JPS529971B2 - - Google Patents

Info

Publication number
JPS529971B2
JPS529971B2 JP48073699A JP7369973A JPS529971B2 JP S529971 B2 JPS529971 B2 JP S529971B2 JP 48073699 A JP48073699 A JP 48073699A JP 7369973 A JP7369973 A JP 7369973A JP S529971 B2 JPS529971 B2 JP S529971B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48073699A
Other languages
Japanese (ja)
Other versions
JPS5023767A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48073699A priority Critical patent/JPS529971B2/ja
Priority to US484339A priority patent/US3895254A/en
Publication of JPS5023767A publication Critical patent/JPS5023767A/ja
Publication of JPS529971B2 publication Critical patent/JPS529971B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
JP48073699A 1973-07-02 1973-07-02 Expired JPS529971B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP48073699A JPS529971B2 (en) 1973-07-02 1973-07-02
US484339A US3895254A (en) 1973-07-02 1974-06-28 Charged particle accelerator with integral transformer and shielding means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48073699A JPS529971B2 (en) 1973-07-02 1973-07-02

Publications (2)

Publication Number Publication Date
JPS5023767A JPS5023767A (en) 1975-03-14
JPS529971B2 true JPS529971B2 (en) 1977-03-19

Family

ID=13525708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48073699A Expired JPS529971B2 (en) 1973-07-02 1973-07-02

Country Status (2)

Country Link
US (1) US3895254A (en)
JP (1) JPS529971B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1454985A (en) * 1975-07-17 1976-11-10 Inst Yadernoi Fiziki Sibirskog Charged particle accelerators
JPS5268918A (en) * 1975-12-05 1977-06-08 Hitachi Ltd Insulated transformer
DE3333686A1 (en) * 1983-09-17 1985-04-04 Leybold-Heraeus GmbH, 5000 Köln ELECTRON BEAM CANNON FOR HEATING MATERIALS, ESPECIALLY FOR WELDING
DE3930200A1 (en) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh ELECTRIC BEAM GENERATOR, ESPECIALLY FOR AN ELECTRON BEAM CANNON
DE69125229T2 (en) * 1990-08-10 1997-08-28 Koninkl Philips Electronics Nv Charge particle beam arrangement
US8946657B2 (en) * 2009-04-14 2015-02-03 Siemens Aktiengesellschaft Beam head
JP5959326B2 (en) * 2012-06-11 2016-08-02 株式会社日立ハイテクノロジーズ Charged particle beam generator, charged particle beam device, high voltage generator, and high potential device
CN109275255B (en) * 2018-10-29 2024-04-26 同方威视技术股份有限公司 Filament power supply for electron accelerator and electron accelerator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1815131A (en) * 1921-10-14 1931-07-21 Rca Corp Means for heating filaments
US3119931A (en) * 1960-06-28 1964-01-28 Philips Corp Circuit means for coupling an x-ray device to a control supply apparatus
DE1225775B (en) * 1963-03-23 1966-09-29 United Aircraft Corp Method and device for processing a workpiece by means of a charge carrier beam
DE1290761B (en) * 1963-11-22 1969-03-13 Daimler Benz Ag Piston recess for pistons of rotary piston internal combustion engines with slip engagement
JPS5247660B2 (en) * 1971-11-17 1977-12-03

Also Published As

Publication number Publication date
JPS5023767A (en) 1975-03-14
US3895254A (en) 1975-07-15

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