CH520525A - Verfahren und Vorrichtung zum Austausch von Materie zwischen einem Trägergas und einer Substratfläche - Google Patents

Verfahren und Vorrichtung zum Austausch von Materie zwischen einem Trägergas und einer Substratfläche

Info

Publication number
CH520525A
CH520525A CH1825070A CH1825070A CH520525A CH 520525 A CH520525 A CH 520525A CH 1825070 A CH1825070 A CH 1825070A CH 1825070 A CH1825070 A CH 1825070A CH 520525 A CH520525 A CH 520525A
Authority
CH
Switzerland
Prior art keywords
exchange
matter
substrate surface
carrier gas
carrier
Prior art date
Application number
CH1825070A
Other languages
English (en)
Inventor
Anthony Foehring Robert
Raymond Garnache Richard
Kenney Donald Mcalpine
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH520525A publication Critical patent/CH520525A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45502—Flow conditions in reaction chamber
    • C23C16/45504—Laminar flow
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45519—Inert gas curtains
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/907—Continuous processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/935—Gas flow control

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
CH1825070A 1970-01-02 1970-12-08 Verfahren und Vorrichtung zum Austausch von Materie zwischen einem Trägergas und einer Substratfläche CH520525A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US34570A 1970-01-02 1970-01-02

Publications (1)

Publication Number Publication Date
CH520525A true CH520525A (de) 1972-03-31

Family

ID=21691109

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1825070A CH520525A (de) 1970-01-02 1970-12-08 Verfahren und Vorrichtung zum Austausch von Materie zwischen einem Trägergas und einer Substratfläche

Country Status (10)

Country Link
US (1) US3672948A (de)
BE (1) BE760041A (de)
CA (1) CA931025A (de)
CH (1) CH520525A (de)
DE (1) DE2064470C3 (de)
ES (1) ES386190A1 (de)
FR (1) FR2075030A5 (de)
GB (1) GB1328390A (de)
NL (1) NL7018090A (de)
SE (1) SE377430B (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4089735A (en) * 1968-06-05 1978-05-16 Siemens Aktiengesellschaft Method for epitactic precipitation of crystalline material from a gaseous phase, particularly for semiconductors
FR2133498B1 (de) * 1971-04-15 1977-06-03 Labo Electronique Physique
JPS4834798A (de) * 1971-09-06 1973-05-22
US3790404A (en) * 1972-06-19 1974-02-05 Ibm Continuous vapor processing apparatus and method
US3841926A (en) * 1973-01-02 1974-10-15 Ibm Integrated circuit fabrication process
US3842794A (en) * 1973-06-29 1974-10-22 Ibm Apparatus for high temperature semiconductor processing
US3865072A (en) * 1973-10-18 1975-02-11 Hls Ind Apparatus for chemically depositing epitaxial layers on semiconductor substrates
US4048953A (en) * 1974-06-19 1977-09-20 Pfizer Inc. Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material
GB1507996A (en) * 1975-06-11 1978-04-19 Pilkington Brothers Ltd Coating glass
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor
GB1523991A (en) * 1976-04-13 1978-09-06 Bfg Glassgroup Coating of glass
US4084540A (en) * 1977-05-19 1978-04-18 Discwasher, Inc. Apparatus for applying lubricating and protective film to phonograph records
US4116733A (en) * 1977-10-06 1978-09-26 Rca Corporation Vapor phase growth technique of III-V compounds utilizing a preheating step
US4171235A (en) * 1977-12-27 1979-10-16 Hughes Aircraft Company Process for fabricating heterojunction structures utilizing a double chamber vacuum deposition system
US4256053A (en) * 1979-08-17 1981-03-17 Dozier Alfred R Chemical vapor reaction system
US4256052A (en) * 1979-10-02 1981-03-17 Rca Corp. Temperature gradient means in reactor tube of vapor deposition apparatus
US4287851A (en) * 1980-01-16 1981-09-08 Dozier Alfred R Mounting and excitation system for reaction in the plasma state
US4518455A (en) * 1982-09-02 1985-05-21 At&T Technologies, Inc. CVD Process
US4651673A (en) * 1982-09-02 1987-03-24 At&T Technologies, Inc. CVD apparatus
IN161171B (de) * 1982-09-16 1987-10-10 Energy Conversion Devices Inc
US4462333A (en) * 1982-10-27 1984-07-31 Energy Conversion Devices, Inc. Process gas introduction, confinement and evacuation system for glow discharge deposition apparatus
US4499853A (en) * 1983-12-09 1985-02-19 Rca Corporation Distributor tube for CVD reactor
US4941429A (en) * 1988-12-20 1990-07-17 Texas Instruments Incorporated Semiconductor wafer carrier guide tracks
US5378501A (en) * 1993-10-05 1995-01-03 Foster; Robert F. Method for chemical vapor deposition of titanium nitride films at low temperatures
US5997588A (en) * 1995-10-13 1999-12-07 Advanced Semiconductor Materials America, Inc. Semiconductor processing system with gas curtain
DE19704533C2 (de) * 1997-02-06 2000-10-26 Siemens Ag Verfahren zur Schichterzeugung auf einer Oberfläche
US6626997B2 (en) 2001-05-17 2003-09-30 Nathan P. Shapiro Continuous processing chamber
DE10320597A1 (de) * 2003-04-30 2004-12-02 Aixtron Ag Verfahren und Vorrichtung zum Abscheiden von Halbleiterschichten mit zwei Prozessgasen, von denen das eine vorkonditioniert ist
DE102005045582B3 (de) * 2005-09-23 2007-03-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur kontinuierlichen Gasphasenabscheidung unter Atmosphärendruck und deren Verwendung
KR20120083712A (ko) * 2011-01-18 2012-07-26 삼성엘이디 주식회사 서셉터 및 이를 구비하는 화학 기상 증착 장치
WO2012127305A1 (en) * 2011-03-21 2012-09-27 Centrotherm Photovoltaics Ag Gas supply for a processing furnace
DE102016101003A1 (de) 2016-01-21 2017-07-27 Aixtron Se CVD-Vorrichtung mit einem als Baugruppe aus dem Reaktorgehäuse entnehmbaren Prozesskammergehäuse
CN115369387A (zh) * 2021-05-18 2022-11-22 迈络思科技有限公司 连续进给化学气相沉积系统
US20230002906A1 (en) * 2021-07-01 2023-01-05 Mellanox Technologies, Ltd. Continuous-feed chemical vapor deposition system
US12004308B2 (en) 2021-05-18 2024-06-04 Mellanox Technologies, Ltd. Process for laminating graphene-coated printed circuit boards
US11963309B2 (en) 2021-05-18 2024-04-16 Mellanox Technologies, Ltd. Process for laminating conductive-lubricant coated metals for printed circuit boards

