CH397875A - Process for manufacturing a single crystal semiconductor body, apparatus for carrying out said process and product resulting from said process - Google Patents

Process for manufacturing a single crystal semiconductor body, apparatus for carrying out said process and product resulting from said process

Info

Publication number
CH397875A
CH397875A CH1389561A CH1389561A CH397875A CH 397875 A CH397875 A CH 397875A CH 1389561 A CH1389561 A CH 1389561A CH 1389561 A CH1389561 A CH 1389561A CH 397875 A CH397875 A CH 397875A
Authority
CH
Switzerland
Prior art keywords
carrying
manufacturing
single crystal
semiconductor body
crystal semiconductor
Prior art date
Application number
CH1389561A
Other languages
French (fr)
Inventor
Christopher Schaarschmi Edward
Original Assignee
Merck & Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Merck & Co Inc filed Critical Merck & Co Inc
Publication of CH397875A publication Critical patent/CH397875A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02373—Group 14 semiconducting materials
    • H01L21/02381—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/02433—Crystal orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type
    • H01L21/02576—N-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
CH1389561A 1960-11-29 1961-11-29 Process for manufacturing a single crystal semiconductor body, apparatus for carrying out said process and product resulting from said process CH397875A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7234460A 1960-11-29 1960-11-29

Publications (1)

Publication Number Publication Date
CH397875A true CH397875A (en) 1965-08-31

Family

ID=22106995

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1389561A CH397875A (en) 1960-11-29 1961-11-29 Process for manufacturing a single crystal semiconductor body, apparatus for carrying out said process and product resulting from said process

Country Status (7)

Country Link
AT (1) AT243317B (en)
BE (1) BE610469A (en)
CH (1) CH397875A (en)
DE (1) DE1419716B2 (en)
ES (1) ES272455A1 (en)
GB (1) GB990119A (en)
SE (1) SE305201B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772097B2 (en) 2007-11-05 2010-08-10 Asm America, Inc. Methods of selectively depositing silicon-containing films
CN112626615A (en) * 2020-12-09 2021-04-09 黄梦蕾 Silicon epitaxial growth diffusion auxiliary equipment for semiconductor discrete device

Also Published As

Publication number Publication date
ES272455A1 (en) 1962-03-01
DE1419716A1 (en) 1968-10-10
AT243317B (en) 1965-11-10
DE1419716B2 (en) 1971-12-16
GB990119A (en) 1965-04-28
SE305201B (en) 1968-10-21
BE610469A (en) 1962-05-17

Similar Documents

Publication Publication Date Title
CH486273A (en) Process for forming uniform droplets of a determined diameter, apparatus for carrying out this process and application of this process to the manufacture of a granulated product
CH350236A (en) Method of manufacturing a tow, apparatus for carrying out the method, tow obtained by this method and use of this tow
CH299872A (en) Process for manufacturing a capsule and apparatus for implementing this process.
CH386338A (en) Process for the preparation of a dehydrated product and apparatus for its implementation
CH490935A (en) Abrasive product, process for its manufacture and use of the product
CH400766A (en) Photographic process and photographic product for the implementation of this process
FR1159508A (en) Olefin polymerization process and apparatus for carrying out this process
CH397875A (en) Process for manufacturing a single crystal semiconductor body, apparatus for carrying out said process and product resulting from said process
BE604428A (en) Process for the continuous manufacture of a powdered extract from plant materials, device for carrying out the process and application of the process
CH350259A (en) Process for spraying liquid and apparatus for carrying out this process
CH292861A (en) Process for the production of uranium and apparatus for carrying out this process.
FR1243184A (en) Process for manufacturing pneumatic envelopes and apparatus for carrying out this process
FR1137161A (en) Process for preparing hydrogen peroxide and devices for its implementation
FR1276256A (en) Process for handling flat objects manufactured continuously, more particularly the production of a rotary machine, and device for carrying out said process
FR1319860A (en) Process for the production of acetylene
CH411670A (en) Process for preparing a refractory product, device for carrying out the process and refractory product resulting from the process
FR1307179A (en) Molding process and apparatus for carrying out this process
BE580762A (en) A process for the production of azathiacyclohexane dioxide-4-4.
FR1329122A (en) Process for the production of liquid oligomers of dienes-1-3
FR1293324A (en) Process for the continuous manufacture of a powdered extract from plant materials, device for carrying out the process and application of the process
BE587010A (en) Process for the manufacture and bringing into contact of a semiconductor body and the product obtained.
CH412339A (en) Ethylene polymerization process and apparatus for carrying out this process
FR1260814A (en) Process for manufacturing frustoconical tubes, device for carrying out the process and industrial products obtained
CH356445A (en) Process for the preparation of normally gaseous olefin dihalides and apparatus for carrying out said process
FR1220829A (en) Process for the continuous production of acetylene and apparatus for carrying out this process