CH705061A1 - Substrate for thin-film solar cell, has glass solder exhibiting thermal expansion coefficients adapted to thermal expansion coefficients of metallic sheet such that excessive mechanical stresses do not occur in preset temperature range - Google Patents
Substrate for thin-film solar cell, has glass solder exhibiting thermal expansion coefficients adapted to thermal expansion coefficients of metallic sheet such that excessive mechanical stresses do not occur in preset temperature range Download PDFInfo
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- CH705061A1 CH705061A1 CH00927/11A CH9272011A CH705061A1 CH 705061 A1 CH705061 A1 CH 705061A1 CH 00927/11 A CH00927/11 A CH 00927/11A CH 9272011 A CH9272011 A CH 9272011A CH 705061 A1 CH705061 A1 CH 705061A1
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- glass solder
- metallic sheet
- substrate
- thermal expansion
- thin
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- 239000000758 substrate Substances 0.000 title claims abstract description 39
- 229910000679 solder Inorganic materials 0.000 title claims abstract description 37
- 239000010409 thin film Substances 0.000 title claims abstract description 13
- 230000001747 exhibiting effect Effects 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 238000002844 melting Methods 0.000 claims abstract description 7
- 230000008018 melting Effects 0.000 claims abstract description 7
- 239000000843 powder Substances 0.000 claims abstract description 7
- 238000010292 electrical insulation Methods 0.000 claims abstract description 4
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000006096 absorbing agent Substances 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 239000006060 molten glass Substances 0.000 claims description 3
- 235000011837 pasties Nutrition 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 50
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000002318 adhesion promoter Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- 229920003043 Cellulose fiber Polymers 0.000 description 1
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 1
- 229910052951 chalcopyrite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000007786 electrostatic charging Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03926—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03926—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
- H01L31/03928—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
[0001] Gegenstand der Erfindung ist ein Substrat für eine Dünnschichtsolarzelle, ein Verfahren zu dessen Herstellung und eine Dünnschichtsolarzelle mit diesem Substrat gemäss dem Oberbegriff der Patentansprüche 1, 6 und 8. Bei der Herstellung von Dünnschichtsolarzellen werden auf einem Substrat oder alternativ auf einem transparenten Superstrat wie z.B. Glas sequentiell mehrere dünne Schichten unterschiedlicher Materialien aufgebracht. In der Regel sind zwei dieser Schichten aus unterschiedlichen halbleitenden Materialien gefertigt, von denen eine als Absorberschicht für einfallendes Licht genutzt wird. Solche Absorberschichten können beispielsweise CdTe oder CIS/CIGS-Verbindungen bzw. den Chalkopyriten zugeordnete I-III-VI-Halbleiter umfassen. The invention relates to a substrate for a thin-film solar cell, a process for its preparation and a thin-film solar cell with this substrate according to the preamble of claims 1, 6 and 8. In the production of thin-film solar cells are on a substrate or alternatively on a transparent superstrate such as Glass sequentially applied several thin layers of different materials. In general, two of these layers are made of different semiconducting materials, one of which is used as an absorber layer for incident light. Such absorber layers may comprise, for example, CdTe or CIS / CIGS compounds or chalcopyrite-associated I-III-VI semiconductors.
[0002] Die an diese halbleitenden Schichten angrenzenden Schichten sind elektrisch leitend ausgebildet. Der Rückseitenkontakt ist in der Regel ein metallischer Leiter wie z.B. Molybdän, der lichtundurchlässig ist. Die an die zweite Halbleiterschicht angrenzende Schicht hingegen ist als lichtdurchlässiger elektrischer Leiter, beispielsweise aus ZnO:Al gefertigt. The adjacent to these semiconductive layers layers are electrically conductive. The backside contact is typically a metallic conductor such as e.g. Molybdenum, which is opaque. The layer adjacent to the second semiconductor layer, on the other hand, is made as a translucent electrical conductor, for example made of ZnO: Al.
[0003] Dünnschichtsolarzellen, die ein bandartiges flexibles Flächengebilde als Substrat umfassen, können in effizienten Durchlaufverfahren von Rolle zu Rolle gefertigt werden. In mehreren Prozessschritten werden auf dem Substrat mehrere Schichten aufgebaut und - wo dies erforderlich ist - zusätzlich strukturiert. Zum Aufbringen und/oder Strukturieren der Schichten können unterschiedliche, an sich bekannte Techniken angewendet werden. Insbesondere können die Halbleiterschichten z.B. besonders effizient in einem Druckverfahren aufgebracht werden. Dabei werden diese Halbleitermaterialien in pastöser Konsistenz als dünne Schichten auf die Oberfläche der obersten auf dem Substrat ausgebildeten Schicht aufgetragen und anschliessend gesintert. Die einzelnen Prozessschritte werden hier nicht näher erläutert. Es wird aber darauf hingewiesen, dass die Temperaturen beim Sintern und gegebenenfalls auch bei anderen Prozessschritten abhängig von den jeweils verwendeten Materialien gewisse Obergrenzen nicht überschreiten sollten, da sonst unerwünschte strukturelle oder chemische Veränderungen in einer oder mehreren der Schichten auftreten könnten. Dünnschichtsolarzellen, die auf einem Substrat aufgebaut sind, haben in der Regel im Wesentlichen folgenden Schichtaufbau: a) flexibles Flächengebilde als Substrat b) optional, falls das Flächengebilde elektrisch leitend ist, umfasst das Substrat zusätzlich eine Isolationsschicht c) metallischer Rückseitenkontakt d) erste Halbleiterschicht(Absorberschicht) e) zweite Halbleiterschicht f) transparenter Frontseitenkontakt g) eine oder mehrere transparente Schutzschichten Während des Herstellprozesses können insbesondere die Kontakt- und die Halbleiterschichten strukturiert und so miteinander verbunden werden, dass einzelne Zellen auf dem Substrat monolithisch seriell und/oder parallel miteinander verschaltet sind. Thin-film solar cells comprising a ribbon-like flexible sheet as a substrate can be manufactured in an efficient pass-through process from roll to roll. In several process steps, several layers are built up on the substrate and - where necessary - additionally structured. For applying and / or structuring the layers, different techniques known per se can be used. In particular, the semiconductor layers may be e.g. be applied particularly efficiently in a printing process. In this case, these semiconductor materials are applied in pasty consistency as thin layers on the surface of the uppermost formed on the substrate layer and then sintered. The individual process steps will not be explained here. However, it should be noted that the temperatures during sintering and possibly also in other process steps should not exceed certain upper limits, depending on the materials used in each case, since otherwise unwanted structural or chemical changes in one or more of the layers could occur. Thin-film solar cells, which are built on a substrate, generally have the following layer structure: a) flexible sheet as a substrate b) optionally, if the sheet is electrically conductive, the substrate additionally comprises an insulating layer c) metallic back contact d) first semiconductor layer (absorber layer) e) second semiconductor layer f) transparent front-side contact g) one or more transparent protective layers During the manufacturing process, in particular the contact layers and the semiconductor layers can be structured and connected to one another in such a way that individual cells are monolithically connected in series and / or parallel to one another on the substrate.
