CN100346497C - Making method of organic electroluminescent cell structure and making method of its solid protective layer - Google Patents
Making method of organic electroluminescent cell structure and making method of its solid protective layer Download PDFInfo
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- CN100346497C CN100346497C CNB021538271A CN02153827A CN100346497C CN 100346497 C CN100346497 C CN 100346497C CN B021538271 A CNB021538271 A CN B021538271A CN 02153827 A CN02153827 A CN 02153827A CN 100346497 C CN100346497 C CN 100346497C
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Abstract
The present invention relates to a manufacturing method for an organic electroluminescent element, which comprises the following steps: step a, a base material is provided, and is provided with an organic electroluminescent unit; step b, a protective layer is formed on the base material to cover the organic electroluminescent unit; step c, an ion beam is provided, and surface treatment is carried out to the protective layer by the ion beam; step d, a plastic layer is formed on the protective layer, wherein step b and step d can be repeatedly carried out for at least one time so as to improve the reliability of the element. In addition, the present invention also provides a manufacturing method for a shape fixing protective layer which is made from step b to step d.
Description
Technical field
The invention relates to the manufacture method of a kind of organic electroluminescent element (OLED device), and particularly relevant for a kind of manufacture method with organic electroluminescent element of solid protective layer (solid passivation).
Background technology
Communication industry has become main flow industry now, the emphasis that particularly portable various communication product develops especially, and flat-panel screens is man-machine communication interface, particular importance therefore seems.The technology that is applied in flat-panel screens now mainly contains following several: plasma display (Plasma Display Panel, PDP), LCD (Liquid Crystal Display, LCD), inorganic electroluminescence display (Electro-luminescent Display), light-emitting diode (Light Emitting Diode, LED), vacuum fluorescent display (Vacuum FluorescentDisplay), field-emitter display (Field Emission Display, FED) and electrochromics display (Electro-chromic Display) etc.Yet, compared to other plane Display Technique, organic electric exciting light-emitting diode (Organic Light Emitting Diode, advantages such as OLED), power saving interdependent with its self-luminous, no visual angle, technology are simple and easy, low-cost, low operating temperature scope, high answer speed and full-colorization and have great application potential are expected to become follow-on flat-panel screens.
Fig. 1 is the structural representation of known organic electroluminescent element.Please refer to Fig. 1, known organic electric-excitation luminescent unit 112 frameworks are on a base material 100, and this organic electric-excitation luminescent unit 112 mainly is made of an anode 102, an organic electric-excitation luminescent layer 106 and a negative electrode 110.Except above-mentioned rete, in order to make the luminous efficiency of organic electric-excitation luminescent unit 112 higher, between anode 102 and organic electric-excitation luminescent layer 106, a hole transmission layer 104 can be made, and between organic electric-excitation luminescent layer 106 and negative electrode 110, an electron transfer layer 108 can be made.Wherein, the joint efficiency again that the function of hole transmission layer 104 and electron transfer layer 108 is to promote electron-hole pair in the organic electric-excitation luminescent layer 106 (electron-hole pair) is to obtain better element luminous efficiency.
Please refer to Fig. 1 equally; aspect the making of organic electroluminescent element; mainly be on base material 100, to form a protective layer 114; the making of this protective layer 114 forms an organic protection layer 114a earlier; with cover base material 100 and on organic electric-excitation luminescent unit 112, then form an inorganic protective layer 114b again on above-mentioned organic protection layer 114a.
Fig. 2 is the structural representation of known another kind of organic electroluminescent element.Please refer to Fig. 2, in this component structure, organic electric-excitation luminescent unit 204 frameworks and all are manufactured with protective layer 202,206 on a base material 200 on the two sides of organic electric-excitation luminescent unit 204.The production method of said elements structure is that base material 200 is provided earlier, then forms polymeric layer 206a, ceramic layer 206b and polymeric layer 206c on base material 200, to constitute protective layer 202.Afterwards, make organic electric-excitation luminescent unit 204 on above-mentioned polymeric layer 202c.Form polymeric layer 202a, ceramic layer 202b and polymeric layer 202c at last more in regular turn on organic electric-excitation luminescent unit 204, to constitute protective layer 206.
In the known organic electroluminescent element because protective layer is to belong to soft protective layer (flexible passivation), so can to stand the ability of foreign impacts relatively poor.In addition, because soft protective layer is generally organic material or polymerizable material, make element itself also can't effectively prevent the corrosion of chemical substance.
Summary of the invention
Therefore, the objective of the invention is to propose a kind of manufacture method of organic electroluminescent element and the manufacture method of solid protective layer, it can effectively promote anticorrosive (corrosionresist) ability of element itself.
Another object of the present invention is in the manufacture method that proposes a kind of organic electroluminescent element and the manufacture method of solid protective layer, and it can effectively promote the ability that (impactresist) impacted in element opposing itself.
For reaching above-mentioned purpose of the present invention, a kind of manufacture method of organic electroluminescent element is proposed, comprise the following steps: that (a) provides a base material, dispose an organic electric-excitation luminescent unit on this base material; (b) on this base material, form a protective layer, so that this organic electric-excitation luminescent unit is covered; And (c) ion beam is provided, and this protective layer carried out a surface treatment by this ion beam.Wherein, step (b) to step (c) can repeat at least once, to promote the reliability (reliability) of element.
For reaching above-mentioned purpose of the present invention, a kind of manufacture method of organic electroluminescent element is proposed, comprise the following steps: that (a) provides a base material, dispose an organic electric-excitation luminescent unit on this base material; (b) on this base material, form a protective layer, so that this organic electric-excitation luminescent unit is covered; (c) provide an ion beam, and this protective layer is carried out a surface treatment by this ion beam; And (d) on this protective layer, form a plastic layer.Wherein, step (b) to step (d) can repeat at least once, to promote the reliability of element.
For reaching above-mentioned purpose of the present invention, a kind of manufacture method of solid protective layer is proposed, be suitable for protecting the organic electric-excitation luminescent unit on the base material, the manufacture method of this solid protective layer comprises the following steps: that (a) forms a protective layer on this base material, so that this organic electric-excitation luminescent unit is covered; And (b) provide an ion beam, by this ion beam this protective layer is carried out a surface treatment.Wherein, step (a) to step (b) can repeat at least once, to promote the protection of solid protective layer to the organic electric-excitation luminescent unit.
For reaching above-mentioned purpose of the present invention, a kind of manufacture method of solid protective layer is proposed, be suitable for protecting the organic electric-excitation luminescent unit on the base material, the manufacture method of this solid protective layer comprises the following steps: that (a) forms a protective layer on this base material, so that this organic electric-excitation luminescent unit is covered; (b) provide an ion beam, this protective layer is carried out a surface treatment by this ion beam; And (c) on this protective layer, form a plastic layer.Wherein, step (a) to step (c) can repeat at least once, to promote the protection of solid protective layer to the organic electric-excitation luminescent unit.
In the present embodiment, the material of protective layer for example is silicon nitride or silica, and the material of plastic layer for example be ultra high molecular weight polyethylene (Ultra High Molecular WeightPolyethylene, UHMWPE) or PMMA.
In the present embodiment, for example be to provide above-mentioned ion beam or the mode by sputter provides above-mentioned ion beam when surface treatment is carried out by the mode that ion injects.
Description of drawings
Fig. 1 is the structural representation of known organic electroluminescent element;
Fig. 2 is the structural representation of known another kind of organic electroluminescent element;
Fig. 3 A to Fig. 3 D is the making schematic flow sheet according to the first embodiment of the invention organic electroluminescent element; And
Fig. 4 A to Fig. 4 F is the making schematic flow sheet according to the second embodiment of the invention organic electroluminescent element.
100,200: base material
102: anode
104: hole transmission layer
106: the organic electric-excitation luminescent layer
108: electron transfer layer
110: negative electrode
112,204: the organic electric-excitation luminescent unit
114,202,206: protective layer
114a: organic protection layer
114b: inorganic protective layer
202a, 202c, 206a, 206c: polymeric layer
202b, 206b: ceramic layer
300,400: base material
302,402: the organic electric-excitation luminescent unit
304,404,408: protective layer
304 ', 408 ': solid protective layer
306,410: ion beam
308,406,412: plastic layer
Embodiment
First embodiment
Fig. 3 A to Fig. 3 D is the making schematic flow sheet according to the first embodiment of the invention organic electroluminescent element.Please refer to Fig. 3 A, a base material 300 is provided, this base material 300 for example is a glass baseplate, plastic basis material or other transparent base.Then on base material 300, make organic electric-excitation luminescent unit 302, this organic electric-excitation luminescent unit 302 is made of plural layers, for example transparent anode, metallic cathode, organic electric-excitation luminescent layer, electron transfer layer (ETL), hole transmission layer (HTL), electron injecting layer (EIL), hole injection layer (HIL) etc.
