FR2013844A1 - - Google Patents

Info

Publication number
FR2013844A1
FR2013844A1 FR6925670A FR6925670A FR2013844A1 FR 2013844 A1 FR2013844 A1 FR 2013844A1 FR 6925670 A FR6925670 A FR 6925670A FR 6925670 A FR6925670 A FR 6925670A FR 2013844 A1 FR2013844 A1 FR 2013844A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6925670A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2013844A1 publication Critical patent/FR2013844A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/02—Control circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
FR6925670A 1968-07-26 1969-07-24 Withdrawn FR2013844A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE671765852A DE1765852C3 (de) 1968-07-26 1968-07-26 Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen

Publications (1)

Publication Number Publication Date
FR2013844A1 true FR2013844A1 (fr) 1970-04-10

Family

ID=5698645

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6925670A Withdrawn FR2013844A1 (fr) 1968-07-26 1969-07-24

Country Status (7)

Country Link
US (1) US3617686A (fr)
BE (1) BE736489A (fr)
CH (1) CH489903A (fr)
DE (1) DE1765852C3 (fr)
FR (1) FR2013844A1 (fr)
GB (1) GB1225072A (fr)
NL (1) NL6907443A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2094452A5 (en) * 1970-06-22 1972-02-04 Cit Alcatel Electron gun - for high speed electron beam welding
US3956635A (en) * 1975-06-13 1976-05-11 International Business Machines Corporation Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
JPS52151568A (en) * 1976-06-11 1977-12-16 Jeol Ltd Electron beam exposure apparatus
DE2637371C2 (de) * 1976-08-19 1985-08-14 Messer Griesheim Gmbh, 6000 Frankfurt Energiestrahl-Schweißverfahren
US4327273A (en) * 1979-03-23 1982-04-27 Hitachi, Ltd. Method of treating a workpiece with electron beams and apparatus therefor
JPS5674382A (en) * 1979-11-19 1981-06-19 Hitachi Ltd Electron beam welding device
US4820927A (en) * 1985-06-28 1989-04-11 Control Data Corporation Electron beam source employing a photo-emitter cathode
JP2014107158A (ja) * 2012-11-28 2014-06-09 Canon Inc 放射線発生装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082316A (en) * 1960-04-12 1963-03-19 Air Reduction Electron beam welding
US3134892A (en) * 1960-08-06 1964-05-26 United Aircraft Corp Method and apparatus for the machining of material by means of a beam of charge carriers
NL294153A (fr) * 1962-06-25
US3426174A (en) * 1965-12-09 1969-02-04 United Aircraft Corp Electron reflection seam tracker
US3518400A (en) * 1968-08-30 1970-06-30 United Aircraft Corp Method of welding with a high energy beam

Also Published As

Publication number Publication date
DE1765852A1 (de) 1971-10-21
DE1765852B2 (de) 1974-09-12
GB1225072A (en) 1971-03-17
CH489903A (de) 1970-04-30
DE1765852C3 (de) 1979-03-01
US3617686A (en) 1971-11-02
NL6907443A (fr) 1970-01-29
BE736489A (fr) 1969-12-31

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Legal Events

Date Code Title Description
ST Notification of lapse