[0004] Die Substrate können z.B. Folien aus elektrisch isolierenden Materialien mit einer möglichst hohen Temperaturbeständigkeit wie z.B. Polyimid umfassen. Alternativ können die Substrate auch elektrisch leitfähige Metalle wie z.B. Titan oder Edelstahl umfassen. Diese müssen aber gegenüber dem Rückseitenkontakt der angrenzenden Halbleiterschicht elektrisch isoliert werden. Substrate auf Kunststoffbasis haben zwar den Vorteil, dass eine dünne, elektrisch leitende Schicht als Rückseitenkontakt z.B. durch Aufdampfen oder Sputtern oder Aufdrucken relativ einfach direkt aufgebracht werden kann. Als Nachteil erweisen sich aber die relativ niedrigen Temperaturen, denen solche Substrate bei den nachfolgenden Prozessschritten ausgesetzt werden dürfen, da sonst das Substrat zerstört würde. So dürfen beispielsweise bei Substratfolien aus Polyimid nur Temperaturen von maximal etwa 400 °C bis 450 °C ausgesetzt werden. Bei nachfolgenden Prozessschritten wie etwa dem Trocknen und Sintern der Halbleiterschichten könnten mit höheren Temperaturen - je nach Anwendungsfall bis zu 1000 °C - qualitativ wesentlich bessere Ergebnisse erreicht werden. Im Weiteren müssen auch die Umgebungsbedingungen beachtet werden, denen das Substrat bei den einzelnen Prozessschritten ausgesetzt ist. So können beispielsweise bei der Herstellung von Photovoltaikmodulen mit Cadmiumtellurid-Absorbern die Halbleiterschichten durch Tempern und durch eine Behandlung mit Cadmiumchlorid CdCl2 aktiviert werden. Bei der Herstellung von Dünnschichtsolarzellen können in einem Sinterofen je nach Herstellprozess z.B. Stickstoff, Formiergas, Selendampf oder Chlorgas in unterschiedlichen Kombinationen und mit unterschiedlichen Konzentrationen verwendet werden. Das Substrat bzw. dessen elektrische Isolationsschicht sollte deshalb möglichst nicht nur hohen Temperaturen ausgesetzt werden können, sondern auch möglichst inert bzw. resistent in Bezug auf aggressive Umgebungsbedingungen sein. The substrates may e.g. Films of electrically insulating materials with the highest possible temperature resistance such. Polyimide include. Alternatively, the substrates may also include electrically conductive metals, e.g. Include titanium or stainless steel. However, these must be electrically insulated from the backside contact of the adjacent semiconductor layer. Although plastic-based substrates have the advantage that a thin, electrically conductive layer as back contact, e.g. can be applied relatively easily directly by vapor deposition or sputtering or printing. However, the disadvantage is the relatively low temperatures to which such substrates may be exposed in the subsequent process steps, otherwise the substrate would be destroyed. For example, in the case of substrate films made of polyimide, only temperatures of a maximum of approximately 400 ° C. to 450 ° C. may be exposed. In subsequent process steps, such as drying and sintering of the semiconductor layers, qualitatively much better results could be achieved with higher temperatures, depending on the application up to 1000 ° C. Furthermore, the environmental conditions to which the substrate is exposed during the individual process steps must also be taken into account. For example, in the manufacture of photovoltaic modules with cadmium telluride absorbers, the semiconductor layers can be activated by annealing and by treatment with cadmium chloride CdCl2. In the production of thin film solar cells, in a sintering furnace, depending on the manufacturing process, e.g. Nitrogen, forming gas, selenium vapor or chlorine gas can be used in different combinations and with different concentrations. The substrate or its electrical insulation layer should therefore not only be exposed to high temperatures, but also be as inert or resistant as possible to aggressive environmental conditions.
[0005] Im Vergleich zu Substraten auf Kunststoffbasis können metallische Substrate grundsätzlich höheren Temperaturen ausgesetzt werden. Da bei Metallen jedoch eine zusätzliche Isolationsschicht erforderlich ist, ist die maximale Prozesstemperatur auch hier in der Regel durch das Material der Isolationsschicht begrenzt. Compared to substrates based on plastic metallic substrates can generally be exposed to higher temperatures. However, since metals require an additional insulation layer, the maximum process temperature is usually limited by the material of the insulation layer.
[0006] Eine Aufgabe der vorliegenden Erfindung ist es deshalb, ein bei hohen Temperaturen von über 400 °C prozessierbares Substrat mit einer Metallschicht und einer elektrischen Isolationsschicht sowie ein Verfahren zu dessen Herstellung zu schaffen. Eine weitere Aufgabe der Erfindung besteht darin, eine Dünnschichtsolarzelle mit einem solchen Substrat zu schaffen. An object of the present invention is therefore to provide a processable at high temperatures of about 400 ° C substrate with a metal layer and an electrical insulation layer and a method for its preparation. Another object of the invention is to provide a thin film solar cell with such a substrate.
[0007] Diese Aufgaben werden gelöst durch ein Substrat, durch ein Verfahren zur Herstellung dieses Substrats und durch eine Dünnschichtsolarzelle mit diesem Substrat gemäss den Merkmalen der Patentansprüche 1, 6 und 8. These objects are achieved by a substrate, by a method for producing this substrate and by a thin-film solar cell with this substrate according to the features of patent claims 1, 6 and 8.
[0008] Das erfindungsgemässe Substrat umfasst ein metallisches Flächengebilde, dessen Oberfläche mindestens partiell mit einer Isolationsschicht aus einem Glaslot überzogen ist. Das Glaslot wird in der Regel nur auf jener Seite des Flächengebildes ausgebildet, auf der auch die weiteren Schichten aufgebaut werden. Im Weiteren können gewisse Bereiche der Oberfläche des Substrats wie z.B. ein rahmenartiger Randbereich ohne isolierendes Glaslot ausgebildet werden, falls dies erforderlich sein sollte. Dies kann z.B. durch vorgängiges Maskieren dieser Bereiche geschehen, sodass diese aufgrund einer niedrigeren Oberflächenspannung nicht mit dem Glaslot benetzt werden können. Alternativ kann das Glaslot auch auf der gesamten Oberfläche ausgebildet und anschliessend in einem Nachbearbeitungsschritt lokal wieder entfernt werden. The inventive substrate comprises a metallic sheet whose surface is coated at least partially with an insulating layer of a glass solder. The glass solder is usually formed only on that side of the sheet on which the other layers are built. Furthermore, certain areas of the surface of the substrate, such as e.g. a frame-like edge region without insulating glass solder are formed, if necessary. This can e.g. by masking these areas beforehand, so that they can not be wetted with the glass solder due to a lower surface tension. Alternatively, the glass solder can also be formed on the entire surface and then removed locally in a subsequent processing step.
[0009] Das Glaslot wird vorzugsweise als Pulver oder alternativ als Paste in einer dünnen Schicht auf die Oberfläche des metallischen Flächengebildes aufgetragen. Bei pastösem Glaslot ist dieses als Pulver mit einem Bindemittel versetzt. Vorzugsweise wird hierfür eine wässrige Lösung mit Cellulosefasern verwendet. Zum Aufbringen einer gleichmässig dünnen Schicht können beispielsweise Rakel verwendet werden. Alternativ kann die Metalloberfläche mit einem temporär wirkenden Haftvermittler benetzt werden, an dem anschliessend aufgestreutes pulverförmiges Glaslot haften bleibt. Überschüssiges Pulver kann z.B. durch Blasen, Absaugen, Rütteln oder vorübergehendes Kippen des Flächengebildes von der horizontalen in eine vertikale Lage von der Oberfläche entfernt werden. Eine weitere Möglichkeit besteht darin, das Pulver mittels elektrostatischer Aufladung an der Oberfläche des Flächengebildes anzuziehen und anzulagern. Bei der folgenden thermischen Behandlung verdampft ein gegebenenfalls vorhandener Haftvermittler wieder, bevor das Glaslot seine Schmelztemperatur erreicht. Die Schmelztemperatur des Glaslots kann durch dessen Zusammensetzung beeinflusst werden. Sie liegt je nach Anwendung zwischen etwa 400 °C bis etwa 1000 °C. Vorzugsweise liegt die Schmelztemperatur im Bereich zwischen 450 °C und 700 °C. Durch Wärmezufuhr wird das metallische Flächengebilde mit der Glaslot-Pulverschicht soweit erhitzt, dass das Glaslot schmilzt. Die Oberflächenspannung des Glaslots ist vorzugsweise kleiner als jene des Metalls, sodass das flüssige Glaslot die Metalloberfläche benetzt. Falls erforderlich, kann vor dem Aufbringen des pulverförmigen Glaslots die gesamte Metalloberfläche oder Teile davon oxidiert oder durch eine thermische und/oder chemische Behandlung so verändert werden, dass ihre Oberflächenspannung grösser ist als jene des geschmolzenen Glaslots. Das