Please refer to Fig. 3 B and Fig. 3 C, after organic electric-excitation luminescent unit 302 forms, then form a protective layer 304 so that 300 organic electric-excitation luminescent unit 302 on the base material are covered, the material of this protective layer 304 for example is silica or silicon nitride.And then above-mentioned protective layer 304 is carried out the surface-treated action; wherein surface treatment for example is that the mode injected by ion or the mode by sputter provide an ion beam 306; the bond on protective layer 304 surfaces can be strengthened to form a solid protective layer 304 ' by above-mentioned ion beam 306, this solid protective layer 304 ' will have higher hardness performance and preferable resistance to corrosion.
Present embodiment forms solid protective layer 304 ' afterwards by ion beam 306, has promptly finished the making of organic electroluminescent element.Yet, in the present embodiment,, can further process the above-mentioned organic electric-excitation luminescent unit 302 that is coated with solid protective layer 304 ' again in order further to strengthen the ability that organic electroluminescent element opposing itself is impacted.
Please refer to Fig. 3 D; in order to strengthen the ability that organic electroluminescent element opposing itself is impacted; present embodiment is gone up in solid protective layer 304 ' and is formed the higher plastic layer 308 of a hardness; the material of this plastic layer 308 for example is ultra high molecular weight polyethylene (Ultra High Molecular WeightPolyethylene; UHMWPE) or PMMA; yet, to be familiar with this operator and should to know, this plastic plate 308 can also the higher material of other hardness replace.
Second embodiment
Fig. 4 A to Fig. 4 F is the making schematic flow sheet according to the second embodiment of the invention organic electroluminescent element.Please refer to Fig. 4 A, a base material 400 is provided, this base material 400 for example is a glass baseplate, plastic basis material or other transparent base.Then on base material 400, make organic electric-excitation luminescent unit 402, this organic electric-excitation luminescent unit 402 is made of plural layers, for example transparent anode, metallic cathode, organic electric-excitation luminescent layer, electron transfer layer (ETL), hole transmission layer (HTL), electron injecting layer (EIL), hole injection layer (HIL) etc.
Please refer to Fig. 4 B and Fig. 4 C, after organic electric-excitation luminescent unit 402 forms, then form a protective layer 404 so that 400 organic electric-excitation luminescent unit 402 on the base material are covered, the material of this protective layer 404 for example is silica or silicon nitride.And then on solid protective layer 404, form the higher plastic layer 406 of a hardness; the material of this plastic layer 406 for example is ultra high molecular weight polyethylene or PMMA; yet, to be familiar with this operator and should to know, this plastic plate 308 can also the higher material of other hardness replace.
Please refer to Fig. 4 D and Fig. 4 E, then be to form another protective layer 408 on the plastic layer 406, the material of this protective layer 408 for example is silica or silicon nitride.And then above-mentioned protective layer 408 is carried out the surface-treated action; wherein surface treatment for example is that the mode injected by ion or the mode by sputter provide an ion beam 410; the bond on protective layer 408 surfaces can be strengthened to form a solid protective layer 408 ' by above-mentioned ion beam 410, this solid protective layer 408 ' will have higher hardness performance and preferable resistance to corrosion.
Present embodiment forms solid protective layer 408 ' afterwards by ion beam 410, has promptly finished the making of organic electroluminescent element.Yet, in the present embodiment,, can further process the above-mentioned organic electric-excitation luminescent unit 402 that is coated with solid protective layer 408 ' again in order further to strengthen the ability that organic electroluminescent element opposing itself is impacted.
Please refer to Fig. 4 F; in order to strengthen the ability that organic electroluminescent element opposing itself is impacted; present embodiment forms the higher plastic layer of a hardness 412 again on solid protective layer 408 '; the material of this plastic layer 412 for example is ultra high molecular weight polyethylene or PMMA; yet; being familiar with this operator should know, this plastic plate 412 can also the higher material of other hardness replace.
Among above-mentioned two embodiment of the present invention; the number of protective layer, the visual product demand of the number of plastic layer and do suitable change; protective layer carries out the surface-treated number of times and also can change to some extent; all carry out surface treatment as each layer protective layer, can also be only carry out surface treatment at the protective layer of the part or the superiors.
In sum, the preparation method of the preparation method of organic electroluminescent element of the present invention and solid protective layer has following advantages at least:
1. the system of the preparation method of organic electroluminescent element of the present invention and solid protective layer thereof Make method, can effectively promote the resistance to corrosion of element itself.
2. the system of the preparation method of organic electroluminescent element of the present invention and solid protective layer thereof Make method, can effectively promote element itself and support shock proof ability.
Claims (14)
1. the manufacture method of an organic electroluminescent element is characterized in that, this method comprises:
(a) provide a base material, dispose an organic electric-excitation luminescent unit on this base material;
(b) on this base material, form a protective layer, this organic electric-excitation luminescent unit is covered; And
(c) provide an ion beam, and this protective layer is carried out a surface treatment by this ion beam.
2. the manufacture method of organic electroluminescent element as claimed in claim 1 is characterized in that, the material of this protective layer comprise silicon nitride, silica one of them.
3. the manufacture method of organic electroluminescent element as claimed in claim 1 is characterized in that, this surface treatment is to provide this ion beam by the mode that ion injects when carrying out.
4. the manufacture method of organic electroluminescent element as claimed in claim 1 is characterized in that, this surface treatment is that the mode by sputter provides this ion beam when carrying out.
5. the manufacture method of organic electroluminescent element as claimed in claim 1 is characterized in that, step (c) more comprises the following steps: afterwards
(d) on this protective layer, form a plastic layer.
6. the manufacture method of organic electroluminescent element as claimed in claim 5 is characterized in that, step (d) more comprise afterwards repeating step (b) to step (d) at least once.
7. the manufacture method of organic electroluminescent element as claimed in claim 5 is characterized in that, the material of this plastic layer comprise polyethylene, PMMA one of them.
8. the manufacture method of a solid protective layer is suitable for protecting the organic electric-excitation luminescent unit on the base material, it is characterized in that the manufacture method of this solid protective layer comprises:
(a) on this base material, form a protective layer, this organic electric-excitation luminescent unit is covered; And
(b) provide an ion beam, this protective layer is carried out a surface treatment by this ion beam.
9. the manufacture method of solid protective layer as claimed in claim 8 is characterized in that, the material of this protective layer comprise silicon nitride, silica one of them.
10. the manufacture method of solid protective layer as claimed in claim 8 is characterized in that, the mode of injecting by ion when this surface treatment is carried out provides this ion beam.
11. the manufacture method of solid protective layer as claimed in claim 8 is characterized in that, the mode by sputter when this surface treatment is carried out provides this ion beam.
12. the manufacture method of solid protective layer as claimed in claim 8 is characterized in that, step (b) more comprises the following steps: afterwards
(c) on this protective layer, form a plastic layer.
13. the manufacture method of solid protective layer as claimed in claim 12 is characterized in that, step (c) more comprise afterwards repeating step (a) to step (c) at least once.
14. the manufacture method of solid protective layer as claimed in claim 12 is characterized in that, the material of this plastic layer comprise polyethylene, PMMA one of them.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021538271A CN100346497C (en) | 2002-11-28 | 2002-11-28 | Making method of organic electroluminescent cell structure and making method of its solid protective layer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021538271A CN100346497C (en) | 2002-11-28 | 2002-11-28 | Making method of organic electroluminescent cell structure and making method of its solid protective layer |
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| CN1505444A CN1505444A (en) | 2004-06-16 |
| CN100346497C true CN100346497C (en) | 2007-10-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB021538271A Expired - Lifetime CN100346497C (en) | 2002-11-28 | 2002-11-28 | Making method of organic electroluminescent cell structure and making method of its solid protective layer |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101456023B1 (en) | 2012-10-31 | 2014-11-03 | 엘지디스플레이 주식회사 | Method of fabricating organic electro luminescent device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5693956A (en) * | 1996-07-29 | 1997-12-02 | Motorola | Inverted oleds on hard plastic substrate |
| JP2000133440A (en) * | 1998-10-23 | 2000-05-12 | Nec Corp | Dlc protective film, organic el element using the same and manufacture thereof |
| CN2384314Y (en) * | 1999-07-15 | 2000-06-21 | 张志林 | Organic film electroluminescent element with multi-layer seal |
| CN1399502A (en) * | 2001-07-20 | 2003-02-26 | Lg电子株式会社 | Plate display and its protecting layer forming process |
-
2002
- 2002-11-28 CN CNB021538271A patent/CN100346497C/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5693956A (en) * | 1996-07-29 | 1997-12-02 | Motorola | Inverted oleds on hard plastic substrate |
| JP2000133440A (en) * | 1998-10-23 | 2000-05-12 | Nec Corp | Dlc protective film, organic el element using the same and manufacture thereof |
| CN2384314Y (en) * | 1999-07-15 | 2000-06-21 | 张志林 | Organic film electroluminescent element with multi-layer seal |
| CN1399502A (en) * | 2001-07-20 | 2003-02-26 | Lg电子株式会社 | Plate display and its protecting layer forming process |
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| CN1505444A (en) | 2004-06-16 |
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