CH463233A - Einrichtung zur Überwachung eines physikalischen und/oder chemischen Prozesses - Google Patents
Einrichtung zur Überwachung eines physikalischen und/oder chemischen ProzessesInfo
- Publication number
- CH463233A CH463233A CH225567A CH225567A CH463233A CH 463233 A CH463233 A CH 463233A CH 225567 A CH225567 A CH 225567A CH 225567 A CH225567 A CH 225567A CH 463233 A CH463233 A CH 463233A
- Authority
- CH
- Switzerland
- Prior art keywords
- monitoring
- physical
- chemical process
- chemical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Mathematical Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB6920/66A GB1179413A (en) | 1966-02-17 | 1966-02-17 | Apparatus for Use in Vacuum Deposition of Thin Films |
Publications (1)
Publication Number | Publication Date |
---|---|
CH463233A true CH463233A (de) | 1968-09-30 |
Family
ID=9823271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH225567A CH463233A (de) | 1966-02-17 | 1967-02-16 | Einrichtung zur Überwachung eines physikalischen und/oder chemischen Prozesses |
Country Status (5)
Country | Link |
---|---|
CH (1) | CH463233A (fr) |
DE (1) | DE1623131B1 (fr) |
FR (1) | FR1511491A (fr) |
GB (1) | GB1179413A (fr) |
NL (1) | NL6702420A (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3569619D1 (en) * | 1984-02-09 | 1989-05-24 | Mitsubishi Electric Corp | Apparatus for executing maintenance work on the wall of vacuum vessel |
EP0152301B1 (fr) * | 1984-02-13 | 1989-04-19 | Mitsubishi Denki Kabushiki Kaisha | Appareil pour inspecter l'intérieur d'un réservoir sous vide |
DE3406645A1 (de) * | 1984-02-24 | 1985-08-29 | Leybold-Heraeus GmbH, 5000 Köln | Spektralfotometeranordnung |
GB0218998D0 (en) * | 2002-08-14 | 2002-09-25 | Oxford Instr Plasma Technology | Thin film deposition apparatus |
-
1966
- 1966-02-17 GB GB6920/66A patent/GB1179413A/en not_active Expired
-
1967
- 1967-02-16 FR FR95133A patent/FR1511491A/fr not_active Expired
- 1967-02-16 CH CH225567A patent/CH463233A/de unknown
- 1967-02-17 DE DE1967B0092153 patent/DE1623131B1/de active Pending
- 1967-02-17 NL NL6702420A patent/NL6702420A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
GB1179413A (en) | 1970-01-28 |
FR1511491A (fr) | 1968-01-26 |
NL6702420A (fr) | 1967-08-18 |
DE1623131B1 (de) | 1970-07-30 |
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