CH430666A - Vorrichtung zum pyrolytischen Abscheiden von Halbleitermaterial - Google Patents

Vorrichtung zum pyrolytischen Abscheiden von Halbleitermaterial

Info

Publication number
CH430666A
CH430666A CH1043463A CH1043463A CH430666A CH 430666 A CH430666 A CH 430666A CH 1043463 A CH1043463 A CH 1043463A CH 1043463 A CH1043463 A CH 1043463A CH 430666 A CH430666 A CH 430666A
Authority
CH
Switzerland
Prior art keywords
semiconductor material
pyrolytic deposition
pyrolytic
deposition
semiconductor
Prior art date
Application number
CH1043463A
Other languages
English (en)
Inventor
Wolfgang Dr Keller
Berger Guenther
Schmidt Otto
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH430666A publication Critical patent/CH430666A/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Silicon Compounds (AREA)
CH1043463A 1963-01-26 1963-08-23 Vorrichtung zum pyrolytischen Abscheiden von Halbleitermaterial CH430666A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0083437 1963-01-26

Publications (1)

Publication Number Publication Date
CH430666A true CH430666A (de) 1967-02-28

Family

ID=7511038

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1043463A CH430666A (de) 1963-01-26 1963-08-23 Vorrichtung zum pyrolytischen Abscheiden von Halbleitermaterial

Country Status (3)

Country Link
US (1) US3292574A (de)
CH (1) CH430666A (de)
GB (1) GB1040709A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5595319A (en) * 1979-01-12 1980-07-19 Wacker Chemitronic Pure semiconductor material* specially silicon precipitating device and method

Also Published As

Publication number Publication date
GB1040709A (en) 1966-09-01
US3292574A (en) 1966-12-20

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