CA976668A - Film deposited semiconductor devices - Google Patents

Film deposited semiconductor devices

Info

Publication number
CA976668A
CA976668A CA171,440A CA171440A CA976668A CA 976668 A CA976668 A CA 976668A CA 171440 A CA171440 A CA 171440A CA 976668 A CA976668 A CA 976668A
Authority
CA
Canada
Prior art keywords
semiconductor devices
film deposited
deposited semiconductor
film
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA171,440A
Other languages
English (en)
Other versions
CA171440S (en
Inventor
Ronald G. Neale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Conversion Devices Inc
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Application granted granted Critical
Publication of CA976668A publication Critical patent/CA976668A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011Manufacture or treatment of multistable switching devices
    • H10N70/021Formation of switching materials, e.g. deposition of layers
    • H10N70/026Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011Manufacture or treatment of multistable switching devices
    • H10N70/061Shaping switching materials
    • H10N70/063Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20Multistable switching devices, e.g. memristors
    • H10N70/231Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/821Device geometry
    • H10N70/826Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/017Clean surfaces
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/158Sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Memories (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Static Random-Access Memory (AREA)
CA171,440A 1972-06-21 1973-05-15 Film deposited semiconductor devices Expired CA976668A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00264937A US3816197A (en) 1969-10-17 1972-06-21 Film deposited semiconductor devices

Publications (1)

Publication Number Publication Date
CA976668A true CA976668A (en) 1975-10-21

Family

ID=23008278

Family Applications (1)

Application Number Title Priority Date Filing Date
CA171,440A Expired CA976668A (en) 1972-06-21 1973-05-15 Film deposited semiconductor devices

Country Status (11)

Country Link
US (1) US3816197A (forum.php)
JP (1) JPS4964384A (forum.php)
AU (1) AU5680173A (forum.php)
BE (1) BE800712A (forum.php)
CA (1) CA976668A (forum.php)
DD (1) DD104875A5 (forum.php)
DE (1) DE2326005A1 (forum.php)
FR (1) FR2189872B3 (forum.php)
IL (1) IL42260A0 (forum.php)
IT (1) IT988915B (forum.php)
NL (1) NL7307471A (forum.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949948A (en) * 1988-02-25 1990-08-21 Man Roland Druckmaschinen Ag Addressing system for products located in or on a plurality of storage holders particularly folded printed products

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956042A (en) * 1974-11-07 1976-05-11 Xerox Corporation Selective etchants for thin film devices
US4833100A (en) * 1985-12-12 1989-05-23 Kozo Iizuka, Director-General Of Agency Of Industrial Science And Technology Method for producing a silicon thin film by MBE using silicon beam precleaning

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326729A (en) * 1963-08-20 1967-06-20 Hughes Aircraft Co Epitaxial method for the production of microcircuit components
US3271591A (en) * 1963-09-20 1966-09-06 Energy Conversion Devices Inc Symmetrical current controlling device
US3597297A (en) * 1968-06-25 1971-08-03 Minnesota Mining & Mfg Synthetic turf material and method of making same
JPS5522945A (en) * 1978-08-09 1980-02-19 Hitachi Ltd Ink jet recording device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4949948A (en) * 1988-02-25 1990-08-21 Man Roland Druckmaschinen Ag Addressing system for products located in or on a plurality of storage holders particularly folded printed products

Also Published As

Publication number Publication date
FR2189872A1 (forum.php) 1974-01-25
JPS4964384A (forum.php) 1974-06-21
DE2326005A1 (de) 1974-01-17
FR2189872B3 (forum.php) 1976-06-11
NL7307471A (forum.php) 1973-12-27
DD104875A5 (forum.php) 1974-03-20
AU5680173A (en) 1974-12-12
IT988915B (it) 1975-04-30
BE800712A (fr) 1973-10-01
US3816197A (en) 1974-06-11
IL42260A0 (en) 1973-07-30

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