CH532785A - Röntgentopographiegerät - Google Patents

Röntgentopographiegerät

Info

Publication number
CH532785A
CH532785A CH1507971A CH1507971A CH532785A CH 532785 A CH532785 A CH 532785A CH 1507971 A CH1507971 A CH 1507971A CH 1507971 A CH1507971 A CH 1507971A CH 532785 A CH532785 A CH 532785A
Authority
CH
Switzerland
Prior art keywords
ray topography
topography device
ray
topography
Prior art date
Application number
CH1507971A
Other languages
English (en)
Inventor
Heinrich Dipl Phys Grienauer
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH532785A publication Critical patent/CH532785A/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/205Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials using diffraction cameras

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
CH1507971A 1970-10-20 1971-10-14 Röntgentopographiegerät CH532785A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702051511 DE2051511B2 (de) 1970-10-20 1970-10-20 Roentgentopographiegeraet

Publications (1)

Publication Number Publication Date
CH532785A true CH532785A (de) 1973-01-15

Family

ID=5785657

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1507971A CH532785A (de) 1970-10-20 1971-10-14 Röntgentopographiegerät

Country Status (6)

Country Link
US (1) US3751662A (de)
CH (1) CH532785A (de)
DE (1) DE2051511B2 (de)
FR (1) FR2111520A5 (de)
GB (1) GB1372885A (de)
SE (1) SE368626B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3992624A (en) * 1975-04-29 1976-11-16 The United States Of America As Represented By The Secretary Of The Army Apparatus and method of X-ray topography at cryogenic temperature
DE3439471A1 (de) * 1984-10-27 1986-04-30 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Verfahren und vorrichtung zum pruefen einkristalliner gegenstaende
DE4100680A1 (de) * 1991-01-11 1992-07-23 Siemens Ag Verfahren zur zerstoerungsfreien bestimmung von verformungen eines halbleiterkristalles in einem gehaeuse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2829268A (en) * 1952-05-05 1958-04-01 Industrial Nucleonics Corp Standardization system
US3177360A (en) * 1962-09-14 1965-04-06 Norton Co Diffractometer with a rotatable support to hold plural samples for automatic analysis of crystalline material
US3435219A (en) * 1967-01-30 1969-03-25 Atomic Energy Commission Neutron spectrometer for high neutron flux

Also Published As

Publication number Publication date
DE2051511B2 (de) 1973-05-03
SE368626B (de) 1974-07-08
US3751662A (en) 1973-08-07
GB1372885A (en) 1974-11-06
DE2051511C3 (de) 1973-11-29
DE2051511A1 (de) 1972-05-31
FR2111520A5 (de) 1972-06-02

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Legal Events

Date Code Title Description
PL Patent ceased