CH515071A - Method and apparatus for diffusion treatment of semiconductor wafers - Google Patents

Method and apparatus for diffusion treatment of semiconductor wafers

Info

Publication number
CH515071A
CH515071A CH1286970A CH1286970A CH515071A CH 515071 A CH515071 A CH 515071A CH 1286970 A CH1286970 A CH 1286970A CH 1286970 A CH1286970 A CH 1286970A CH 515071 A CH515071 A CH 515071A
Authority
CH
Switzerland
Prior art keywords
semiconductor wafers
diffusion treatment
diffusion
treatment
wafers
Prior art date
Application number
CH1286970A
Other languages
German (de)
Inventor
A Mead Carver
O Mccaldin James
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of CH515071A publication Critical patent/CH515071A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/041—Doping control in crystal growth
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/107—Melt

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
CH1286970A 1969-09-24 1970-08-27 Method and apparatus for diffusion treatment of semiconductor wafers CH515071A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86073669A 1969-09-24 1969-09-24

Publications (1)

Publication Number Publication Date
CH515071A true CH515071A (en) 1971-11-15

Family

ID=25333907

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1286970A CH515071A (en) 1969-09-24 1970-08-27 Method and apparatus for diffusion treatment of semiconductor wafers

Country Status (9)

Country Link
US (1) US3650823A (en)
BE (1) BE756471A (en)
CA (1) CA935073A (en)
CH (1) CH515071A (en)
DE (1) DE2046036A1 (en)
FR (1) FR2062230A5 (en)
GB (1) GB1309108A (en)
IL (1) IL35037A (en)
NL (1) NL140435B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577131A (en) * 1980-06-16 1982-01-14 Junichi Nishizawa Manufacture of p-n junction
JP2717256B2 (en) * 1988-03-16 1998-02-18 社団法人生産技術振興協会 Semiconductor crystal
US5169799A (en) * 1988-03-16 1992-12-08 Sumitomo Electric Industries, Ltd. Method for forming a doped ZnSe single crystal
US6143630A (en) * 1994-06-09 2000-11-07 Texas Instruments Incorporated Method of impurity gettering
JP3823160B2 (en) * 1997-04-03 2006-09-20 野村マイクロ・サイエンス株式会社 Cleaning method inside semiconductor substrate
US6270727B1 (en) 1998-07-31 2001-08-07 Leco Corporation Analytical crucible
US6333264B1 (en) 1998-09-02 2001-12-25 Micron Technology, Inc. Semiconductor processing method using high pressure liquid media treatment
US20030026601A1 (en) * 2001-07-31 2003-02-06 The Arizona Board Of Regents On Behalf Of The University Of Arizona Vapor deposition and in-situ purification of organic molecules
US7125453B2 (en) * 2002-01-31 2006-10-24 General Electric Company High temperature high pressure capsule for processing materials in supercritical fluids
US7063741B2 (en) * 2002-03-27 2006-06-20 General Electric Company High pressure high temperature growth of crystalline group III metal nitrides
JP4276627B2 (en) 2005-01-12 2009-06-10 ソルボサーマル結晶成長技術研究組合 Pressure vessel for single crystal growth and method for producing the same
US7704324B2 (en) * 2005-01-25 2010-04-27 General Electric Company Apparatus for processing materials in supercritical fluids and methods thereof
US7942970B2 (en) 2005-12-20 2011-05-17 Momentive Performance Materials Inc. Apparatus for making crystalline composition

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3341355A (en) * 1962-10-19 1967-09-12 Fuller Merriam Company Process for impregnating porous bodies with a solid fusible substance

Also Published As

Publication number Publication date
CA935073A (en) 1973-10-09
GB1309108A (en) 1973-03-07
US3650823A (en) 1972-03-21
IL35037A (en) 1973-06-29
FR2062230A5 (en) 1971-06-25
NL7013967A (en) 1971-03-26
DE2046036A1 (en) 1971-04-01
NL140435B (en) 1973-12-17
BE756471A (en) 1971-03-01
IL35037A0 (en) 1970-10-30

Similar Documents

Publication Publication Date Title
AT337625B (en) METHOD AND DEVICE FOR TREATMENT OF WATER CONTAINING BIOCHEMICALLY OXYDABLE COMPONENTS
AT259403B (en) Method and device for the surface treatment of workpieces
AT351463B (en) METHOD AND DEVICE FOR TREATING WASTEWATER
AT356602B (en) METHOD AND DEVICE FOR TREATING WASTEWATER
CH527130A (en) Method and device for treating waste water
AT314566B (en) Method and device for treating and drying excrement
CH515071A (en) Method and apparatus for diffusion treatment of semiconductor wafers
CH527564A (en) Method and device for the production of wafer tubes
AT287038B (en) METHOD AND DEVICE FOR THERMAL TREATMENT OF RAILS
CH523972A (en) Method and device for polishing silicon surfaces
CH511574A (en) Method and device for the manufacture of tights
AT308012B (en) Process and device for wastewater treatment
AT267101B (en) Method and device for treating flat glass
AT262187B (en) Method and device for the production of sleeve-like wafer bodies (wafer tubes)
AT322319B (en) METHOD AND DEVICE FOR TREATMENT OF WORKPIECES
CH527018A (en) Method and device for electrical discharge machining of workpieces
AT259784B (en) Method and device for treating glass in sheet form
CH473220A (en) Method and device for the treatment of disperse systems
CH510492A (en) Process and device for fine machining of balls
AT301465B (en) Method and device for the continuous treatment of liquids
AT306656B (en) Method and device for the treatment of waste water
AT292942B (en) Method and device for treating objects
AT300542B (en) Method and device for the production of nonwovens
AT235655B (en) Method and device for surface treatment of objects in galvanic baths
CH541518A (en) Method and device for the treatment of circulated pool water

Legal Events

Date Code Title Description
PL Patent ceased