CH539950A - Verfahren und Einrichtung zum Gettern von Halbleitern - Google Patents
Verfahren und Einrichtung zum Gettern von HalbleiternInfo
- Publication number
- CH539950A CH539950A CH1843171A CH1843171A CH539950A CH 539950 A CH539950 A CH 539950A CH 1843171 A CH1843171 A CH 1843171A CH 1843171 A CH1843171 A CH 1843171A CH 539950 A CH539950 A CH 539950A
- Authority
- CH
- Switzerland
- Prior art keywords
- gettering
- semiconductors
- gettering semiconductors
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/06—Gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/113—Nitrides of boron or aluminum or gallium
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/114—Nitrides of silicon
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1843171A CH539950A (de) | 1971-12-20 | 1971-12-20 | Verfahren und Einrichtung zum Gettern von Halbleitern |
DE2203123A DE2203123C3 (de) | 1971-12-20 | 1972-01-24 | Verfahren zum Gettern von Halbleitern |
SE7216456A SE380674B (sv) | 1971-12-20 | 1972-12-15 | Sett for gettring av halvledare och anordning for genomforande av settet |
US00316520A US3856472A (en) | 1971-12-20 | 1972-12-19 | Apparatus for the gettering of semiconductors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1843171A CH539950A (de) | 1971-12-20 | 1971-12-20 | Verfahren und Einrichtung zum Gettern von Halbleitern |
Publications (1)
Publication Number | Publication Date |
---|---|
CH539950A true CH539950A (de) | 1973-07-31 |
Family
ID=4432932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH1843171A CH539950A (de) | 1971-12-20 | 1971-12-20 | Verfahren und Einrichtung zum Gettern von Halbleitern |
Country Status (4)
Country | Link |
---|---|
US (1) | US3856472A (de) |
CH (1) | CH539950A (de) |
DE (1) | DE2203123C3 (de) |
SE (1) | SE380674B (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4144099A (en) * | 1977-10-31 | 1979-03-13 | International Business Machines Corporation | High performance silicon wafer and fabrication process |
US4277303A (en) * | 1978-08-07 | 1981-07-07 | The Harshaw Chemical Company | Getter for melt-grown scintillator ingot and method for growing the ingot |
DE2855413A1 (de) * | 1978-12-21 | 1980-07-10 | Siemens Ag | Speichermaterial fuer wasserstoff |
US4401505A (en) * | 1982-03-31 | 1983-08-30 | The United States Of America As Represented By The Administrator National Aeronautics And Space Administration | Method of increasing minority carrier lifetime in silicon web or the like |
DE3219399C2 (de) * | 1982-05-24 | 1984-05-10 | Spindler & Hoyer GmbH & Co, 3400 Göttingen | Bausatz zum Aufbau einer mikrooptischen Bank |
US4727993A (en) * | 1984-03-09 | 1988-03-01 | Tegal Corporation | Wafer cassette having multi-directional access |
US4919278A (en) * | 1988-06-13 | 1990-04-24 | Howen Phillip J | Holder for containers and covers |
US5828502A (en) * | 1994-09-26 | 1998-10-27 | Afshari; Ali | Optical bench system |
US7201639B2 (en) * | 2001-04-24 | 2007-04-10 | Hitachi Global Storage Technologies Netherlands B.V. | Powder for disks |
US6619486B1 (en) * | 2002-03-25 | 2003-09-16 | Carlos J. Veloso | Flipper/catcher integrated with guide pin for up-stacking of die-cut thermoformed parts |
US20060043033A1 (en) * | 2004-08-31 | 2006-03-02 | Lynn James P | Container stacker, stabilizer and aligner |
US20150250309A1 (en) * | 2014-03-06 | 2015-09-10 | Kristina McLoud | Pillow Holding Device |
USD801087S1 (en) | 2014-12-04 | 2017-10-31 | Kristina McLoud | Pillow holder |
US10278528B1 (en) * | 2018-03-15 | 2019-05-07 | Jimmy Godsby | Ball cap holder |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1127319A (en) * | 1913-12-24 | 1915-02-02 | Walter S Thompson | Rack or holder. |
US2187355A (en) * | 1937-02-04 | 1940-01-16 | Cushman S Sons Inc | Apparatus for the manufacture of baked goods |
GB849550A (en) * | 1958-01-30 | 1960-09-28 | Gen Electric Co Ltd | Improvements in or relating to the heat treatment of silicon |
US3007816A (en) * | 1958-07-28 | 1961-11-07 | Motorola Inc | Decontamination process |
US3128213A (en) * | 1961-07-20 | 1964-04-07 | Int Rectifier Corp | Method of making a semiconductor device |
NL6504750A (de) * | 1964-04-15 | 1965-10-18 | ||
US3429818A (en) * | 1965-02-12 | 1969-02-25 | Tyco Laboratories Inc | Method of growing crystals |
NL6615376A (de) * | 1966-11-01 | 1968-05-02 |
-
1971
- 1971-12-20 CH CH1843171A patent/CH539950A/de not_active IP Right Cessation
-
1972
- 1972-01-24 DE DE2203123A patent/DE2203123C3/de not_active Expired
- 1972-12-15 SE SE7216456A patent/SE380674B/xx unknown
- 1972-12-19 US US00316520A patent/US3856472A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
SE380674B (sv) | 1975-11-10 |
DE2203123C3 (de) | 1981-02-05 |
DE2203123A1 (de) | 1973-07-05 |
DE2203123B2 (de) | 1980-05-29 |
US3856472A (en) | 1974-12-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CH507000A (de) | Verfahren und Einrichtung zum Waschen von Flächen | |
AT331139B (de) | Verfahren und vorrichtung zum raffen von zylindrischen hullen | |
CH530337A (de) | Verfahren und Vorrichtung zum Aufspulen von Garn | |
CH528152A (de) | Halbleiteranordnung und Verfahren zu deren Herstellung | |
DD90533A5 (de) | Verfahren und Vorrichtung zum Fermentieren | |
AR193866A1 (es) | Dispositivo semiconductor y metodo para su fabricacion | |
CH527964A (de) | Fahrbare Einrichtung zum Aufnehmen und Abtransport von gebrauchten Schienenbefestigungsorganen | |
CH539950A (de) | Verfahren und Einrichtung zum Gettern von Halbleitern | |
CH527092A (de) | Verfahren und Vorrichtung zum Vakuumverpacken | |
AT310640B (de) | Verfahren und Vorrichtung zum Trennen von Gasbetonelementen | |
AT324682B (de) | Verfahren und vorrichtung zum verbinden von übereinander laufenden bahnen | |
CH546135A (de) | Verfahren und vorrichtung zum auswaschen von hochkant stehenden waschbetonbauteilen. | |
CH446534A (de) | Halbleiteranordnung und Verfahren zum Herstellen derselben | |
AT329399B (de) | Verfahren und vorrichtung zum fullen von verpackungshullen | |
CH540045A (de) | Verfahren und Vorrichtung zum Herstellen von Tampons | |
AT331606B (de) | Verfahren und vorrichtung zum elektroplattieren | |
CH547220A (de) | Verfahren und vorrichtung zum aneinanderfuegen von bahnmateriallaengen. | |
CH538332A (de) | Verfahren und Einrichtung zum Gewindeschleifen | |
AT338178B (de) | Verfahren und vorrichtung zum entwassern und trocknen von granulierten feststoffen | |
CH537655A (de) | Einrichtung zum Verbinden von Kabeln und Verfahren zum Betrieb der Einrichtung | |
AT302934B (de) | Verfahren und Einrichtung zum Entfernen von Bohrklein | |
AT354995B (de) | Verfahren zum sterilisieren von gasen | |
AT327623B (de) | Verfahren und vorrichtung zum verlegen von leitungen | |
CH480921A (de) | Verfahren und Gerät zum Eintreiben von Befestigungselementen | |
AT321244B (de) | Verfahren und Vorrichtung zum Eindicken von Lösungen |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |