IL42260A0 - The manufacture of semiconductor devices by film deposition - Google Patents

The manufacture of semiconductor devices by film deposition

Info

Publication number
IL42260A0
IL42260A0 IL42260A IL4226073A IL42260A0 IL 42260 A0 IL42260 A0 IL 42260A0 IL 42260 A IL42260 A IL 42260A IL 4226073 A IL4226073 A IL 4226073A IL 42260 A0 IL42260 A0 IL 42260A0
Authority
IL
Israel
Prior art keywords
manufacture
semiconductor devices
film deposition
deposition
film
Prior art date
Application number
IL42260A
Other languages
English (en)
Original Assignee
Energy Conversion Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Conversion Devices Inc filed Critical Energy Conversion Devices Inc
Publication of IL42260A0 publication Critical patent/IL42260A0/xx

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011Manufacture or treatment of multistable switching devices
    • H10N70/021Formation of switching materials, e.g. deposition of layers
    • H10N70/026Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/011Manufacture or treatment of multistable switching devices
    • H10N70/061Shaping switching materials
    • H10N70/063Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20Multistable switching devices, e.g. memristors
    • H10N70/231Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801Constructional details of multistable switching devices
    • H10N70/821Device geometry
    • H10N70/826Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/017Clean surfaces
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/158Sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
  • Static Random-Access Memory (AREA)
IL42260A 1972-06-21 1973-05-14 The manufacture of semiconductor devices by film deposition IL42260A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00264937A US3816197A (en) 1969-10-17 1972-06-21 Film deposited semiconductor devices

Publications (1)

Publication Number Publication Date
IL42260A0 true IL42260A0 (en) 1973-07-30

Family

ID=23008278

Family Applications (1)

Application Number Title Priority Date Filing Date
IL42260A IL42260A0 (en) 1972-06-21 1973-05-14 The manufacture of semiconductor devices by film deposition

Country Status (11)

Country Link
US (1) US3816197A (xx)
JP (1) JPS4964384A (xx)
AU (1) AU5680173A (xx)
BE (1) BE800712A (xx)
CA (1) CA976668A (xx)
DD (1) DD104875A5 (xx)
DE (1) DE2326005A1 (xx)
FR (1) FR2189872B3 (xx)
IL (1) IL42260A0 (xx)
IT (1) IT988915B (xx)
NL (1) NL7307471A (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956042A (en) * 1974-11-07 1976-05-11 Xerox Corporation Selective etchants for thin film devices
US4833100A (en) * 1985-12-12 1989-05-23 Kozo Iizuka, Director-General Of Agency Of Industrial Science And Technology Method for producing a silicon thin film by MBE using silicon beam precleaning
DE3805877A1 (de) * 1988-02-25 1989-08-31 Roland Man Druckmasch Adressiervorrichtung fuer produkte, insbesondere fuer falzprodukte

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3326729A (en) * 1963-08-20 1967-06-20 Hughes Aircraft Co Epitaxial method for the production of microcircuit components
US3271591A (en) * 1963-09-20 1966-09-06 Energy Conversion Devices Inc Symmetrical current controlling device
US3597297A (en) * 1968-06-25 1971-08-03 Minnesota Mining & Mfg Synthetic turf material and method of making same
JPS5522945A (en) * 1978-08-09 1980-02-19 Hitachi Ltd Ink jet recording device

Also Published As

Publication number Publication date
CA976668A (en) 1975-10-21
JPS4964384A (xx) 1974-06-21
AU5680173A (en) 1974-12-12
NL7307471A (xx) 1973-12-27
US3816197A (en) 1974-06-11
IT988915B (it) 1975-04-30
DE2326005A1 (de) 1974-01-17
BE800712A (fr) 1973-10-01
DD104875A5 (xx) 1974-03-20
FR2189872B3 (xx) 1976-06-11
FR2189872A1 (xx) 1974-01-25

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