CH419370A - Method and apparatus for working a workpiece by means of a charged particle beam - Google Patents

Method and apparatus for working a workpiece by means of a charged particle beam

Info

Publication number
CH419370A
CH419370A CH362364A CH362364A CH419370A CH 419370 A CH419370 A CH 419370A CH 362364 A CH362364 A CH 362364A CH 362364 A CH362364 A CH 362364A CH 419370 A CH419370 A CH 419370A
Authority
CH
Switzerland
Prior art keywords
workpiece
working
charged particle
particle beam
charged
Prior art date
Application number
CH362364A
Other languages
French (fr)
Inventor
Spruck Helmut
Original Assignee
United Aircraft Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Aircraft Corp filed Critical United Aircraft Corp
Publication of CH419370A publication Critical patent/CH419370A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G03B17/02—Bodies
    • G03B17/12—Bodies with means for supporting objectives, supplementary lenses, filters, masks, or turrets
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B7/00—Control of exposure by setting shutters, diaphragms or filters, separately or conjointly
    • G03B7/08—Control effected solely on the basis of the response, to the intensity of the light received by the camera, of a built-in light-sensitive device
    • G03B7/099—Arrangement of photoelectric elements in or on the camera
    • G03B7/0993—Arrangement of photoelectric elements in or on the camera in the camera
CH362364A 1963-03-23 1964-03-20 Method and apparatus for working a workpiece by means of a charged particle beam CH419370A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEZ10000A DE1225775B (en) 1963-03-23 1963-03-23 Method and device for processing a workpiece by means of a charge carrier beam

Publications (1)

Publication Number Publication Date
CH419370A true CH419370A (en) 1966-08-31

Family

ID=7621153

Family Applications (1)

Application Number Title Priority Date Filing Date
CH362364A CH419370A (en) 1963-03-23 1964-03-20 Method and apparatus for working a workpiece by means of a charged particle beam

Country Status (8)

Country Link
US (1) US3283120A (en)
BE (1) BE645421A (en)
CH (1) CH419370A (en)
DE (1) DE1225775B (en)
FR (1) FR1388356A (en)
GB (1) GB1044056A (en)
NL (1) NL6403042A (en)
NO (1) NO119619B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (en) * 1964-07-24 1969-07-17 Steigerwald Strahltech Device for monitoring the beam impact area in corpuscular beam processing devices
DE1565073A1 (en) * 1965-06-11 1970-01-22 Siemens Ag Welding process, especially for circumferential seams on the end caps of nuclear reactor fuel rod cladding tubes
US3471703A (en) * 1965-08-28 1969-10-07 Ferranti Ltd Photoelectric control means for the deflection of the electron beam in welding apparatus
US3465119A (en) * 1967-06-21 1969-09-02 United Aircraft Corp Multiaxis optical viewing system of a movable electron beam in a vacuum chamber
US3535488A (en) * 1967-07-13 1970-10-20 Rohr Corp Tracer beam method of proofing electron beam weld path
AT299627B (en) * 1968-01-20 1972-06-26 Goetzewerke Process for the production of piston rings
US3761676A (en) * 1971-05-20 1973-09-25 Farland G Mc Portable electron beam welding apparatus
JPS529971B2 (en) * 1973-07-02 1977-03-19
DE2555493A1 (en) * 1974-12-19 1976-06-24 Gen Electric OPTO-ELECTRONIC DEVICE FOR DETERMINING THE SITUATION AND PROCEDURE
JPS5330865A (en) * 1976-09-03 1978-03-23 Hitachi Ltd Electron microscope provided with sample irradiating electron beam quantity measuring unit
US4210806A (en) * 1979-01-18 1980-07-01 International Business Machines Corporation High brightness electron probe beam and method
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
US4633611A (en) * 1984-12-31 1987-01-06 Bakish Materials Corporation Process and apparatus for disinfecting seeds
US5185530A (en) * 1990-11-05 1993-02-09 Jeol Ltd. Electron beam instrument
US6745717B2 (en) * 2000-06-22 2004-06-08 Arizona Board Of Regents Method and apparatus for preparing nitride semiconductor surfaces

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2304814A (en) * 1941-03-20 1942-12-15 Charles J Glasser Optical testing device and method of testing
US2472951A (en) * 1946-09-10 1949-06-14 Air Reduction Method and apparatus for controlling torch spacing
DE1100835B (en) * 1952-03-01 1961-03-02 Zeiss Carl Fa Device for milling profiles, for cutting templates or for drilling nozzle channels by means of a charge carrier beam
US2945132A (en) * 1957-03-18 1960-07-12 Zeiss Jena Veb Carl Measuring apparatus having optical and photoelectric means
US3037423A (en) * 1957-12-30 1962-06-05 Polaroid Corp Automatic focusing system
NL248568A (en) * 1959-02-20
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating

Also Published As

Publication number Publication date
BE645421A (en) 1964-07-16
GB1044056A (en) 1966-09-28
US3283120A (en) 1966-11-01
NO119619B (en) 1970-06-08
DE1225775B (en) 1966-09-29
FR1388356A (en) 1965-02-05
NL6403042A (en) 1964-09-24

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