro passage from outlet valve, thus forms pump output.
Fig. 7 a to Fig. 7 c is the test result that pump exports.Pump exports can reach 10nl/s the soonest.Specifically, Fig. 7 a is the dynamic test that Micropump promotes bubble.Utilize the bubble in pump promotion bit port, the power situation of pump in each process can be calculated by the movement of measuring bubble in micro passage.In figure, PO is that the pump calculated exports (Pumpoutput).Pump when indicating micro-threshold switch and piston action in figure exports data.Fig. 7 b is the output power of Micropump different cycles.The volume in line segments different in figure and numeral different pump cycle exports data.Meanwhile, the backpressure suffered by pump front end is also illustrated in figure.The volume exported due to pump directly enters vertical pipe, therefore pumps volume and directly can be scaled backpressure (kPa).Fig. 7 c the shortest pump cycle and maximum pump export the change under backpressure.Be set to by pump the fastest (the pump cycle is 15s), when backpressure constantly raises time, the output capability of pump weakens (line above) gradually.Relation between Fig. 7 d pump head and pump output speed.The increase (and being drawn by the mensuration of backpressure) of pressure head makes the output linearity of pump reduce.
Fig. 8 is the mode adopting the running of digitizing gas Stress control Micropump.Air pressure is simply set to high pressure and low pressure, namely 0 and 1.By digitized gas pressure instruction is transported to inlet valve, micro-piston and outlet valve, then pump is just started working, and produces certain pressure head and flow.Different line segments is utilized to illustrate the working condition of pump assemblies different under the driving of digitizing gas pressure instruction in figure.
Micro device provided by the invention is all controlled by the micro-circuit of the gas of the pressure on the number of chip internal, each micro device all utilizes micropore to intercept gas phase and liquid phase, without any movable part, also without the need to any special ventilative or flexible material,---pressure difference of liquid two-phase drives gas---the liquid interface by gas thus make micro device realize the functions such as its sensed pressure, switch stream, the conveying of liquid effective power.
The controlling method of above-mentioned micro device is similar to the way that digitizer controls, and arrange two fixing height gaseous pressures, control system utilizes fixing gas phase and liquid phase pressure difference, realizes the computer controlled automatic of micro device.This be a set ofly be easy to integrated, the simple microfluidic circuit control means of reliable operation.
Above-described embodiment and graphic and non-limiting product form of the present invention and style, any person of an ordinary skill in the technical field, to its suitable change done or modification, all should be considered as not departing from patent category of the present invention.

Claims (1)

1. a structure for microfluidic circuit chip series micro device, is characterized in that: comprise a gas channel and at least one fluid passage, be communicated with between gas channel and each fluid passage by micro passage; Described micro device is Micropump, is combined into by two micro-valves and a micro-piston; Each micro-valve comprises a gas channel and three fluid passages, one termination gas of gas channel, the other end of gas channel is communicated with by one end with a middle fluid passage, a micro passage narrowed gradually, the both sides of this micro passage are communicated with one end of two fluid passages respectively by a micro passage narrowed gradually again, the other end of intermediate liquid passage and the other end of side fluid passage merge into liquid entering hole, and the opposite side of opposite side fluid passage is liquid outlet; Micro-piston comprises a gas channel and a fluid passage, one termination gas of gas channel, the other end of gas channel is communicated with the stage casing of fluid passage by a micro passage narrowed gradually, and one end of fluid passage is connected with the liquid outlet of a micro-valve and the other end is connected with the liquid entering hole of another micro-valve.
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