CH494582A - Dispositif d'évaporation par lévitation sous ultravide - Google Patents

Dispositif d'évaporation par lévitation sous ultravide

Info

Publication number
CH494582A
CH494582A CH336669A CH336669A CH494582A CH 494582 A CH494582 A CH 494582A CH 336669 A CH336669 A CH 336669A CH 336669 A CH336669 A CH 336669A CH 494582 A CH494582 A CH 494582A
Authority
CH
Switzerland
Prior art keywords
ultra
evaporation device
vacuum levitation
levitation evaporation
vacuum
Prior art date
Application number
CH336669A
Other languages
English (en)
French (fr)
Inventor
Jean Van Audenhove
Joyeux Jean
Parengh Maurits
Original Assignee
Euratom
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Euratom filed Critical Euratom
Publication of CH494582A publication Critical patent/CH494582A/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/10—Vacuum distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/32—Arrangements for simultaneous levitation and heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Physical Vapour Deposition (AREA)
CH336669A 1968-04-05 1969-03-05 Dispositif d'évaporation par lévitation sous ultravide CH494582A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BE713308 1968-04-05

Publications (1)

Publication Number Publication Date
CH494582A true CH494582A (fr) 1970-08-15

Family

ID=3852706

Family Applications (1)

Application Number Title Priority Date Filing Date
CH336669A CH494582A (fr) 1968-04-05 1969-03-05 Dispositif d'évaporation par lévitation sous ultravide

Country Status (8)

Country Link
US (1) US3575133A (en(2012))
BE (1) BE713308A (en(2012))
CH (1) CH494582A (en(2012))
FR (1) FR2005635A1 (en(2012))
GB (1) GB1217443A (en(2012))
LU (1) LU58103A1 (en(2012))
NL (1) NL6905225A (en(2012))
SE (1) SE346338B (en(2012))

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2917841A1 (de) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg Verdampfer fuer vakuumaufdampfanlagen
EP0392067A1 (de) * 1989-04-14 1990-10-17 Vsesojuzny Nauchno-Issledovatelsky Proektno-Konstruktorsky I Tekhnologichesky Inst. Elektrotermicheskogo Oborudovania Vniieto Vakuuminduktionsofen
US5254173A (en) * 1992-01-31 1993-10-19 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Turntable mechanism
KR100461283B1 (ko) * 2000-12-30 2004-12-14 현대엘씨디주식회사 유기전기발광소자 제조장치용 유기물증발보트구조
NL1020059C2 (nl) * 2002-02-21 2003-08-25 Corus Technology B V Werkwijze en inrichting voor het bekleden van een substraat.
US9920418B1 (en) 2010-09-27 2018-03-20 James Stabile Physical vapor deposition apparatus having a tapered chamber
CN115928023B (zh) * 2022-12-26 2024-12-24 巨玻固能(苏州)薄膜材料有限公司 一种用于制备高纯金属薄膜的悬浮蒸发源及镀膜材料

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2584660A (en) * 1949-09-24 1952-02-05 Eastman Kodak Co Vacuum coating process and apparatus therefor
US2686864A (en) * 1951-01-17 1954-08-17 Westinghouse Electric Corp Magnetic levitation and heating of conductive materials
US3290567A (en) * 1960-09-23 1966-12-06 Technical Ind Inc Controlled deposition and growth of polycrystalline films in a vacuum
FR1273518A (fr) * 1960-10-28 1961-10-13 Ass Elect Ind Perfectionnements aux appareils de vaporisation sous vide
US3173283A (en) * 1960-12-27 1965-03-16 Vogtmann Hans Process and apparatus for loading extrusion presses
US3476170A (en) * 1967-05-15 1969-11-04 Traub Co The Casting method with laser beam melting of levitated mass

Also Published As

Publication number Publication date
DE1907542B2 (de) 1976-10-28
LU58103A1 (en(2012)) 1969-06-03
BE713308A (en(2012)) 1968-10-07
SE346338B (en(2012)) 1972-07-03
FR2005635A1 (en(2012)) 1969-12-12
US3575133A (en) 1971-04-13
DE1907542A1 (de) 1969-10-30
NL6905225A (en(2012)) 1969-10-07
GB1217443A (en) 1970-12-31

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Legal Events

Date Code Title Description
PL Patent ceased