FR1511491A - Système optique pour le contrôle d'un traitement - Google Patents

Système optique pour le contrôle d'un traitement

Info

Publication number
FR1511491A
FR1511491A FR95133A FR95133A FR1511491A FR 1511491 A FR1511491 A FR 1511491A FR 95133 A FR95133 A FR 95133A FR 95133 A FR95133 A FR 95133A FR 1511491 A FR1511491 A FR 1511491A
Authority
FR
France
Prior art keywords
optical system
treatment control
treatment
control
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR95133A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales Optronics Ltd
Original Assignee
Thales Optronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Optronics Ltd filed Critical Thales Optronics Ltd
Application granted granted Critical
Publication of FR1511491A publication Critical patent/FR1511491A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4248—Feed-through connections for the hermetical passage of fibres through a package wall

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
FR95133A 1966-02-17 1967-02-16 Système optique pour le contrôle d'un traitement Expired FR1511491A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6920/66A GB1179413A (en) 1966-02-17 1966-02-17 Apparatus for Use in Vacuum Deposition of Thin Films

Publications (1)

Publication Number Publication Date
FR1511491A true FR1511491A (fr) 1968-01-26

Family

ID=9823271

Family Applications (1)

Application Number Title Priority Date Filing Date
FR95133A Expired FR1511491A (fr) 1966-02-17 1967-02-16 Système optique pour le contrôle d'un traitement

Country Status (5)

Country Link
CH (1) CH463233A (fr)
DE (1) DE1623131B1 (fr)
FR (1) FR1511491A (fr)
GB (1) GB1179413A (fr)
NL (1) NL6702420A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0152299B1 (fr) * 1984-02-09 1989-04-19 Mitsubishi Denki Kabushiki Kaisha Appareil pour effecter la maintenance sur la paroi d'un réservoir sous vide
EP0152301B1 (fr) * 1984-02-13 1989-04-19 Mitsubishi Denki Kabushiki Kaisha Appareil pour inspecter l'intérieur d'un réservoir sous vide
DE3406645A1 (de) * 1984-02-24 1985-08-29 Leybold-Heraeus GmbH, 5000 Köln Spektralfotometeranordnung
GB0218998D0 (en) * 2002-08-14 2002-09-25 Oxford Instr Plasma Technology Thin film deposition apparatus

Also Published As

Publication number Publication date
NL6702420A (fr) 1967-08-18
CH463233A (de) 1968-09-30
GB1179413A (en) 1970-01-28
DE1623131B1 (de) 1970-07-30

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