CH419370A - Method and apparatus for working a workpiece by means of a charged particle beam - Google Patents
Method and apparatus for working a workpiece by means of a charged particle beamInfo
- Publication number
- CH419370A CH419370A CH362364A CH362364A CH419370A CH 419370 A CH419370 A CH 419370A CH 362364 A CH362364 A CH 362364A CH 362364 A CH362364 A CH 362364A CH 419370 A CH419370 A CH 419370A
- Authority
- CH
- Switzerland
- Prior art keywords
- workpiece
- working
- charged particle
- particle beam
- charged
- Prior art date
Links
- 239000002245 particle Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B17/00—Details of cameras or camera bodies; Accessories therefor
- G03B17/02—Bodies
- G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B7/00—Control of exposure by setting shutters, diaphragms or filters, separately or conjointly
- G03B7/08—Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device
- G03B7/099—Arrangement of photoelectric elements in or on the camera
- G03B7/0993—Arrangement of photoelectric elements in or on the camera in the camera
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- General Induction Heating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEZ10000A DE1225775B (en) | 1963-03-23 | 1963-03-23 | Method and device for processing a workpiece by means of a charge carrier beam |
Publications (1)
Publication Number | Publication Date |
---|---|
CH419370A true CH419370A (en) | 1966-08-31 |
Family
ID=7621153
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH362364A CH419370A (en) | 1963-03-23 | 1964-03-20 | Method and apparatus for working a workpiece by means of a charged particle beam |
Country Status (8)
Country | Link |
---|---|
US (1) | US3283120A (en) |
BE (1) | BE645421A (en) |
CH (1) | CH419370A (en) |
DE (1) | DE1225775B (en) |
FR (1) | FR1388356A (en) |
GB (1) | GB1044056A (en) |
NL (1) | NL6403042A (en) |
NO (1) | NO119619B (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1299498B (en) * | 1964-07-24 | 1969-07-17 | Steigerwald Strahltech | Device for monitoring the beam impact area in corpuscular beam processing devices |
DE1565073A1 (en) * | 1965-06-11 | 1970-01-22 | Siemens Ag | Welding process, especially for circumferential seams on the end caps of nuclear reactor fuel rod cladding tubes |
US3471703A (en) * | 1965-08-28 | 1969-10-07 | Ferranti Ltd | Photoelectric control means for the deflection of the electron beam in welding apparatus |
US3465119A (en) * | 1967-06-21 | 1969-09-02 | United Aircraft Corp | Multiaxis optical viewing system of a movable electron beam in a vacuum chamber |
US3535488A (en) * | 1967-07-13 | 1970-10-20 | Rohr Corp | Tracer beam method of proofing electron beam weld path |
AT299627B (en) * | 1968-01-20 | 1972-06-26 | Goetzewerke | Process for the production of piston rings |
US3761676A (en) * | 1971-05-20 | 1973-09-25 | Farland G Mc | Portable electron beam welding apparatus |
JPS529971B2 (en) * | 1973-07-02 | 1977-03-19 | ||
DE2555493A1 (en) * | 1974-12-19 | 1976-06-24 | Gen Electric | OPTO-ELECTRONIC DEVICE FOR DETERMINING THE SITUATION AND PROCEDURE |
JPS5330865A (en) * | 1976-09-03 | 1978-03-23 | Hitachi Ltd | Electron microscope provided with sample irradiating electron beam quantity measuring unit |
US4210806A (en) * | 1979-01-18 | 1980-07-01 | International Business Machines Corporation | High brightness electron probe beam and method |
JPS55165628A (en) * | 1979-06-12 | 1980-12-24 | Fujitsu Ltd | Apparatus for electron-beam irradiation |
US4633611A (en) * | 1984-12-31 | 1987-01-06 | Bakish Materials Corporation | Process and apparatus for disinfecting seeds |
US5185530A (en) * | 1990-11-05 | 1993-02-09 | Jeol Ltd. | Electron beam instrument |
US6745717B2 (en) * | 2000-06-22 | 2004-06-08 | Arizona Board Of Regents | Method and apparatus for preparing nitride semiconductor surfaces |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2304814A (en) * | 1941-03-20 | 1942-12-15 | Charles J Glasser | Optical testing device and method of testing |
US2472951A (en) * | 1946-09-10 | 1949-06-14 | Air Reduction | Method and apparatus for controlling torch spacing |
DE1100835B (en) * | 1952-03-01 | 1961-03-02 | Zeiss Carl Fa | Device for milling profiles, for cutting templates or for drilling nozzle channels by means of a charge carrier beam |
US2945132A (en) * | 1957-03-18 | 1960-07-12 | Zeiss Jena Veb Carl | Measuring apparatus having optical and photoelectric means |
US3037423A (en) * | 1957-12-30 | 1962-06-05 | Polaroid Corp | Automatic focusing system |
NL248568A (en) * | 1959-02-20 | |||
US3158733A (en) * | 1962-09-12 | 1964-11-24 | Nat Res Corp | Focus control for electron beam heating |
-
1963
- 1963-03-23 DE DEZ10000A patent/DE1225775B/en active Pending
-
1964
- 1964-03-18 GB GB11336/64A patent/GB1044056A/en not_active Expired
- 1964-03-19 BE BE645421D patent/BE645421A/xx unknown
- 1964-03-20 US US353324A patent/US3283120A/en not_active Expired - Lifetime
- 1964-03-20 CH CH362364A patent/CH419370A/en unknown
- 1964-03-20 NL NL6403042A patent/NL6403042A/xx unknown
- 1964-03-23 FR FR4667A patent/FR1388356A/en not_active Expired
- 1964-03-23 NO NO152561A patent/NO119619B/no unknown
Also Published As
Publication number | Publication date |
---|---|
DE1225775B (en) | 1966-09-29 |
GB1044056A (en) | 1966-09-28 |
US3283120A (en) | 1966-11-01 |
BE645421A (en) | 1964-07-16 |
FR1388356A (en) | 1965-02-05 |
NO119619B (en) | 1970-06-08 |
NL6403042A (en) | 1964-09-24 |
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