CH593347A5 - - Google Patents

Info

Publication number
CH593347A5
CH593347A5 CH261776A CH261776A CH593347A5 CH 593347 A5 CH593347 A5 CH 593347A5 CH 261776 A CH261776 A CH 261776A CH 261776 A CH261776 A CH 261776A CH 593347 A5 CH593347 A5 CH 593347A5
Authority
CH
Switzerland
Application number
CH261776A
Original Assignee
Bbc Brown Boveri & Cie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bbc Brown Boveri & Cie filed Critical Bbc Brown Boveri & Cie
Priority to CH261776A priority Critical patent/CH593347A5/xx
Priority to DE19762612424 priority patent/DE2612424A1/de
Publication of CH593347A5 publication Critical patent/CH593347A5/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH261776A 1976-03-03 1976-03-03 CH593347A5 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CH261776A CH593347A5 (enrdf_load_stackoverflow) 1976-03-03 1976-03-03
DE19762612424 DE2612424A1 (de) 1976-03-03 1976-03-24 Aufdampfquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH261776A CH593347A5 (enrdf_load_stackoverflow) 1976-03-03 1976-03-03

Publications (1)

Publication Number Publication Date
CH593347A5 true CH593347A5 (enrdf_load_stackoverflow) 1977-11-30

Family

ID=4237784

Family Applications (1)

Application Number Title Priority Date Filing Date
CH261776A CH593347A5 (enrdf_load_stackoverflow) 1976-03-03 1976-03-03

Country Status (2)

Country Link
CH (1) CH593347A5 (enrdf_load_stackoverflow)
DE (1) DE2612424A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102421930A (zh) * 2009-04-29 2012-04-18 泽瓦薄膜技术股份有限公司 用于通过高压蒸发进行高速率涂覆的方法和设备

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4104415C1 (enrdf_load_stackoverflow) * 1991-02-14 1992-06-04 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De
US6202591B1 (en) * 1998-11-12 2001-03-20 Flex Products, Inc. Linear aperture deposition apparatus and coating process
KR100490537B1 (ko) 2002-07-23 2005-05-17 삼성에스디아이 주식회사 가열용기와 이를 이용한 증착장치
JP2005029895A (ja) 2003-07-04 2005-02-03 Agfa Gevaert Nv 蒸着装置
EP1496133A1 (en) * 2003-07-04 2005-01-12 Agfa-Gevaert Assembly for crucible used for evaporation of raw materials.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102421930A (zh) * 2009-04-29 2012-04-18 泽瓦薄膜技术股份有限公司 用于通过高压蒸发进行高速率涂覆的方法和设备
CN102421930B (zh) * 2009-04-29 2014-02-12 泽瓦薄膜技术股份有限公司 用于通过高压蒸发进行高速率涂覆的方法和设备

Also Published As

Publication number Publication date
DE2612424A1 (de) 1977-09-08

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