Also Published As

Publication number Publication date
US3672948A (en) 1972-06-27
DE2064470C3 (de) 1975-08-14
GB1328390A (en) 1973-08-30
NL7018090A (de) 1971-07-06
SE377430B (de) 1975-07-07
DE2064470A1 (de) 1971-07-08
DE2064470B2 (de) 1975-01-09
BE760041A (fr) 1971-05-17
FR2075030A5 (de) 1971-10-08
ES386190A1 (es) 1973-03-16
CA931025A (en) 1973-07-31

Similar Documents

Publication Publication Date Title
CH520525A (de) Verfahren und Vorrichtung zum Austausch von Materie zwischen einem Trägergas und einer Substratfläche
CH534015A (de) Verfahren und Vorrichtung zum Beschichten einer Materialbahn
AT321820B (de) Verfahren und Vorrichtung zum Trocknen einer ein Lösungsmittel enthaltenden Beschichtung
CH540739A (de) Verfahren und Vorrichtung zum Ultraschallschweissen von Drähten auf die Metalloberfläche eines Trägers
AT327823B (de) Verfahren und vorrichtung zum reinigen von flussigkeiten
ATA364672A (de) Verfahren und vorrichtung zum anformen einer muffe
AT302779B (de) Verfahren und Vorrichtung zum Wellen von Rohren
CH542666A (de) Verfahren und Vorrichtung zum Ausrichten einer Oberfläche eines flachen Gegenstandes
CH529580A (de) Verfahren und Vorrichtung zum Entfernen suspendierter Feststoffe aus einer Flüssigkeit
CH527632A (de) Verfahren zum Filtrieren einer Flüssigkeit und Vorrichtung zur Durchführung des Verfahrens
CH540099A (de) Verfahren zum Beschichten einer Fläche
AT316584B (de) Verfahren und Vorrichtung zum kontinuierlichen Konzentrieren einer aus angeschlämmtem Feststoff bestehenden Dispersion
AT341879B (de) Verfahren und vorrichtung zum beidseitigen beschichten einer materialbahn
CH527967A (de) Verfahren und Einrichtung zum Herstellen einer rauhen Oberfläche auf einem Fahrbahnbelag
CH544592A (de) Verfahren zum gleichzeitigen Ziehen einer Anzahl von Drähten und Vorrichtung zur Ausführung des Verfahrens
AT331606B (de) Verfahren und vorrichtung zum elektroplattieren
CH539584A (de) Verfahren und Vorrichtung zum Belüften einer Flüssigkeit
AT323059B (de) Verfahren und vorrichtung zum geordneten abstapeln der verschiedenen teilplattengrössen einer aufgeteilten platte
AT348474B (de) Vorrichtung zum aufbringen einer ebenen schicht
CH535288A (de) Verfahren und Vorrichtung zum Trocknen von Emailschlicker an der Innenfläche von Rohren
AT315081B (de) Verfahren zum Bilden einer Trägerpackung und Vorrichtung zur Durchführung des Verfahrens
ATA842072A (de) Verfahren und vorrichtung zum verlegen von leitungen
AT321244B (de) Verfahren und Vorrichtung zum Eindicken von Lösungen
CH533952A (de) Verfahren zum Feststellen und Entfernen von an einem Träger einer Chips-Fritiervorrichtung klebenden Chips
CH517502A (de) Verfahren zum Konzentrieren einer Lösung oder Suspension und Vorrichtung zur Durchführung des Verfahrens

Legal Events

Date Code Title Description
PL Patent ceased