CH542430A - Vorrichtung zum Messen der Stellung eines Tisches, der relativ zu einer Grundplatte verschiebbar ist, mittels Beobachtung von Interferenzstreifen - Google Patents

Vorrichtung zum Messen der Stellung eines Tisches, der relativ zu einer Grundplatte verschiebbar ist, mittels Beobachtung von Interferenzstreifen

Info

Publication number
CH542430A
CH542430A CH1512971A CH1512971A CH542430A CH 542430 A CH542430 A CH 542430A CH 1512971 A CH1512971 A CH 1512971A CH 1512971 A CH1512971 A CH 1512971A CH 542430 A CH542430 A CH 542430A
Authority
CH
Switzerland
Prior art keywords
measuring
base plate
interference fringes
displaceable relative
observing interference
Prior art date
Application number
CH1512971A
Other languages
English (en)
Inventor
Post Daniel
Original Assignee
Post Daniel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Post Daniel filed Critical Post Daniel
Publication of CH542430A publication Critical patent/CH542430A/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/60—Systems using moiré fringes
CH1512971A 1970-10-19 1971-10-18 Vorrichtung zum Messen der Stellung eines Tisches, der relativ zu einer Grundplatte verschiebbar ist, mittels Beobachtung von Interferenzstreifen CH542430A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4947870 1970-10-19

Publications (1)

Publication Number Publication Date
CH542430A true CH542430A (de) 1973-09-30

Family

ID=10452487

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1512971A CH542430A (de) 1970-10-19 1971-10-18 Vorrichtung zum Messen der Stellung eines Tisches, der relativ zu einer Grundplatte verschiebbar ist, mittels Beobachtung von Interferenzstreifen

Country Status (8)

Country Link
US (1) US3796498A (de)
CA (1) CA942049A (de)
CH (1) CH542430A (de)
DE (1) DE2151709A1 (de)
FR (1) FR2111109A5 (de)
GB (1) GB1353470A (de)
IL (1) IL37618A (de)
NL (1) NL7114329A (de)

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DE2511350A1 (de) * 1974-03-15 1975-10-09 Nat Research Dev Corp London Vorrichtung zum messen der verschiebung eines ersten elementes bezueglich eines zweiten
DE2819400A1 (de) * 1977-05-03 1978-11-09 Massachusetts Inst Technology Vorrichtung und verfahren zum ausrichten zweier koerper aufeinander

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GB1504691A (en) * 1974-03-15 1978-03-22 Nat Res Dev Measurement apparatus
US3919562A (en) * 1974-05-20 1975-11-11 Zenith Radio Corp Slit detector for optical detector system
US4049965A (en) * 1975-03-06 1977-09-20 National Research Development Corporation Measurement apparatus
GB1516536A (en) * 1975-08-22 1978-07-05 Ferranti Ltd Measuring apparatus
DE2826213B2 (de) * 1978-06-15 1980-06-04 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Photoelektrisches inkrementales Längen- und Winkelmeßsystem
US4192317A (en) * 1978-06-30 1980-03-11 Ical, Incorporated Indentation tonometer
US4286871A (en) * 1980-08-11 1981-09-01 Keuffel & Esser Company Photogrammetric measuring system
DE3369738D1 (en) * 1982-05-08 1987-03-12 Angenieux P Ets An improved zoom lens for cameras
US4528448A (en) * 1982-05-13 1985-07-09 Benson, Inc. Plane linear grating for optically encoding information
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder
US4684257A (en) * 1984-02-02 1987-08-04 Mitutoyo Mfg. Measuring instrument
US4584472A (en) * 1984-02-21 1986-04-22 Caterpillar Industrial Inc. Linear position encoder
GB2161262A (en) * 1984-07-05 1986-01-08 Co Operative Technology Ltd Digital instrumentation apparatus for the linear air-track
GB8432574D0 (en) * 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
US4794237A (en) * 1986-11-10 1988-12-27 Ncr Corporation Multidirectional holographic scanner
FR2615281B1 (fr) * 1987-05-11 1996-08-23 Canon Kk Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
DE3825475A1 (de) * 1988-07-27 1990-02-01 Bodenseewerk Geraetetech Optischer lagegeber
US5000574A (en) * 1989-04-20 1991-03-19 The United States Of America As Represented By The Secretary Of The Navy Interferometric surface distortion detector
AT394111B (de) * 1989-09-12 1992-02-10 Rieder Heinz Inkrementales messsystem
US5075562A (en) * 1990-09-20 1991-12-24 Eastman Kodak Company Method and apparatus for absolute Moire distance measurements using a grating printed on or attached to a surface
DE4420276C2 (de) * 1993-06-10 2001-04-19 Matsushita Electric Ind Co Ltd Apparat zur Versatzmessung von bewegten Körpern
FR2778458B1 (fr) * 1998-05-06 2001-12-28 Centre Nat Rech Scient Dispositif optique de mesure interferometrique d'un deplacement relatif entre deux elements dont l'un au moins est mobile relativement a l'autre
US6587211B1 (en) 1999-07-28 2003-07-01 Creo Srl Interferometric torque and power sensor
US20060194130A1 (en) * 2005-02-25 2006-08-31 William Roberts Run to run control for lens aberrations
US20060192943A1 (en) * 2005-02-25 2006-08-31 William Roberts Optimizing focal plane fitting functions for an image field on a substrate
US7248351B2 (en) * 2005-02-25 2007-07-24 Infineon Technologies Ag Optimizing light path uniformity in inspection systems
CN101984767B (zh) * 2008-01-21 2014-01-29 普莱姆森斯有限公司 用于使零级减少的光学设计
US8384997B2 (en) 2008-01-21 2013-02-26 Primesense Ltd Optical pattern projection
JP5588310B2 (ja) 2009-11-15 2014-09-10 プライムセンス リミテッド ビームモニタ付き光学プロジェクタ
US20110188054A1 (en) * 2010-02-02 2011-08-04 Primesense Ltd Integrated photonics module for optical projection
US20110187878A1 (en) 2010-02-02 2011-08-04 Primesense Ltd. Synchronization of projected illumination with rolling shutter of image sensor
US9036158B2 (en) 2010-08-11 2015-05-19 Apple Inc. Pattern projector
US9098931B2 (en) 2010-08-11 2015-08-04 Apple Inc. Scanning projectors and image capture modules for 3D mapping
US9066087B2 (en) 2010-11-19 2015-06-23 Apple Inc. Depth mapping using time-coded illumination
US9167138B2 (en) 2010-12-06 2015-10-20 Apple Inc. Pattern projection and imaging using lens arrays
US20130001412A1 (en) 2011-07-01 2013-01-03 Mitutoyo Corporation Optical encoder including passive readhead with remote contactless excitation and signal sensing
US8749796B2 (en) 2011-08-09 2014-06-10 Primesense Ltd. Projectors of structured light
US8908277B2 (en) 2011-08-09 2014-12-09 Apple Inc Lens array projector
US8941052B2 (en) 2011-12-23 2015-01-27 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9018578B2 (en) 2011-12-23 2015-04-28 Mitutoyo Corporation Adaptable resolution optical encoder having structured illumination and spatial filtering
US9029757B2 (en) 2011-12-23 2015-05-12 Mitutoyo Corporation Illumination portion for an adaptable resolution optical encoder
US9080899B2 (en) 2011-12-23 2015-07-14 Mitutoyo Corporation Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch
TWI464385B (zh) * 2012-03-22 2014-12-11 Hiti Digital Inc 用來偵測透光光柵結構之偵測裝置與偵測方法
WO2013140308A1 (en) 2012-03-22 2013-09-26 Primesense Ltd. Diffraction-based sensing of mirror position
US9528906B1 (en) 2013-12-19 2016-12-27 Apple Inc. Monitoring DOE performance using total internal reflection
US10012831B2 (en) 2015-08-03 2018-07-03 Apple Inc. Optical monitoring of scan parameters
US10073004B2 (en) 2016-09-19 2018-09-11 Apple Inc. DOE defect monitoring utilizing total internal reflection
US11422292B1 (en) 2018-06-10 2022-08-23 Apple Inc. Super-blazed diffractive optical elements with sub-wavelength structures
US11681019B2 (en) 2019-09-18 2023-06-20 Apple Inc. Optical module with stray light baffle
US11506762B1 (en) 2019-09-24 2022-11-22 Apple Inc. Optical module comprising an optical waveguide with reference light path
US11754767B1 (en) 2020-03-05 2023-09-12 Apple Inc. Display with overlaid waveguide

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US2886718A (en) * 1955-05-31 1959-05-12 Ferranti Ltd Measuring apparatus
DE1548707C3 (de) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Fotoelektrischer Schrittgeber
US3588462A (en) * 1966-12-23 1971-06-28 Bausch & Lomb Fringe interpolator and counter
US3572937A (en) * 1968-11-04 1971-03-30 Atomic Energy Commission Method and apparatus for interferometric measurement of machine slide roll
DE1921507C2 (de) * 1969-04-26 1971-02-11 Zeiss Carl Fa Einrichtung zur Erzeugung phasenverschobener elektrischer Signale
BE755054A (fr) * 1969-08-21 1971-02-01 Doall Co Procede et dispositif pour la commande du mouvement et de la mise en position des parties mobiles, notamment d'une machine-outil, au moyen de donnees numeriques

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2511350A1 (de) * 1974-03-15 1975-10-09 Nat Research Dev Corp London Vorrichtung zum messen der verschiebung eines ersten elementes bezueglich eines zweiten
DE2819400A1 (de) * 1977-05-03 1978-11-09 Massachusetts Inst Technology Vorrichtung und verfahren zum ausrichten zweier koerper aufeinander

Also Published As

Publication number Publication date
DE2151709A1 (de) 1972-05-31
IL37618A (en) 1974-05-16
US3796498A (en) 1974-03-12
FR2111109A5 (de) 1972-06-02
IL37618A0 (en) 1971-11-29
NL7114329A (de) 1972-04-21
GB1353470A (en) 1974-05-15
CA942049A (en) 1974-02-19

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