CH489903A - Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen - Google Patents

Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen

Info

Publication number
CH489903A
CH489903A CH869269A CH869269A CH489903A CH 489903 A CH489903 A CH 489903A CH 869269 A CH869269 A CH 869269A CH 869269 A CH869269 A CH 869269A CH 489903 A CH489903 A CH 489903A
Authority
CH
Switzerland
Prior art keywords
charge carrier
processing materials
carrier beams
magnetically focused
focused charge
Prior art date
Application number
CH869269A
Other languages
English (en)
Inventor
Dietrich Walter
Fritz Dieter
D Kluger Hans
Original Assignee
Leybold Heraeus Verwaltung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung filed Critical Leybold Heraeus Verwaltung
Publication of CH489903A publication Critical patent/CH489903A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/02—Control circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
CH869269A 1968-07-26 1969-06-06 Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen CH489903A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE671765852A DE1765852C3 (de) 1968-07-26 1968-07-26 Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen

Publications (1)

Publication Number Publication Date
CH489903A true CH489903A (de) 1970-04-30

Family

ID=5698645

Family Applications (1)

Application Number Title Priority Date Filing Date
CH869269A CH489903A (de) 1968-07-26 1969-06-06 Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen

Country Status (7)

Country Link
US (1) US3617686A (de)
BE (1) BE736489A (de)
CH (1) CH489903A (de)
DE (1) DE1765852C3 (de)
FR (1) FR2013844A1 (de)
GB (1) GB1225072A (de)
NL (1) NL6907443A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2102723A6 (de) * 1970-06-22 1972-04-07 Cit Alcatel

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956635A (en) * 1975-06-13 1976-05-11 International Business Machines Corporation Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
JPS52151568A (en) * 1976-06-11 1977-12-16 Jeol Ltd Electron beam exposure apparatus
DE2637371C2 (de) * 1976-08-19 1985-08-14 Messer Griesheim Gmbh, 6000 Frankfurt Energiestrahl-Schweißverfahren
US4327273A (en) * 1979-03-23 1982-04-27 Hitachi, Ltd. Method of treating a workpiece with electron beams and apparatus therefor
JPS5674382A (en) * 1979-11-19 1981-06-19 Hitachi Ltd Electron beam welding device
US4820927A (en) * 1985-06-28 1989-04-11 Control Data Corporation Electron beam source employing a photo-emitter cathode
JP2014107158A (ja) * 2012-11-28 2014-06-09 Canon Inc 放射線発生装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082316A (en) * 1960-04-12 1963-03-19 Air Reduction Electron beam welding
US3134892A (en) * 1960-08-06 1964-05-26 United Aircraft Corp Method and apparatus for the machining of material by means of a beam of charge carriers
NL129187C (de) * 1962-06-25
US3426174A (en) * 1965-12-09 1969-02-04 United Aircraft Corp Electron reflection seam tracker
US3518400A (en) * 1968-08-30 1970-06-30 United Aircraft Corp Method of welding with a high energy beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2102723A6 (de) * 1970-06-22 1972-04-07 Cit Alcatel

Also Published As

Publication number Publication date
DE1765852C3 (de) 1979-03-01
NL6907443A (de) 1970-01-29
DE1765852B2 (de) 1974-09-12
DE1765852A1 (de) 1971-10-21
US3617686A (en) 1971-11-02
GB1225072A (en) 1971-03-17
BE736489A (de) 1969-12-31
FR2013844A1 (de) 1970-04-10

Similar Documents

Publication Publication Date Title
DE1906488B2 (de) Vorrichtung zum verlagern von gegenstaenden
CH515180A (de) Automatische Vorrichtung zur Handhabung von Spulenkörpern
AT302806B (de) Vorrichtung zur Förderung von blattförmigen Werkstücken
CH527758A (de) Vorrichtung zum Transportieren von Fäden
CH448888A (de) Vorrichtung zur Änderung der Bewegungsrichtung von flachen Gegenständen
AT270230B (de) Vorrichtung zur Durchführung von Polykondensationsreaktionen
AT288294B (de) Vorrichtung zur Begasung von Flüssigkeiten
CH501546A (de) Vorrichtung zum Beladen von Paletten mit Gegenständen
CH504911A (de) Vorrichtung zur Durchführung von Explosionsverformungen
AT288816B (de) Vorrichtung zum Entfetten von Gegenständen
CH489903A (de) Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen
CH521173A (de) Vorrichtung zum Bestäuben von Gegenständen mit Pulver
AT266883B (de) Vorrichtung zum Kompostieren von Müll
AT295058B (de) Vorrichtung zur Begichtung von Schachtöfen
CH525471A (de) Vorrichtung zur Positionierung von Gegenständen
CH489335A (de) Vorrichtung zur Bearbeitung von Flächen
AT292758B (de) Vorrichtung zur Begichtung von Schachtöfen
AT302907B (de) Vorrichtung zur Bildung von Mehrfachpackungen
AT256706B (de) Vorrichtung zur Handhabung von Stückgut
CH462078A (de) Einrichtung zur magnetischen Verformung von Werkstücken
CH475601A (de) Vorrichtung zum Abtasten von Informationsträgern
AT302174B (de) Vorrichtung zur Förderung von Gegenständen
CH526135A (de) Vorrichtung zur Verarbeitung von bandförmigem fotografischem Material
CH456793A (de) Vorrichtung zur Beschleunigung von elektrisch geladenen Teilchen
CH499454A (de) Vorrichtung zur Aufnahme von Containern

Legal Events

Date Code Title Description
PL Patent ceased