CH626169A5 - - Google Patents

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Publication number
CH626169A5
CH626169A5 CH1407077A CH1407077A CH626169A5 CH 626169 A5 CH626169 A5 CH 626169A5 CH 1407077 A CH1407077 A CH 1407077A CH 1407077 A CH1407077 A CH 1407077A CH 626169 A5 CH626169 A5 CH 626169A5
Authority
CH
Switzerland
Prior art keywords
grating
constant
scale
photoelectric
measuring device
Prior art date
Application number
CH1407077A
Other languages
German (de)
English (en)
Inventor
Dietmar Kaul
Joerg Dr Willhelm
Original Assignee
Leitz Ernst Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19762653545 external-priority patent/DE2653545C2/de
Priority claimed from DE19772714324 external-priority patent/DE2714324C2/de
Application filed by Leitz Ernst Gmbh filed Critical Leitz Ernst Gmbh
Publication of CH626169A5 publication Critical patent/CH626169A5/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses
    • G01D5/38Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
CH1407077A 1976-11-25 1977-11-17 CH626169A5 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19762653545 DE2653545C2 (de) 1976-11-25 1976-11-25 Fotoelektrische Auflicht-Wegmeßeinrichtung
DE19772714324 DE2714324C2 (de) 1977-03-31 1977-03-31 Fotoelektrische Auflicht-Wegmeßeinrichtung

Publications (1)

Publication Number Publication Date
CH626169A5 true CH626169A5 (zh) 1981-10-30

Family

ID=25771181

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1407077A CH626169A5 (zh) 1976-11-25 1977-11-17

Country Status (3)

Country Link
US (1) US4176276A (zh)
CH (1) CH626169A5 (zh)
GB (1) GB1592705A (zh)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4395124A (en) * 1977-12-23 1983-07-26 Randwal Instrument Co., Inc. Apparatus for position encoding
US4286871A (en) * 1980-08-11 1981-09-01 Keuffel & Esser Company Photogrammetric measuring system
JPS57157118A (en) * 1981-03-24 1982-09-28 Mitsutoyo Mfg Co Ltd Photoelectric type displacement detecting device
US4546347A (en) * 1981-05-18 1985-10-08 Mouse Systems Corporation Detector for electro-optical mouse
AU576536B2 (en) * 1983-02-16 1988-09-01 E.I. Du Pont De Nemours And Company Reflector type fibre encoder
US4725146A (en) * 1983-09-30 1988-02-16 Novon, Inc. Method and apparatus for sensing position
KR900004781B1 (ko) * 1983-12-05 1990-07-05 이 아이 듀우판 디 네모아 앤드 캄파니 광반사형 부호화법 및 부호화기
DE3417176C2 (de) * 1984-05-09 1986-07-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelektrische Meßeinrichtung
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
GB8432574D0 (en) * 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
DE3541199C1 (de) * 1985-11-21 1987-06-25 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
GB8615196D0 (en) * 1986-06-21 1986-07-23 Renishaw Plc Opto-electronic scale reading apparatus
US4912322A (en) * 1986-08-15 1990-03-27 Mitutoyo Mfg. Co., Ltd. Optical type displacement detecting device
SE457568B (sv) * 1987-06-03 1989-01-09 Facit Ab Optisk givare foer avkaenning av ett skrivhuvuds laege eller roerelse relativt en referens
US4984287A (en) * 1988-11-15 1991-01-08 Msc Technologies, Inc. Method for orienting a dual mouse optical scanner
US4942621A (en) * 1988-11-15 1990-07-17 Msc Technologies, Inc. Method for mapping scanned pixel data
US5012080A (en) * 1990-04-19 1991-04-30 Griscom Daniel T Directional particle filter
EP0482224B1 (de) * 1990-10-20 1994-01-12 Dr. Johannes Heidenhain GmbH Interferentielle Messeinrichtung für wenigstens eine Messrichtung
JPH04208810A (ja) * 1990-12-03 1992-07-30 Omron Corp 変位信号出力装置
EP0541827B1 (de) * 1991-11-04 1995-04-12 Dr. Johannes Heidenhain GmbH Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
US5390022A (en) * 1992-04-07 1995-02-14 Canon Kabushiki Kaisha Displacement information detection apparatus for receiving a divergent light beam
EP0639259B1 (en) * 1992-05-05 1999-07-28 MicroE, Inc. Apparatus for detecting relative movement
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
JP3210111B2 (ja) * 1992-12-24 2001-09-17 キヤノン株式会社 変位検出装置
JPH06194123A (ja) * 1992-12-24 1994-07-15 Canon Inc 変位検出装置
JP3005131B2 (ja) * 1992-12-28 2000-01-31 キヤノン株式会社 変位検出装置
JP3530573B2 (ja) * 1994-04-27 2004-05-24 キヤノン株式会社 光学式変位センサ
EP0978708B1 (de) * 1998-08-01 2005-10-05 Dr. Johannes Heidenhain GmbH Rotatorische Positionsmesseinrichtung
EP1028309B1 (de) 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
US20050175217A1 (en) * 2004-02-05 2005-08-11 Mueller Louis F. Using target images to determine a location of a stage
FR2872899A1 (fr) * 2004-07-09 2006-01-13 Neviere Michel Capteur optique de deplacement de resolution nanometrique
FR2872898A1 (fr) * 2004-07-09 2006-01-13 Neviere Michel Capteur optique de deplacement de resolution nanometrique
FR2908880B1 (fr) * 2006-11-21 2009-01-16 Centre Nat Rech Scient Dispositif de detection d'interferences monolithique integre
US9029757B2 (en) 2011-12-23 2015-05-12 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9080899B2 (en) 2011-12-23 2015-07-14 Mitutoyo Corporation Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch
US8941052B2 (en) 2011-12-23 2015-01-27 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9018578B2 (en) * 2011-12-23 2015-04-28 Mitutoyo Corporation Adaptable resolution optical encoder having structured illumination and spatial filtering
US20140241731A1 (en) * 2013-02-28 2014-08-28 Harris Corporation System and method for free space optical communication beam acquisition
DE102015209716B4 (de) 2014-05-29 2023-04-20 Mitutoyo Corporation Optischer Codierer mit anpassbarer Auflösung

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3344700A (en) * 1961-05-23 1967-10-03 British Aircraft Corp Ltd Displacement measuring system
GB1096022A (en) * 1963-06-21 1967-12-20 Cooke Conrad Reginald Improvements in or relating to apparatus for detecting and indicating the extent of relative movement
GB1504691A (en) * 1974-03-15 1978-03-22 Nat Res Dev Measurement apparatus
US4049965A (en) * 1975-03-06 1977-09-20 National Research Development Corporation Measurement apparatus
GB1516536A (en) * 1975-08-22 1978-07-05 Ferranti Ltd Measuring apparatus

Also Published As

Publication number Publication date
GB1592705A (en) 1981-07-08
US4176276A (en) 1979-11-27

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