CA982234A - Electron current regulator for an electron discharge device - Google Patents

Electron current regulator for an electron discharge device

Info

Publication number
CA982234A
CA982234A CA174,374A CA174374A CA982234A CA 982234 A CA982234 A CA 982234A CA 174374 A CA174374 A CA 174374A CA 982234 A CA982234 A CA 982234A
Authority
CA
Canada
Prior art keywords
electron
discharge device
current regulator
electron discharge
electron current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA174,374A
Other languages
English (en)
Other versions
CA174374S (en
Inventor
Ollie C. Woodard
Alan V. Hall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA982234A publication Critical patent/CA982234A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Electron Beam Exposure (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Electron Sources, Ion Sources (AREA)
CA174,374A 1972-07-03 1973-06-19 Electron current regulator for an electron discharge device Expired CA982234A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US26828472A 1972-07-03 1972-07-03

Publications (1)

Publication Number Publication Date
CA982234A true CA982234A (en) 1976-01-20

Family

ID=23022270

Family Applications (1)

Application Number Title Priority Date Filing Date
CA174,374A Expired CA982234A (en) 1972-07-03 1973-06-19 Electron current regulator for an electron discharge device

Country Status (5)

Country Link
JP (1) JPS4959526A (de)
CA (1) CA982234A (de)
DE (1) DE2332604A1 (de)
FR (1) FR2191258B1 (de)
IT (1) IT988681B (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0077417B1 (de) * 1981-10-21 1987-01-07 DR.-ING. RUDOLF HELL GmbH Hochkonstanter Strahlerzeuger für geladene Teilchen
US7538477B2 (en) * 2006-11-27 2009-05-26 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Multi-layer transducers with annular contacts
US10129656B2 (en) 2009-01-30 2018-11-13 Avago Technologies International Sales Pte. Limited Active temperature control of piezoelectric membrane-based micro-electromechanical devices

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE221138C (de) * 1971-04-30

Also Published As

Publication number Publication date
JPS4959526A (de) 1974-06-10
DE2332604A1 (de) 1974-01-24
FR2191258A1 (de) 1974-02-01
IT988681B (it) 1975-04-30
FR2191258B1 (de) 1976-05-28

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