CN100343715C - Optical lens for laser two-dimensional linear scanning - Google Patents
Optical lens for laser two-dimensional linear scanning Download PDFInfo
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- CN100343715C CN100343715C CNB2005101227600A CN200510122760A CN100343715C CN 100343715 C CN100343715 C CN 100343715C CN B2005101227600 A CNB2005101227600 A CN B2005101227600A CN 200510122760 A CN200510122760 A CN 200510122760A CN 100343715 C CN100343715 C CN 100343715C
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Abstract
The present invention relates to an optical lens for laser two-dimensional linear scan, particularly to an f=that laser focusing optical lens which focuses laser beams on a work plane and is suitable for laser marking and mark sculpture. The f=that laser focusing optical lens is composed of three refraction lenses. According to the incidence direction of light rays, the focal powers of the refraction lenses orderly are negative, positive and positive, the front two lenses are bent toward the incidence direction of light rays, and the front surface of the third lens faces away from the incidence direction of light rays. The three lenses are the same in glass material, and the refractive index n is in the value range which is larger than or equal to 1.50 and is smaller than or equal to 1.80. The working area of the present invention reaches phi 710mm, and the focusing performance reaches diffraction limit. The present invention has the advantages of large working area, low processing cost, good marking quality, good focusing performance, simple and compact structure, etc., and provides possibility for further spreading the application range of laser marking.
Description
Technical field
The present invention relates to a kind of optical lens that is used to realize laser two-dimensional linear scanning, specifically be meant a kind of laser beam is focused on the working face, is applicable to the f-θ camera lens of laser marking and marking.
Background technology
Laser marking is a kind of form in the laser scanning, it is the important application of laser at manufacture field, compare with traditional marking methods such as quarter, etching, machine engraving that dash, have pollution-free, advantages such as resolution is high, permanent maintenances of noncontact, mark, be widely used in the making laser anti-counterfeit tag, carve characters and incrustation etc.
Laser scanner technique comprises high inertia scanning and hangs down inertia scanning two big classes.Wherein, high inertia scanning is a kind of mechanical type scanning, comes the deflection laser bundle by rotating prism, level crossing or rotating multisurface body, but what it was realized is to line by line scan, scanning has one-way, and therefore, the sweep velocity of high inertia scan mode, precision etc. all will be restricted.Low inertia scanning is a kind of on-mechanical type scanning, comprise acousto-optic scanning and vibration mirror scanning, the vibration mirror scanning process is that laser beam is successively behind the reflecting surface through two mutually perpendicular scanning galvanometer X of rotation direction and scanning galvanometer Y, to workplace, it can realize address pixels scanning by f-θ lens focus.
Fig. 1 is the principle of work synoptic diagram of low inertia mirror-vibrating laser mark machine, referring to accompanying drawing 1, the laser beam [2] that laser instrument [1] sends expands bundle through beam expander [3], successively after X scanning galvanometer [4] and Y scanning galvanometer [5] reflection, incide f-θ camera lens [6], laser beam is focused on the workplace [7].Around X scanning galvanometer rotation axis [8] and Y scanning galvanometer rotation axis [9] swing X scanning galvanometer and Y scanning galvanometer, the laser focusing hot spot is made two-dimensional linear scanning at surface of the work, and marking goes out required figure, literal, symbol etc.
No matter for which kind of laser scanning system, f-θ camera lens is the core component of system, and the quality of mark quality depends on the focusing performance of f-θ camera lens.Along with the increase of workplace size, focused spot size can be subjected to very big influence.At present, the working area of laser marking machine generally is no more than 300 * 300mm
2, employed f-θ camera lens is made by the glass of different materials, and complex structure, the cost height of camera lens.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists, provide that a kind of working area is big, good condensing performance, simple in structure, the f-θ optical focus camera lens that is used for low inertia scanning that cost is low.
The technical solution adopted in the present invention is: a kind of optical lens that is used for laser two-dimensional linear scanning is provided, it is a kind of f-θ laser focusing optical lens, described f-θ laser focusing optical lens is made of three refractors, and along the light incident direction, three power of lens are followed successively by
61,
62,
63, the span during with respect to lens focus normalization is :-3.5≤
61≤-3.0,1.50≤
62≤ 2.0 and 1.50≤
63≤ 2.0; Preceding two lens bend towards the light incident direction, and the surface of the 3rd close second lens of lens is the light incident direction dorsad.
Described three refractors are made by glass material of the same race, and the span of its refractive index n is:
1.50≤n≤1.80。
Compared with prior art, characteristics of the present invention are: f-θ laser focusing optical lens only is made of three refractors, and three lens are made by simple glass material of the same race, and lens construction is simple, processing cost is low; Because this structure, make working area can reach φ 710mm, and the focusing performance of laser beam on workplace reach diffraction limit, the mark quality is good, for the range of application that further expands laser marking provides may.
