CH463233A - Einrichtung zur Überwachung eines physikalischen und/oder chemischen Prozesses - Google Patents

Einrichtung zur Überwachung eines physikalischen und/oder chemischen Prozesses

Info

Publication number
CH463233A
CH463233A CH225567A CH225567A CH463233A CH 463233 A CH463233 A CH 463233A CH 225567 A CH225567 A CH 225567A CH 225567 A CH225567 A CH 225567A CH 463233 A CH463233 A CH 463233A
Authority
CH
Switzerland
Prior art keywords
monitoring
physical
chemical process
chemical
Prior art date
Application number
CH225567A
Other languages
German (de)
English (en)
Inventor
Rupert Davy John
Bell Allan William
Mckillop Ballantine John
Morrison Runciman Herbert
Original Assignee
Barr & Stroud Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Barr & Stroud Ltd filed Critical Barr & Stroud Ltd
Publication of CH463233A publication Critical patent/CH463233A/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CH225567A 1966-02-17 1967-02-16 Einrichtung zur Überwachung eines physikalischen und/oder chemischen Prozesses CH463233A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6920/66A GB1179413A (en) 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films

Publications (1)

Publication Number Publication Date
CH463233A true CH463233A (de) 1968-09-30

Family

ID=9823271

Family Applications (1)

Application Number Title Priority Date Filing Date
CH225567A CH463233A (de) 1966-02-17 1967-02-16 Einrichtung zur Überwachung eines physikalischen und/oder chemischen Prozesses

Country Status (5)

Country Link
CH (1) CH463233A (fr)
DE (1) DE1623131B1 (fr)
FR (1) FR1511491A (fr)
GB (1) GB1179413A (fr)
NL (1) NL6702420A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3569619D1 (en) * 1984-02-09 1989-05-24 Mitsubishi Electric Corp Apparatus for executing maintenance work on the wall of vacuum vessel
EP0152301B1 (fr) * 1984-02-13 1989-04-19 Mitsubishi Denki Kabushiki Kaisha Appareil pour inspecter l'intérieur d'un réservoir sous vide
DE3406645A1 (de) * 1984-02-24 1985-08-29 Leybold-Heraeus GmbH, 5000 Köln Spektralfotometeranordnung
GB0218998D0 (en) * 2002-08-14 2002-09-25 Oxford Instr Plasma Technology Thin film deposition apparatus

Also Published As

Publication number Publication date
GB1179413A (en) 1970-01-28
FR1511491A (fr) 1968-01-26
NL6702420A (fr) 1967-08-18
DE1623131B1 (de) 1970-07-30

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