geschmolzene Glaslot hat vorzugsweise eine niedrige Viskosität und benetzt die Oberfläche des Flächengebildes. Nach dem anschliessenden Abkühlen haftet das erstarrte Glaslot als dünne, glatte Schicht an der Oberfläche des metallischen Flächengebildes. Die Zusammensetzung des Glaslots wird so gewählt, dass seine thermischen Ausdehnungskoeffizienten etwa jenen des metallischen Flächengebildes entsprechen. Bei Flächengebilden aus Titan oder Edelstahl sollte der Längenausdehnungskoeffizient a der Isolationsschicht somit im Bereich von etwa 8 x 10~6 bis etwa 12 x KT6 FT1 liegen. Dadurch kann verhindert werden, dass sich bei grösseren Temperaturänderungen zwischen dem Metall und der Glas-Isolationsschicht störende mechanische Spannungen aufbauen können. Im Weiteren haftet die dünne Glasschicht nach dem Abkühlen am metallischen Flächengebilde. Sie ist ausreichend flexibel bzw. elastisch verformbar, sodass sie Umformungen, wie sie z.B. beim Umspulen von einer Vorratsrolle auf eine Aufnahmerolle während des Fertigungsprozesses in der erforderlichen Weise reversibel verformt werden kann. The glass solder is preferably applied as a powder or alternatively as a paste in a thin layer on the surface of the metallic sheet. In pasty glass solder this is mixed as a powder with a binder. Preferably, an aqueous solution with cellulose fibers is used for this purpose. For applying a uniformly thin layer, for example, doctor blades can be used. Alternatively, the metal surface can be wetted with a temporarily acting adhesion promoter, which then adheres to scattered powdered glass solder. Excess powder may e.g. by blowing, sucking, shaking or temporarily tilting the sheet from the horizontal to a vertical position from the surface. Another possibility is to attract and deposit the powder by means of electrostatic charging on the surface of the sheet. In the following thermal treatment, an optional adhesion promoter evaporates again before the glass solder reaches its melting temperature. The melting temperature of the glass solder can be influenced by its composition. Depending on the application, it is between about 400 ° C to about 1000 ° C. Preferably, the melting temperature is in the range between 450 ° C and 700 ° C. By supplying heat, the metallic sheet with the glass solder powder layer is heated to the point that the glass solder melts. The surface tension of the glass solder is preferably smaller than that of the metal so that the liquid glass solder wets the metal surface. If necessary, before applying the pulverulent glass solder, the entire metal surface or parts thereof may be oxidized or changed by thermal and / or chemical treatment so that their surface tension is greater than that of the molten glass solder. The molten glass solder preferably has a low viscosity and wets the surface of the sheet. After the subsequent cooling, the solidified glass solder adheres as a thin, smooth layer on the surface of the metallic fabric. The composition of the glass solder is chosen so that its thermal expansion coefficients correspond approximately to those of the metallic sheet. Thus, for titanium or stainless steel sheets, the coefficient of linear expansion a of the insulating layer should be in the range of about 8 × 10 -6 to about 12 × KT 6-FT 1. As a result, it is possible to prevent disturbing mechanical stresses from building up with greater temperature changes between the metal and the glass insulation layer. Furthermore, after cooling, the thin glass layer adheres to the metallic fabric. It is sufficiently flexible or elastically deformable, so that it transformations, as e.g. can be reversibly deformed during rewinding from a supply roll to a take-up roll during the manufacturing process in the required manner.
[0010] Im Unterschied zu Isolationsschichten aus anderen Materialien, die mittels anderer Verfahren wie z.B. Plasma-Verdampfen bzw. PECVD auf dem metallischen Flächengebilde abgeschieden werden können, sind Isolationsschichten aus einem Glaslot einfacher und kostengünstiger herstellbar und haben zudem vergleichsweise glatte Oberflächen bzw. die Porosität der beschichteten Oberfläche ist minimal. Als Materialien für das metallische Flächengebilde können beispielsweise Titan oder Edelstahl verwendet werden. Vorzugsweise werden diese Flächengebilde als Band- oder Rollenware in kontinuierlichen Prozessen von Rolle zu Rolle verarbeitet. Als Materialien für die Isolatorschicht können beispielsweise Glaslote bzw. Technische Gläser der Firma Schott, 55122 Mainz, Deutschland verwendet werden, die unter den Bezeichnungen 8421, 8431 oder 8470 erhältlich sind. In contrast to insulating layers of other materials, which by other methods such. Plasma evaporation or PECVD can be deposited on the metallic sheet, insulation layers of a glass solder are easier and cheaper to produce and also have comparatively smooth surfaces or the porosity of the coated surface is minimal. As materials for the metallic sheet, for example, titanium or stainless steel can be used. Preferably, these fabrics are processed as a ribbon or roll goods in continuous processes from roll to roll. As materials for the insulator layer, for example, glass solders or technical glasses of the company Schott, 55122 Mainz, Germany can be used, which are available under the designations 8421, 8431 or 8470.
[0011] Die Dicke des metallischen Flächengebildes kann beispielsweise in der Grössenordnung von etwa 0.05 mm bis etwa 0.2 mm, die Dicke der Isolationsschicht aus Glas in der Grössenordnung von beispielsweise 0.001 mm bis etwa 0.05 mm liegen. The thickness of the metallic sheet may for example be of the order of about 0.05 mm to about 0.2 mm, the thickness of the insulating layer of glass in the order of, for example, 0.001 mm to about 0.05 mm.
[0012] Bei einer bevorzugten Ausgestaltung einer Dünnschichtsolarzelle wird als Rückseitenkontakt eine dünne Molybdänschicht auf die Isolationsschicht des Substrats aufgedampft. Als weitere Schichten folgen der Reihe nach eine erste Halbleiterschicht aus CdTe, eine zweite Halbleiterschicht aus CdS, eine lichtdurchlässige vordere Kontaktschicht und eine lichtdurchlässige elektrisch isolierende Deckschicht. In a preferred embodiment of a thin-film solar cell, a thin layer of molybdenum is vapor-deposited on the insulating layer of the substrate as the rear-side contact. As further layers follow in sequence a first semiconductor layer of CdTe, a second semiconductor layer of CdS, a transparent front contact layer and a light-transmissive electrically insulating cover layer.
Claims (8)
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CH00927/11A CH705061A1 (en) | 2011-05-31 | 2011-05-31 | Substrate for thin-film solar cell, has glass solder exhibiting thermal expansion coefficients adapted to thermal expansion coefficients of metallic sheet such that excessive mechanical stresses do not occur in preset temperature range |
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CH00927/11A CH705061A1 (en) | 2011-05-31 | 2011-05-31 | Substrate for thin-film solar cell, has glass solder exhibiting thermal expansion coefficients adapted to thermal expansion coefficients of metallic sheet such that excessive mechanical stresses do not occur in preset temperature range |
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EP2983211A4 (en) * | 2013-04-03 | 2016-05-04 | Solar Frontier Kk | Thin-film solar cell |
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EP2023435A1 (en) * | 2006-05-19 | 2009-02-11 | Fujikura, Ltd. | Method for producing electrode substrate, electrode substrate, photoelectric converter and dye-sensitized solar cell |
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US20090293934A1 (en) * | 2005-11-10 | 2009-12-03 | Kyocera Corporation | Photoelectric Conversion Device |
EP2023435A1 (en) * | 2006-05-19 | 2009-02-11 | Fujikura, Ltd. | Method for producing electrode substrate, electrode substrate, photoelectric converter and dye-sensitized solar cell |
DE102008030816A1 (en) * | 2008-06-30 | 2009-12-31 | Osram Opto Semiconductors Gmbh | Organic light emitting component, has two substrates mechanically connected with each other by insulating region of connecting unit, and electrically connected with each other by conducting region of connecting unit |
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