CH496191A - Ventil für Vakuumleitungen - Google Patents

Ventil für Vakuumleitungen

Info

Publication number
CH496191A
CH496191A CH1706169A CH1706169A CH496191A CH 496191 A CH496191 A CH 496191A CH 1706169 A CH1706169 A CH 1706169A CH 1706169 A CH1706169 A CH 1706169A CH 496191 A CH496191 A CH 496191A
Authority
CH
Switzerland
Prior art keywords
valve
vacuum lines
vacuum
lines
Prior art date
Application number
CH1706169A
Other languages
English (en)
Inventor
A Thebado Eugene
Original Assignee
A Thebado Eugene
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by A Thebado Eugene filed Critical A Thebado Eugene
Publication of CH496191A publication Critical patent/CH496191A/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F16K3/186—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams by means of cams of wedge from

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
CH1706169A 1968-11-18 1969-11-17 Ventil für Vakuumleitungen CH496191A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77670168A 1968-11-18 1968-11-18

Publications (1)

Publication Number Publication Date
CH496191A true CH496191A (de) 1970-09-15

Family

ID=25108141

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1706169A CH496191A (de) 1968-11-18 1969-11-17 Ventil für Vakuumleitungen

Country Status (6)

Country Link
US (1) US3554486A (de)
JP (1) JPS4815647B1 (de)
CH (1) CH496191A (de)
DE (1) DE1957309A1 (de)
FR (1) FR2024888A1 (de)
GB (1) GB1279265A (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3973753A (en) * 1974-03-18 1976-08-10 Varian Associates High vacuum gate valve
US4044993A (en) * 1974-03-18 1977-08-30 Varian Associates, Inc. High vacuum gate valve
CH636422A5 (de) * 1979-02-26 1983-05-31 Balzers Hochvakuum Hochvakuumventil.
US4649458A (en) * 1984-03-09 1987-03-10 Ogura Clutch Control circuits for electromagnetic coupling apparatus
GB2177743A (en) * 1985-07-17 1987-01-28 Hartley Simon Ltd A sluice gate
DE3720001A1 (de) * 1987-06-15 1989-01-05 Hubert Boesch Vakuumventil
US4785844A (en) * 1987-08-26 1988-11-22 C & S Valve Company Double-seal flexible gate valve
US4903937A (en) * 1987-09-24 1990-02-27 Varian Associates, Inc. Isolation valve for vacuum and non-vacuum application
US5269491A (en) * 1992-03-10 1993-12-14 Reynolds Calvin E High vacuum valve
CA2096282A1 (en) * 1992-05-18 1993-11-19 Jacques Gaboriault Closing system for controlling a flow with precision
DE4341816A1 (de) * 1993-12-08 1995-06-14 Vse Vakuumtechn Gmbh Ventilmechanik mit Zwangsführung
DE4446946C1 (de) * 1994-12-28 1996-09-12 Vat Holding Ag Schieberventil
US6056267A (en) * 1998-05-19 2000-05-02 Applied Materials, Inc. Isolation valve with extended seal life
JP2008116016A (ja) * 2006-11-07 2008-05-22 Horiba Ltd ゲートバルブ
DE102007059039A1 (de) * 2007-12-06 2009-06-18 Vat Holding Ag Vakuumventil
JP2011054928A (ja) * 2009-08-04 2011-03-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
CN102927334B (zh) * 2011-08-10 2014-08-27 中核苏阀科技实业股份有限公司 耐压真空调节阀
CA2850506A1 (en) * 2011-09-30 2013-04-04 Integrated Equipment, Inc. Expanding gate valve assembly
DE102013006123A1 (de) * 2012-04-19 2013-10-24 Vat Holding Ag Ventil
DE102017101629A1 (de) 2017-01-27 2018-08-02 Agilent Technologies, Inc. - A Delaware Corporation - Fluidventil mit goldhaltiger und/oder platinhaltiger Beschichtung
CN112268141A (zh) * 2020-10-23 2021-01-26 中国科学院上海高等研究院 用于真空封合之密封碟盘

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US586433A (en) * 1897-07-13 Valve
US813555A (en) * 1905-04-13 1906-02-27 Crane Co Spring-disk valve.
US820154A (en) * 1905-07-12 1906-05-08 Nathan P Towne Valve.
US1000617A (en) * 1911-03-13 1911-08-15 H J Brubaker Valve.
US1056860A (en) * 1912-02-03 1913-03-25 George S Walker Valve for hydrants.
US2013212A (en) * 1932-05-31 1935-09-03 Byron Jackson Co Orifice fitting
US2196798A (en) * 1936-06-15 1940-04-09 Horstmann Frederick Otto Tap or valve
US3108780A (en) * 1960-04-18 1963-10-29 Cons Vacuum Corp Valve for ultra-high vacuum apparatus
US3136220A (en) * 1961-04-12 1964-06-09 Gen Dynamics Corp Controlled high energy actuator
US3337178A (en) * 1964-11-04 1967-08-22 Gordon Mack Self-sealing slide gate valve

Also Published As

Publication number Publication date
DE1957309A1 (de) 1970-05-27
FR2024888A1 (de) 1970-09-04
US3554486A (en) 1971-01-12
JPS4815647B1 (de) 1973-05-16
GB1279265A (en) 1972-06-28

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Legal Events

Date Code Title Description
PL Patent ceased