CH489903A - Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen - Google Patents
Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten LadungsträgerstrahlenInfo
- Publication number
- CH489903A CH489903A CH869269A CH869269A CH489903A CH 489903 A CH489903 A CH 489903A CH 869269 A CH869269 A CH 869269A CH 869269 A CH869269 A CH 869269A CH 489903 A CH489903 A CH 489903A
- Authority
- CH
- Switzerland
- Prior art keywords
- charge carrier
- processing materials
- carrier beams
- magnetically focused
- focused charge
- Prior art date
Links
- 239000002800 charge carrier Substances 0.000 title 1
- 239000000463 material Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/02—Control circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE671765852A DE1765852C3 (de) | 1968-07-26 | 1968-07-26 | Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH489903A true CH489903A (de) | 1970-04-30 |
Family
ID=5698645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH869269A CH489903A (de) | 1968-07-26 | 1969-06-06 | Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3617686A (de) |
| BE (1) | BE736489A (de) |
| CH (1) | CH489903A (de) |
| DE (1) | DE1765852C3 (de) |
| FR (1) | FR2013844A1 (de) |
| GB (1) | GB1225072A (de) |
| NL (1) | NL6907443A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2102723A6 (de) * | 1970-06-22 | 1972-04-07 | Cit Alcatel |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3956635A (en) * | 1975-06-13 | 1976-05-11 | International Business Machines Corporation | Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns |
| JPS52151568A (en) * | 1976-06-11 | 1977-12-16 | Jeol Ltd | Electron beam exposure apparatus |
| DE2637371C2 (de) * | 1976-08-19 | 1985-08-14 | Messer Griesheim Gmbh, 6000 Frankfurt | Energiestrahl-Schweißverfahren |
| US4327273A (en) * | 1979-03-23 | 1982-04-27 | Hitachi, Ltd. | Method of treating a workpiece with electron beams and apparatus therefor |
| JPS5674382A (en) * | 1979-11-19 | 1981-06-19 | Hitachi Ltd | Electron beam welding device |
| US4820927A (en) * | 1985-06-28 | 1989-04-11 | Control Data Corporation | Electron beam source employing a photo-emitter cathode |
| JP2014107158A (ja) * | 2012-11-28 | 2014-06-09 | Canon Inc | 放射線発生装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3082316A (en) * | 1960-04-12 | 1963-03-19 | Air Reduction | Electron beam welding |
| US3134892A (en) * | 1960-08-06 | 1964-05-26 | United Aircraft Corp | Method and apparatus for the machining of material by means of a beam of charge carriers |
| NL294153A (de) * | 1962-06-25 | |||
| US3426174A (en) * | 1965-12-09 | 1969-02-04 | United Aircraft Corp | Electron reflection seam tracker |
| US3518400A (en) * | 1968-08-30 | 1970-06-30 | United Aircraft Corp | Method of welding with a high energy beam |
-
1968
- 1968-07-26 DE DE671765852A patent/DE1765852C3/de not_active Expired
-
1969
- 1969-05-14 NL NL6907443A patent/NL6907443A/xx unknown
- 1969-06-06 CH CH869269A patent/CH489903A/de not_active IP Right Cessation
- 1969-07-16 US US842244A patent/US3617686A/en not_active Expired - Lifetime
- 1969-07-18 GB GB36394/69A patent/GB1225072A/en not_active Expired
- 1969-07-24 FR FR6925670A patent/FR2013844A1/fr not_active Withdrawn
- 1969-07-24 BE BE736489D patent/BE736489A/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2102723A6 (de) * | 1970-06-22 | 1972-04-07 | Cit Alcatel |
Also Published As
| Publication number | Publication date |
|---|---|
| BE736489A (de) | 1969-12-31 |
| DE1765852C3 (de) | 1979-03-01 |
| NL6907443A (de) | 1970-01-29 |
| DE1765852A1 (de) | 1971-10-21 |
| GB1225072A (en) | 1971-03-17 |
| US3617686A (en) | 1971-11-02 |
| FR2013844A1 (de) | 1970-04-10 |
| DE1765852B2 (de) | 1974-09-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |