CH543598A - Process for the production of multilayer structures with the deposition of substances from their vapors - Google Patents

Process for the production of multilayer structures with the deposition of substances from their vapors

Info

Publication number
CH543598A
CH543598A CH1148669A CH1148669A CH543598A CH 543598 A CH543598 A CH 543598A CH 1148669 A CH1148669 A CH 1148669A CH 1148669 A CH1148669 A CH 1148669A CH 543598 A CH543598 A CH 543598A
Authority
CH
Switzerland
Prior art keywords
vapors
deposition
substances
production
multilayer structures
Prior art date
Application number
CH1148669A
Other languages
German (de)
Inventor
Lewis Bickerdike Robert
Norman Mair William
Original Assignee
Mini Of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mini Of Technology filed Critical Mini Of Technology
Publication of CH543598A publication Critical patent/CH543598A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1148669A 1968-07-26 1969-07-28 Process for the production of multilayer structures with the deposition of substances from their vapors CH543598A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3573068 1968-07-26

Publications (1)

Publication Number Publication Date
CH543598A true CH543598A (en) 1973-10-31

Family

ID=10380956

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1148669A CH543598A (en) 1968-07-26 1969-07-28 Process for the production of multilayer structures with the deposition of substances from their vapors

Country Status (11)

Country Link
AT (1) AT297352B (en)
BE (1) BE736672A (en)
CA (1) CA920006A (en)
CH (1) CH543598A (en)
CS (1) CS184305B2 (en)
DE (1) DE1937954C3 (en)
FR (1) FR2014745A1 (en)
GB (1) GB1265965A (en)
NL (1) NL168562C (en)
NO (1) NO129055B (en)
SE (1) SE362446B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1433753A (en) * 1972-07-14 1976-04-28 Secr Defence Temperature control
EP0091734A1 (en) * 1982-04-06 1983-10-19 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Improvements in or relating to the bulk production of alloys by deposition from the vapour phase and apparatus therefor
GB8430509D0 (en) * 1984-12-04 1985-01-09 Secr Defence Alloy production
JP2593319B2 (en) * 1987-10-09 1997-03-26 株式会社アサヒ電子研究所 Individual search device for objects to be searched, such as files
GB2248852A (en) * 1990-10-16 1992-04-22 Secr Defence Vapour deposition

Also Published As

Publication number Publication date
CA920006A (en) 1973-01-30
NL168562C (en) 1982-04-16
DE1937954A1 (en) 1970-01-29
AT297352B (en) 1972-03-27
BE736672A (en) 1969-12-31
FR2014745A1 (en) 1970-04-17
DE1937954C3 (en) 1979-11-22
GB1265965A (en) 1972-03-08
NO129055B (en) 1974-02-18
NL168562B (en) 1981-11-16
NL6911507A (en) 1970-01-28
CS184305B2 (en) 1978-08-31
DE1937954B2 (en) 1979-03-29
SE362446B (en) 1973-12-10

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Legal Events

Date Code Title Description
PL Patent ceased