Description of drawings
Fig. 1 is the principle of work synoptic diagram of low inertia mirror-vibrating laser mark machine;
Fig. 2 is the structural representation of the described optical lens of one embodiment of the invention;
Fig. 3 is the ray tracing point range figure of the described optical lens of one embodiment of the invention;
Fig. 4 is the distortion curve figure of the described optical lens of one embodiment of the invention;
Fig. 5 is the curvature of field, the astigmatism curve map of the described optical lens of one embodiment of the invention;
Fig. 6 is the relative irradiance distribution curve map of the described optical lens of one embodiment of the invention on the laser beam focusing surface;
Fig. 7 is the encircled energy curve map of the described optical lens of one embodiment of the invention.
Among Fig. 1: [1], laser instrument; [2], laser beam; [3], beam expander; [4], X scanning galvanometer; [5], Y scanning galvanometer; [6], f-θ camera lens; [7], laser beam focuses on workplace; [8], the rotating shaft of X scanning galvanometer; [9], the rotating shaft of Y scanning galvanometer;
Among Fig. 2: [61], press first lens of light incident direction; [62], press second lens of light incident direction; [63], press the 3rd lens of light incident direction; [631], the front surface of the 3rd lens.
Embodiment
Below in conjunction with drawings and Examples specific embodiments of the present invention is further elaborated.
Embodiment one:
The technical scheme of present embodiment provides a kind of f-θ optical lens that is used for low inertia mirror-vibrating laser mark machine.Laser marking machine adopts the YAG laser instrument, and operation wavelength is 1.064 μ m, and optical system works in this near infrared monochromatic light, and aperture diaphragm is positioned at the optical system outside, and X scanning galvanometer [4] promptly shown in Figure 1 is located.
Referring to accompanying drawing 2, it is the structural representation of the described optical lens of present embodiment, f-θ lens focus f=680mm, F counts F/NO=54, scan angle theta=± 30 °, the X scanning galvanometer to the Y scanning galvanometer apart from d
X, Y=16mm, the Y scanning galvanometer to press the light incident direction first lens [61] front surface apart from d
Y, L1=22mm, [62] are second lens, and [63] are the 3rd lens, and [631] are the front surface of the 3rd lens.Remaining data of this camera lens are as follows:
| Lens | Radius-of-curvature (mm) | (mm) at interval | Airspace (mm) | The material refractive index |
| 61 | -114 | 6.5 | 20.0 | 1.51 |
| 1905 | ||||
| 62 | -1092 | 12.5 | 10.0 | 1.51 |
| -154 | ||||
| 63 | -2605 | 13.0 | 800.0 | 1.51 |
| -224 |
Three lens materials adopt colouless optical glass of the same race, therefore, do not need correcting chromatic aberration.
Embodiment two:
In the present embodiment, f-θ lens focus f=680mm, F counts F/NO=54.5, scan angle theta=± 30 °, the X scanning galvanometer is to the high d of distance of Y scanning galvanometer
X, Y=16mm, the high d of distance of Y scanning galvanometer to the first a lens front surface
Y, L1=16mm, three lens materials adopt colouless optical glass of the same race, and remainder data is as follows:
| Lens | Radius-of-curvature (mm) | Lens thickness (mm) | Airspace (mm) | The material refractive index |
| 61 | -113.5 | 6.8 | 20.5 | 1.53 |
| 1906 | ||||
| 62 | -1091 | 13.0 | 10.0 | 1.53 |
| -154.5 | ||||
| 63 | -2610 | 13.0 | 803.0 | 1.53 |
| -223 |
Referring to accompanying drawing 3, Fig. 3 is the ray tracing point range figure that light passes through the described optical system of present embodiment, be the focusing situation of laser beam at surface of the work, the circle expression Airy spot at each place, visual field among Fig. 3, this shows, the point range figure of each visual field all drops in the Airy spot on the image planes, shows that this optical system has the focus characteristics of the diffraction theory limit.
The described optical lens distortion curve of present embodiment figure as shown in Figure 4, among the figure, horizontal ordinate is the distortion value (% of unit) with respect to f-θ relation, ordinate is represented the normalization visual field, as seen from Figure 4, switching relatively less than 0.5%, not only make image height and field angle satisfy f-θ linear relationship, and can not influence the mark quality, satisfy the mark requirement.Accompanying drawing 5 is curvature of field astigmatism curves of camera lens, and horizontal ordinate is represented curvature of field astigmatism value, and ordinate is the normalization visual field, and two curve S among the figure and T represent the curvature of field in the sagitta of arc and two faces of meridian respectively, and the difference between two curves is that the astigmatism value is in the tolerance for aberration scope.
According to the principle of work of laser marking machine,, require irradiance distribution even, the concentration of energy of laser beam at surface of the work for guaranteeing the mark quality on a large scale.Referring to accompanying drawing 6, it is the relative irradiance distribution curve map of the described optical lens of present embodiment on the laser marking machine workplace, and among Fig. 6, horizontal ordinate is the mark scope, and ordinate is the relative exposure on the workplace.As seen from Figure 6, the irradiance distribution of whole image planes is quite even, though the edge descends to some extent, but still satisfies request for utilization.
Referring to accompanying drawing 7, it is the encircled energy curve of the described optical lens of present embodiment, and as seen from Figure 7, the concentration of energy more than 80% is point in Airy spot scope.
Laser marking is widely used because of its unique advantage. Through strict aberration correction, provided by the present invention with the optical focus camera lens of f-θ camera lens as laser marking machine, only formed by three lens, about 60 millimeters of optical tube length, work area reaches φ 710mm, focusing performance reaches diffraction limit, has that work area is large, processing cost is low, the mark quality is good, a good condensing performance, the advantage such as simple and compact for structure, for the range of application that further expands laser marking provides may.
Claims (2)
1. optical lens that is used for laser two-dimensional linear scanning, it is a kind of f=θ laser focusing optical lens, it is characterized in that: described f=θ laser focusing optical lens is made of three refractors (61), (62), (63), along the light incident direction, three power of lens are followed successively by
61,
62,
63, the span during with respect to lens focus normalization is :-3.5≤
61≤-3.0,1.50≤
62≤ 2.0 and 1.50≤
63≤ 2.0; Preceding two lens bend towards the light incident direction, and the surface (631) of the 3rd close second lens of lens is the light incident direction dorsad.
2. a kind of optical lens that is used for laser two-dimensional linear scanning according to claim 1 is characterized in that: described three refractors are made by glass material of the same race, and the span of its refractive index n is: 1.50≤n≤1.80.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101227600A CN100343715C (en) | 2005-12-01 | 2005-12-01 | Optical lens for laser two-dimensional linear scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101227600A CN100343715C (en) | 2005-12-01 | 2005-12-01 | Optical lens for laser two-dimensional linear scanning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1776462A CN1776462A (en) | 2006-05-24 |
| CN100343715C true CN100343715C (en) | 2007-10-17 |
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|---|---|---|---|
| CNB2005101227600A Expired - Fee Related CN100343715C (en) | 2005-12-01 | 2005-12-01 | Optical lens for laser two-dimensional linear scanning |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100538438C (en) * | 2007-01-30 | 2009-09-09 | 深圳市大族激光科技股份有限公司 | Laser light field distribution shaping optical lens |
| CN101414047B (en) * | 2008-04-28 | 2010-06-09 | 深圳市大族激光科技股份有限公司 | Optical lens |
| CN102313968B (en) * | 2010-06-29 | 2013-08-14 | 深圳市大族激光科技股份有限公司 | Ultraviolet laser f theta lens, laser marking machine and laser carving machine |
| CN104175003B (en) * | 2014-09-09 | 2016-05-25 | 大族激光科技产业集团股份有限公司 | A kind of laser-processing system and multi-path laser processing unit (plant) |
| JP2019527466A (en) * | 2016-06-14 | 2019-09-26 | エバナ テクノロジーズ ユーエービー | Laser processing system for dicing or cutting multi-segment lenses and wafers |
| CN107797224B (en) * | 2016-08-30 | 2020-09-18 | 大族激光科技产业集团股份有限公司 | Optical lens, laser processing equipment and laser processing method |
| CN107577044A (en) * | 2017-09-05 | 2018-01-12 | 大族激光科技产业集团股份有限公司 | Lens group, optical lens assembly and laser cleaning hand-held set |
| CN114904151A (en) * | 2020-07-31 | 2022-08-16 | 西安炬光科技股份有限公司 | Laser dot matrix system and laser dot matrix therapeutic instrument |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5103091A (en) * | 1988-05-19 | 1992-04-07 | Canon Kabushiki Kaisha | Scanning optical apparatus having focal position deviation detecting and correcting capability |
| JPH05173087A (en) * | 1991-06-26 | 1993-07-13 | Asahi Optical Co Ltd | Automatic focus scanning type optical device |
| CN1120174A (en) * | 1994-05-23 | 1996-04-10 | 松下电器产业株式会社 | Scanner optics and image formation apparatus using the same |
| CN2585256Y (en) * | 2002-12-18 | 2003-11-05 | 上海市激光技术研究所 | F theta object lens with two aperture diaphragms in front of it |
-
2005
- 2005-12-01 CN CNB2005101227600A patent/CN100343715C/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5103091A (en) * | 1988-05-19 | 1992-04-07 | Canon Kabushiki Kaisha | Scanning optical apparatus having focal position deviation detecting and correcting capability |
| JPH05173087A (en) * | 1991-06-26 | 1993-07-13 | Asahi Optical Co Ltd | Automatic focus scanning type optical device |
| CN1120174A (en) * | 1994-05-23 | 1996-04-10 | 松下电器产业株式会社 | Scanner optics and image formation apparatus using the same |
| CN2585256Y (en) * | 2002-12-18 | 2003-11-05 | 上海市激光技术研究所 | F theta object lens with two aperture diaphragms in front of it |
Non-Patent Citations (2)
| Title |
|---|
| 两片型fθ透镜设计 秦水介，应用光学，第15卷第2期 1994 * |
| 大工作面F-Theta镜头的光学设计 季轶群，沈为民，光学学报，第25卷第11期 2005 * |
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|---|---|
| CN1776462A (en) | 2006-05-24 |
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