CH544160A - Verfahren zum Herstellen eines Musters in einem metallischen Film - Google Patents
Verfahren zum Herstellen eines Musters in einem metallischen FilmInfo
- Publication number
- CH544160A CH544160A CH971671A CH971671A CH544160A CH 544160 A CH544160 A CH 544160A CH 971671 A CH971671 A CH 971671A CH 971671 A CH971671 A CH 971671A CH 544160 A CH544160 A CH 544160A
- Authority
- CH
- Switzerland
- Prior art keywords
- pattern
- producing
- metallic film
- metallic
- film
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5180870A | 1970-07-02 | 1970-07-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH544160A true CH544160A (de) | 1973-11-15 |
Family
ID=21973487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH971671A CH544160A (de) | 1970-07-02 | 1971-07-01 | Verfahren zum Herstellen eines Musters in einem metallischen Film |
Country Status (8)
Country | Link |
---|---|
US (1) | US3674579A (de) |
BE (1) | BE769403A (de) |
BR (1) | BR7103942D0 (de) |
CH (1) | CH544160A (de) |
DE (1) | DE2132109A1 (de) |
FR (1) | FR2100151A5 (de) |
GB (1) | GB1286219A (de) |
ZA (1) | ZA713875B (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5915394B2 (ja) * | 1978-08-31 | 1984-04-09 | 富士通株式会社 | 厚膜微細パタ−ン生成方法 |
NL8204307A (nl) * | 1982-11-08 | 1984-06-01 | Philips Nv | Werkwijze voor het etsen van holten en openingen in substraten en inrichting voor het uitvoeren van deze werkwijze. |
US5185056A (en) * | 1991-09-13 | 1993-02-09 | International Business Machines Corporation | Method and apparatus for etching semiconductor wafers and developing resists |
-
1970
- 1970-07-02 US US51808A patent/US3674579A/en not_active Expired - Lifetime
-
1971
- 1971-05-28 GB GB07725/71A patent/GB1286219A/en not_active Expired
- 1971-06-15 ZA ZA713875A patent/ZA713875B/xx unknown
- 1971-06-24 BR BR3942/71A patent/BR7103942D0/pt unknown
- 1971-06-28 DE DE19712132109 patent/DE2132109A1/de active Pending
- 1971-07-01 CH CH971671A patent/CH544160A/de not_active IP Right Cessation
- 1971-07-02 FR FR7124199A patent/FR2100151A5/fr not_active Expired
- 1971-07-02 BE BE769403A patent/BE769403A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
BE769403A (fr) | 1971-11-16 |
ZA713875B (en) | 1972-01-26 |
BR7103942D0 (pt) | 1973-04-12 |
DE2132109A1 (de) | 1972-02-10 |
FR2100151A5 (de) | 1972-03-17 |
US3674579A (en) | 1972-07-04 |
GB1286219A (en) | 1972-08-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CH495842A (de) | Verfahren zum Herstellen eines Schichtbauteils | |
AT357626B (de) | Verfahren zum herstellen eines einlagerungs- verbundmetalls | |
AT336386B (de) | Verfahren zum herstellen eines futtermittels | |
AT347410B (de) | Verfahren zum herstellen eines oberflaechen- aktiven produktes | |
AT323297B (de) | Verfahren zum herstellen eines folienelektrets hoher ladungsdichte | |
CH489826A (de) | Verfahren zum Herstellen eines lichtempfindlichen Materials | |
CH533889A (de) | Verfahren zum Herstellen eines Kabels | |
CH525497A (de) | Verfahren zum Herstellen eines Hologrammes | |
CH490511A (de) | Verfahren zum Herstellen eines Formstückes | |
AT335922B (de) | Verfahren zum herstellen eines druckpfahles | |
AT317136B (de) | Verfahren zum Herstellen eines textilähnlichen Schichtstoffes | |
CH527967A (de) | Verfahren und Einrichtung zum Herstellen einer rauhen Oberfläche auf einem Fahrbahnbelag | |
AT306659B (de) | Verfahren und Vorrichtung zum Herstellen eines Reißverschlusses durch Weben | |
AT314384B (de) | Verfahren zum Schleifen eines Metalles | |
AT323526B (de) | Verfahren und vorrichtung zum herstellen eines gewellten dünnen eleches | |
CH534940A (de) | Verfahren zum Herstellen eines Festwertspeichers | |
CH522233A (de) | Verfahren zur Herstellung eines Hologramms | |
CH544160A (de) | Verfahren zum Herstellen eines Musters in einem metallischen Film | |
AT306840B (de) | Verfahren zum Herstellen eines Zweischichten-Sinterkontaktstückes | |
AT320481B (de) | Verfahren zum Erzeugen eines spannungsfreien Garnkörpers | |
CH496254A (de) | Verfahren zum Aufzeichnen eines dreidimensionalen Objektes | |
AT308665B (de) | Verfahren und Vorrichtung zum Herstellen eines Reißverschlusses durch Weben | |
AT310465B (de) | Verfahren zum Herstellen eines selbsteinstellenden Tragelements mit einem Magnetkopf | |
CH529476A (de) | Verfahren zum Abgleich eines mechanischen Filters | |
AT347390B (de) | Verfahren zum herstellen eines beflockten textilen flaechengebildes |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |