CA925353A - Plasticizer additive to photoresist for the reduction of pin holes - Google Patents

Plasticizer additive to photoresist for the reduction of pin holes

Info

Publication number
CA925353A
CA925353A CA111915A CA111915A CA925353A CA 925353 A CA925353 A CA 925353A CA 111915 A CA111915 A CA 111915A CA 111915 A CA111915 A CA 111915A CA 925353 A CA925353 A CA 925353A
Authority
CA
Canada
Prior art keywords
photoresist
reduction
pin holes
plasticizer additive
plasticizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA111915A
Other versions
CA111915S (en
Inventor
T. Deverse Frank
H. Collins Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to CA111915A priority Critical patent/CA925353A/en
Application granted granted Critical
Publication of CA925353A publication Critical patent/CA925353A/en
Expired legal-status Critical Current

Links

CA111915A 1968-06-17 1971-05-03 Plasticizer additive to photoresist for the reduction of pin holes Expired CA925353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA111915A CA925353A (en) 1968-06-17 1971-05-03 Plasticizer additive to photoresist for the reduction of pin holes

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US73735568A 1968-06-17 1968-06-17
CA53999 1969-06-11
CA111915A CA925353A (en) 1968-06-17 1971-05-03 Plasticizer additive to photoresist for the reduction of pin holes

Publications (1)

Publication Number Publication Date
CA925353A true CA925353A (en) 1973-05-01

Family

ID=25666095

Family Applications (1)

Application Number Title Priority Date Filing Date
CA111915A Expired CA925353A (en) 1968-06-17 1971-05-03 Plasticizer additive to photoresist for the reduction of pin holes

Country Status (1)

Country Link
CA (1) CA925353A (en)

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