CH566843A5 - - Google Patents

Info

Publication number
CH566843A5
CH566843A5 CH1797473A CH1797473A CH566843A5 CH 566843 A5 CH566843 A5 CH 566843A5 CH 1797473 A CH1797473 A CH 1797473A CH 1797473 A CH1797473 A CH 1797473A CH 566843 A5 CH566843 A5 CH 566843A5
Authority
CH
Switzerland
Application number
CH1797473A
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00319563A external-priority patent/US3850105A/en
Priority claimed from US329920A external-priority patent/US3889355A/en
Priority claimed from US00329494A external-priority patent/US3845286A/en
Application filed by Ibm filed Critical Ibm
Publication of CH566843A5 publication Critical patent/CH566843A5/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
CH1797473A 1972-12-29 1973-12-20 CH566843A5 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US00319563A US3850105A (en) 1972-12-29 1972-12-29 Apparatus for transferring articles through various processing sectors of a manufacturing system
US329920A US3889355A (en) 1973-02-05 1973-02-05 Continuous processing system
US00329494A US3845286A (en) 1973-02-05 1973-02-05 Manufacturing control system for processing workpieces

Publications (1)

Publication Number Publication Date
CH566843A5 true CH566843A5 (ko) 1975-09-30

Family

ID=27406059

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1797473A CH566843A5 (ko) 1972-12-29 1973-12-20

Country Status (6)

Country Link
CH (1) CH566843A5 (ko)
DE (1) DE2364790C2 (ko)
ES (1) ES421844A1 (ko)
FR (1) FR2212965A5 (ko)
GB (1) GB1451668A (ko)
NL (1) NL184986C (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
JPS60184678A (ja) * 1984-03-02 1985-09-20 Canon Inc 真空処理装置
EP0162703A3 (en) * 1984-05-23 1987-02-04 Machine Technology Inc. Modular processing apparatus and modules for use therewith
JPS6126229A (ja) * 1984-07-16 1986-02-05 Oki Electric Ind Co Ltd 半導体装置の製造装置
GB2191310A (en) * 1986-05-29 1987-12-09 Ford Motor Co Conveying system
JP2598305B2 (ja) * 1988-06-06 1997-04-09 日東電工株式会社 半導体ウエハの処理システム
DE19821389B4 (de) * 1998-02-12 2010-02-18 Claas Fertigungstechnik Gmbh Verfahren und Vorrichtung zum Handling von Werkstücken

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL297192A (ko) * 1962-07-20
AT288112B (de) * 1966-05-12 1971-02-25 Molins Machine Co Ltd Werkzeugmaschinenanlage mit einem zentralen Steuergerät
US3543392A (en) * 1967-12-15 1970-12-01 Cincinnati Milacron Inc Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools

Also Published As

Publication number Publication date
DE2364790C2 (de) 1985-11-28
FR2212965A5 (ko) 1974-07-26
DE2364790A1 (de) 1974-07-04
AU6308273A (en) 1975-06-05
ES421844A1 (es) 1976-05-01
GB1451668A (en) 1976-10-06
NL184986B (nl) 1989-07-17
NL7317755A (ko) 1974-07-02
NL184986C (nl) 1989-12-18

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Legal Events

Date Code Title Description
PL Patent ceased