BE736489A - - Google Patents

Info

Publication number
BE736489A
BE736489A BE736489DA BE736489A BE 736489 A BE736489 A BE 736489A BE 736489D A BE736489D A BE 736489DA BE 736489 A BE736489 A BE 736489A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE736489A publication Critical patent/BE736489A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002Details
    • H01J37/3007Electron or ion-optical systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/02Control circuits therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/12Lenses electrostatic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • H01J37/145Combinations of electrostatic and magnetic lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
BE736489D 1968-07-26 1969-07-24 BE736489A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE671765852A DE1765852C3 (de) 1968-07-26 1968-07-26 Vorrichtung zur Bearbeitung von Werkstoffen mit magnetisch fokussierten Ladungsträgerstrahlen

Publications (1)

Publication Number Publication Date
BE736489A true BE736489A (de) 1969-12-31

Family

ID=5698645

Family Applications (1)

Application Number Title Priority Date Filing Date
BE736489D BE736489A (de) 1968-07-26 1969-07-24

Country Status (7)

Country Link
US (1) US3617686A (de)
BE (1) BE736489A (de)
CH (1) CH489903A (de)
DE (1) DE1765852C3 (de)
FR (1) FR2013844A1 (de)
GB (1) GB1225072A (de)
NL (1) NL6907443A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2094452A5 (en) * 1970-06-22 1972-02-04 Cit Alcatel Electron gun - for high speed electron beam welding
US3956635A (en) * 1975-06-13 1976-05-11 International Business Machines Corporation Combined multiple beam size and spiral scan method for electron beam writing of microcircuit patterns
JPS52151568A (en) * 1976-06-11 1977-12-16 Jeol Ltd Electron beam exposure apparatus
DE2637371C2 (de) * 1976-08-19 1985-08-14 Messer Griesheim Gmbh, 6000 Frankfurt Energiestrahl-Schweißverfahren
US4327273A (en) * 1979-03-23 1982-04-27 Hitachi, Ltd. Method of treating a workpiece with electron beams and apparatus therefor
JPS5674382A (en) * 1979-11-19 1981-06-19 Hitachi Ltd Electron beam welding device
US4820927A (en) * 1985-06-28 1989-04-11 Control Data Corporation Electron beam source employing a photo-emitter cathode
JP2014107158A (ja) * 2012-11-28 2014-06-09 Canon Inc 放射線発生装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3082316A (en) * 1960-04-12 1963-03-19 Air Reduction Electron beam welding
US3134892A (en) * 1960-08-06 1964-05-26 United Aircraft Corp Method and apparatus for the machining of material by means of a beam of charge carriers
NL294153A (de) * 1962-06-25
US3426174A (en) * 1965-12-09 1969-02-04 United Aircraft Corp Electron reflection seam tracker
US3518400A (en) * 1968-08-30 1970-06-30 United Aircraft Corp Method of welding with a high energy beam

Also Published As

Publication number Publication date
DE1765852C3 (de) 1979-03-01
CH489903A (de) 1970-04-30
NL6907443A (de) 1970-01-29
DE1765852A1 (de) 1971-10-21
GB1225072A (en) 1971-03-17
US3617686A (en) 1971-11-02
FR2013844A1 (de) 1970-04-10
DE1765852B2 (de) 1974-09-12

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