CH569985A5 - - Google Patents
Info
- Publication number
- CH569985A5 CH569985A5 CH310574A CH310574A CH569985A5 CH 569985 A5 CH569985 A5 CH 569985A5 CH 310574 A CH310574 A CH 310574A CH 310574 A CH310574 A CH 310574A CH 569985 A5 CH569985 A5 CH 569985A5
- Authority
- CH
- Switzerland
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
- G02B17/0615—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in wich all of the mirrors share a common axis of rotational symmetry
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33986073A | 1973-03-09 | 1973-03-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH569985A5 true CH569985A5 (ru) | 1975-11-28 |
Family
ID=23330939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH310574A CH569985A5 (ru) | 1973-03-09 | 1974-03-05 |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS5026561A (ru) |
CA (1) | CA1011979A (ru) |
CH (1) | CH569985A5 (ru) |
DE (1) | DE2410924A1 (ru) |
FR (1) | FR2220807B3 (ru) |
GB (1) | GB1459272A (ru) |
IT (1) | IT1011068B (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2742488A1 (de) * | 1976-09-22 | 1978-03-23 | Perkin Elmer Corp | Beleuchtungssystem zur beleuchtung eines ringfeldes |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3878419A (en) * | 1973-12-17 | 1975-04-15 | Carlo F Lafiandra | Precision base mercury vapor lamp |
JPS5467443A (en) * | 1977-11-09 | 1979-05-30 | Canon Inc | Observer |
DE2910280C2 (de) | 1978-03-18 | 1993-10-28 | Canon Kk | Optische Abbildungssysteme |
JPS54123877A (en) * | 1978-03-18 | 1979-09-26 | Canon Inc | Baking unit |
JPS5576444U (ru) * | 1978-11-13 | 1980-05-26 | ||
FR2586853B1 (fr) * | 1985-08-30 | 1988-07-29 | Suisse Electronique Microtech | Dispositif de micropositionnement |
JP2567811B2 (ja) * | 1994-02-14 | 1996-12-25 | キヤノン株式会社 | 走査型露光装置 |
-
1974
- 1974-03-05 DE DE19742410924 patent/DE2410924A1/de not_active Withdrawn
- 1974-03-05 CH CH310574A patent/CH569985A5/xx not_active IP Right Cessation
- 1974-03-06 FR FR7407614A patent/FR2220807B3/fr not_active Expired
- 1974-03-08 CA CA194,422A patent/CA1011979A/en not_active Expired
- 1974-03-08 GB GB1048474A patent/GB1459272A/en not_active Expired
- 1974-03-08 IT IT4921274A patent/IT1011068B/it active
- 1974-03-09 JP JP49026795A patent/JPS5026561A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2742488A1 (de) * | 1976-09-22 | 1978-03-23 | Perkin Elmer Corp | Beleuchtungssystem zur beleuchtung eines ringfeldes |
Also Published As
Publication number | Publication date |
---|---|
JPS5026561A (ru) | 1975-03-19 |
GB1459272A (en) | 1976-12-22 |
FR2220807B3 (ru) | 1978-11-10 |
FR2220807A1 (ru) | 1974-10-04 |
CA1011979A (en) | 1977-06-14 |
IT1011068B (it) | 1977-01-20 |
DE2410924A1 (de) | 1974-09-26 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |