BE769403A - Procede destine a produire un dessin sur film metallique - Google Patents
Procede destine a produire un dessin sur film metalliqueInfo
- Publication number
- BE769403A BE769403A BE769403A BE769403A BE769403A BE 769403 A BE769403 A BE 769403A BE 769403 A BE769403 A BE 769403A BE 769403 A BE769403 A BE 769403A BE 769403 A BE769403 A BE 769403A
- Authority
- BE
- Belgium
- Prior art keywords
- producing
- metal film
- film
- metal
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US5180870A | 1970-07-02 | 1970-07-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE769403A true BE769403A (fr) | 1971-11-16 |
Family
ID=21973487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE769403A BE769403A (fr) | 1970-07-02 | 1971-07-02 | Procede destine a produire un dessin sur film metallique |
Country Status (8)
Country | Link |
---|---|
US (1) | US3674579A (xx) |
BE (1) | BE769403A (xx) |
BR (1) | BR7103942D0 (xx) |
CH (1) | CH544160A (xx) |
DE (1) | DE2132109A1 (xx) |
FR (1) | FR2100151A5 (xx) |
GB (1) | GB1286219A (xx) |
ZA (1) | ZA713875B (xx) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5915394B2 (ja) * | 1978-08-31 | 1984-04-09 | 富士通株式会社 | 厚膜微細パタ−ン生成方法 |
NL8204307A (nl) * | 1982-11-08 | 1984-06-01 | Philips Nv | Werkwijze voor het etsen van holten en openingen in substraten en inrichting voor het uitvoeren van deze werkwijze. |
US5185056A (en) * | 1991-09-13 | 1993-02-09 | International Business Machines Corporation | Method and apparatus for etching semiconductor wafers and developing resists |
-
1970
- 1970-07-02 US US51808A patent/US3674579A/en not_active Expired - Lifetime
-
1971
- 1971-05-28 GB GB07725/71A patent/GB1286219A/en not_active Expired
- 1971-06-15 ZA ZA713875A patent/ZA713875B/xx unknown
- 1971-06-24 BR BR3942/71A patent/BR7103942D0/pt unknown
- 1971-06-28 DE DE19712132109 patent/DE2132109A1/de active Pending
- 1971-07-01 CH CH971671A patent/CH544160A/de not_active IP Right Cessation
- 1971-07-02 FR FR7124199A patent/FR2100151A5/fr not_active Expired
- 1971-07-02 BE BE769403A patent/BE769403A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
DE2132109A1 (de) | 1972-02-10 |
CH544160A (de) | 1973-11-15 |
ZA713875B (en) | 1972-01-26 |
US3674579A (en) | 1972-07-04 |
GB1286219A (en) | 1972-08-23 |
BR7103942D0 (pt) | 1973-04-12 |
FR2100151A5 (xx) | 1972-03-17 |
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