CA942435A - Charged particle energy analysis - Google Patents

Charged particle energy analysis

Info

Publication number
CA942435A
CA942435A CA128,998A CA128998A CA942435A CA 942435 A CA942435 A CA 942435A CA 128998 A CA128998 A CA 128998A CA 942435 A CA942435 A CA 942435A
Authority
CA
Canada
Prior art keywords
charged particle
energy analysis
particle energy
analysis
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA128,998A
Other languages
English (en)
Other versions
CA128998S (en
Inventor
Jerald D. Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Application granted granted Critical
Publication of CA942435A publication Critical patent/CA942435A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
CA128,998A 1970-12-18 1971-11-30 Charged particle energy analysis Expired CA942435A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9947570A 1970-12-18 1970-12-18
US16857571A 1971-08-03 1971-08-03

Publications (1)

Publication Number Publication Date
CA942435A true CA942435A (en) 1974-02-19

Family

ID=26796151

Family Applications (1)

Application Number Title Priority Date Filing Date
CA128,998A Expired CA942435A (en) 1970-12-18 1971-11-30 Charged particle energy analysis

Country Status (6)

Country Link
JP (1) JPS512396B1 (ja)
CA (1) CA942435A (ja)
DE (1) DE2162808C3 (ja)
GB (1) GB1370360A (ja)
NL (1) NL173799C (ja)
SE (1) SE367279B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5335691U (ja) * 1976-09-02 1978-03-29
JPS55129083A (en) * 1979-03-27 1980-10-06 Kasai Kk Playing tool for child
DE3138927A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Abbildendes spektrometer fuer die elektronenstrahl-messtechnik und elektronenstrahl-messgeraet
DE3206309A1 (de) * 1982-02-22 1983-09-15 Siemens AG, 1000 Berlin und 8000 München Sekundaerelektronen-spektrometer und verfahren zu seinem betrieb
EP1605492B1 (en) 2004-06-11 2015-11-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device with retarding field analyzer
CN112799120B (zh) * 2019-11-13 2024-03-22 中国科学院国家空间科学中心 一种离子和电子同步测量的双通道静电分析器

Also Published As

Publication number Publication date
NL173799B (nl) 1983-10-03
JPS512396B1 (ja) 1976-01-26
DE2162808A1 (de) 1972-07-06
NL7117400A (ja) 1972-06-20
GB1370360A (en) 1974-10-16
SE367279B (ja) 1974-05-20
DE2162808B2 (de) 1977-12-29
NL173799C (nl) 1984-03-01
DE2162808C3 (de) 1978-09-07

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