CH531053A - Verfahren zum Verdampfen von Silizium oder einem Metall - Google Patents

Verfahren zum Verdampfen von Silizium oder einem Metall

Info

Publication number
CH531053A
CH531053A CH1499968A CH1499968A CH531053A CH 531053 A CH531053 A CH 531053A CH 1499968 A CH1499968 A CH 1499968A CH 1499968 A CH1499968 A CH 1499968A CH 531053 A CH531053 A CH 531053A
Authority
CH
Switzerland
Prior art keywords
metal
evaporating silicon
evaporating
silicon
Prior art date
Application number
CH1499968A
Other languages
German (de)
English (en)
Inventor
Ploos Van Amstel Johan Asuerus
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH531053A publication Critical patent/CH531053A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH1499968A 1967-10-10 1968-10-07 Verfahren zum Verdampfen von Silizium oder einem Metall CH531053A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6713713A NL6713713A (fr) 1967-10-10 1967-10-10

Publications (1)

Publication Number Publication Date
CH531053A true CH531053A (de) 1972-11-30

Family

ID=19801406

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1499968A CH531053A (de) 1967-10-10 1968-10-07 Verfahren zum Verdampfen von Silizium oder einem Metall

Country Status (8)

Country Link
US (2) US3607368A (fr)
AT (1) AT284582B (fr)
BE (1) BE722019A (fr)
CH (1) CH531053A (fr)
FR (1) FR1589261A (fr)
GB (1) GB1229879A (fr)
NL (1) NL6713713A (fr)
SE (1) SE326874B (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3928659A (en) * 1970-02-12 1975-12-23 Alexander Samuel Baxter Methods of and means for vacuum deposition
GB1354702A (en) * 1970-02-12 1974-06-05 Baxter Ltd Alexander Methods of and means for vacuum deposition
US3796182A (en) * 1971-12-16 1974-03-12 Applied Materials Tech Susceptor structure for chemical vapor deposition reactor
US3860443A (en) * 1973-03-22 1975-01-14 Fiber Materials Graphite composite
US3931493A (en) * 1973-06-21 1976-01-06 United Technologies Corporation Apparatus and method for the production of metal vapor
GB1490347A (en) * 1974-02-08 1977-11-02 Dunlop Ltd Friction members
US4027622A (en) * 1974-04-08 1977-06-07 Beckman Instruments G.M.B.H. Apparatus for doping semiconductors in centrifuge
US4336277A (en) * 1980-09-29 1982-06-22 The Regents Of The University Of California Transparent electrical conducting films by activated reactive evaporation
US4803094A (en) * 1988-05-09 1989-02-07 Myers Richard A Metallized coating
DE3833232A1 (de) * 1988-09-30 1990-04-05 Leybold Ag Verfahren und vorrichtung zum verdampfen von bei raumtemperatur fluessigen monomeren
JPH0754285Y2 (ja) * 1989-10-11 1995-12-18 パイオニア株式会社 蒸着装置
CA2282771A1 (fr) * 1999-09-17 2001-03-17 Dale William Mackenzie Methode et appareil de renforcement d'une piece metallique au moyen de fibres de bore
US6697571B2 (en) * 2002-03-11 2004-02-24 The Dial Corporation Method and apparatus for selective positioning a wick material in a vapor-dispensing device
JP4787170B2 (ja) * 2004-10-21 2011-10-05 双葉電子工業株式会社 蒸発源装置
US8409428B2 (en) 2006-06-28 2013-04-02 Saudi Arabian Oil Company Catalyst additive for reduction of sulfur in catalytically cracked gasoline

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2608436A (en) * 1948-12-16 1952-08-26 Baughman John Leonard Air-conditioning and vaporizing fan
US2597195A (en) * 1950-03-18 1952-05-20 Garland D Runnels Vaporizer
US2665225A (en) * 1950-04-27 1954-01-05 Nat Res Corp Apparatus and process for coating by vapor deposition
US2665227A (en) * 1950-06-30 1954-01-05 Nat Res Corp Apparatus and method of coating by vapor deposition
US3068337A (en) * 1958-12-05 1962-12-11 Gen Electric Vaporizer and method for making the same
NL253747A (fr) * 1959-07-13
US3152246A (en) * 1960-03-24 1964-10-06 Philips Corp Device for depositing metal layers from vapour in vacuo
US3362915A (en) * 1965-02-24 1968-01-09 Richard Micek Method of and apparatus for generating silver iodide nuclei
US3413239A (en) * 1966-03-03 1968-11-26 Dow Chemical Co Vermicular graphite structures and method of making
US3350219A (en) * 1966-07-07 1967-10-31 Stackpole Carbon Co Evaporating metal employing porous member
US3627191A (en) * 1968-03-18 1971-12-14 Jesse Carl Hood Jr Solder wick

Also Published As

Publication number Publication date
US3723706A (en) 1973-03-27
BE722019A (fr) 1969-04-08
NL6713713A (fr) 1969-04-14
GB1229879A (fr) 1971-04-28
US3607368A (en) 1971-09-21
FR1589261A (fr) 1970-03-23
AT284582B (de) 1970-09-25
SE326874B (fr) 1970-08-03
DE1796216B2 (de) 1976-05-20
DE1796216A1 (de) 1972-04-13

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Legal Events

Date Code Title Description
PL Patent ceased