CA961926A - Impedance comparing circuit with ground referenced readout and stray capacitance insensitivity - Google Patents

Impedance comparing circuit with ground referenced readout and stray capacitance insensitivity

Info

Publication number
CA961926A
CA961926A CA156,836A CA156836A CA961926A CA 961926 A CA961926 A CA 961926A CA 156836 A CA156836 A CA 156836A CA 961926 A CA961926 A CA 961926A
Authority
CA
Canada
Prior art keywords
insensitivity
readout
stray capacitance
comparing circuit
ground referenced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA156,836A
Other languages
English (en)
Other versions
CA156836S (en
Inventor
Robert C. Abbe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE Corp
Original Assignee
ADE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADE Corp filed Critical ADE Corp
Application granted granted Critical
Publication of CA961926A publication Critical patent/CA961926A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CA156,836A 1971-12-09 1972-11-17 Impedance comparing circuit with ground referenced readout and stray capacitance insensitivity Expired CA961926A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20635771A 1971-12-09 1971-12-09

Publications (1)

Publication Number Publication Date
CA961926A true CA961926A (en) 1975-01-28

Family

ID=22766008

Family Applications (1)

Application Number Title Priority Date Filing Date
CA156,836A Expired CA961926A (en) 1971-12-09 1972-11-17 Impedance comparing circuit with ground referenced readout and stray capacitance insensitivity

Country Status (7)

Country Link
US (1) US3775678A (ja)
JP (2) JPS4866469A (ja)
CA (1) CA961926A (ja)
DE (1) DE2258690C3 (ja)
FR (1) FR2162631B1 (ja)
GB (1) GB1395208A (ja)
IT (1) IT973955B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3986109A (en) * 1975-01-29 1976-10-12 Ade Corporation Self-calibrating dimension gauge
US4502147A (en) * 1982-08-09 1985-02-26 Charles Lescrenier Means for visually indicating an X-ray field
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4931962A (en) * 1988-05-13 1990-06-05 Ade Corporation Fixture and nonrepeatable error compensation system
US4958129A (en) * 1989-03-07 1990-09-18 Ade Corporation Prealigner probe
US4918376A (en) * 1989-03-07 1990-04-17 Ade Corporation A.C. capacitive gauging system
US5102280A (en) * 1989-03-07 1992-04-07 Ade Corporation Robot prealigner
US5099386A (en) * 1990-09-20 1992-03-24 General Scanning, Inc. Variable-capacitance position transducing
US5537109A (en) * 1993-05-28 1996-07-16 General Scanning, Inc. Capacitive transducing with feedback
US5376890A (en) * 1993-06-10 1994-12-27 Memc Electronic Materials, Inc. Capacitive distance measuring apparatus having liquid ground contact

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3012192A (en) * 1961-12-05 Electric system
US3111845A (en) * 1958-10-15 1963-11-26 Simmonds Precision Products Pick-off transformer for measuring dielectric material
US3424977A (en) * 1966-05-04 1969-01-28 Human Resources Foundation Capacitive device responsive to water vapor content of a gas including insulated conductive wire electrodes forming a grid
US3497801A (en) * 1967-02-23 1970-02-24 Schwien Eng Inc System for determining the difference in capacitance of two capacitors
US3577072A (en) * 1968-11-19 1971-05-04 Hewlett Packard Co Bridge circuit for differentially measuring capacitance
US3639832A (en) * 1969-12-11 1972-02-01 Ema Dorries Gmbh Electrical bridge apparatus for and method of measuring mechanical forces by magnetoelastic members
US3688190A (en) * 1970-09-25 1972-08-29 Beckman Instruments Inc Differential capacitance circuitry for differential pressure measuring instruments

Also Published As

Publication number Publication date
US3775678A (en) 1973-11-27
FR2162631A1 (ja) 1973-07-20
FR2162631B1 (ja) 1980-04-18
DE2258690C3 (de) 1975-09-04
DE2258690A1 (de) 1973-06-14
JPS4866469A (ja) 1973-09-12
JPS5457068U (ja) 1979-04-20
DE2258690B2 (de) 1975-01-16
GB1395208A (en) 1975-05-21
IT973955B (it) 1974-06-10

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