CA959975A - Semiconductor mechanical-electrical transducer and method of making - Google Patents
Semiconductor mechanical-electrical transducer and method of makingInfo
- Publication number
- CA959975A CA959975A CA166,425A CA166425A CA959975A CA 959975 A CA959975 A CA 959975A CA 166425 A CA166425 A CA 166425A CA 959975 A CA959975 A CA 959975A
- Authority
- CA
- Canada
- Prior art keywords
- making
- electrical transducer
- semiconductor mechanical
- semiconductor
- mechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
- H10D48/50—Devices controlled by mechanical forces, e.g. pressure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/117—Shapes of semiconductor bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/82—Heterojunctions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2878872A JPS5317031B2 (enrdf_load_stackoverflow) | 1972-03-21 | 1972-03-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA959975A true CA959975A (en) | 1974-12-24 |
Family
ID=12258155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA166,425A Expired CA959975A (en) | 1972-03-21 | 1973-03-19 | Semiconductor mechanical-electrical transducer and method of making |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5317031B2 (enrdf_load_stackoverflow) |
CA (1) | CA959975A (enrdf_load_stackoverflow) |
DE (1) | DE2313604C3 (enrdf_load_stackoverflow) |
FR (1) | FR2180687B1 (enrdf_load_stackoverflow) |
GB (1) | GB1418519A (enrdf_load_stackoverflow) |
IT (1) | IT981527B (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021113742A1 (en) * | 2019-12-05 | 2021-06-10 | Carbon Nanotube Technologies, Llc | Single-walled carbon nanotube films and method and apparatus for fabricating thereof |
-
1972
- 1972-03-21 JP JP2878872A patent/JPS5317031B2/ja not_active Expired
-
1973
- 1973-03-19 CA CA166,425A patent/CA959975A/en not_active Expired
- 1973-03-19 DE DE2313604A patent/DE2313604C3/de not_active Expired
- 1973-03-21 FR FR7310201A patent/FR2180687B1/fr not_active Expired
- 1973-03-21 GB GB1359073A patent/GB1418519A/en not_active Expired
- 1973-03-21 IT IT21904/73A patent/IT981527B/it active
Also Published As
Publication number | Publication date |
---|---|
FR2180687B1 (enrdf_load_stackoverflow) | 1977-07-29 |
DE2313604B2 (enrdf_load_stackoverflow) | 1979-01-04 |
GB1418519A (en) | 1975-12-24 |
DE2313604C3 (de) | 1979-09-06 |
FR2180687A1 (enrdf_load_stackoverflow) | 1973-11-30 |
JPS5317031B2 (enrdf_load_stackoverflow) | 1978-06-05 |
JPS4896088A (enrdf_load_stackoverflow) | 1973-12-08 |
IT981527B (it) | 1974-10-10 |
DE2313604A1 (de) | 1973-12-06 |
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