CA921312A - Additives to negative photoresists which increase the sensitivity thereof - Google Patents

Additives to negative photoresists which increase the sensitivity thereof

Info

Publication number
CA921312A
CA921312A CA049944A CA49944A CA921312A CA 921312 A CA921312 A CA 921312A CA 049944 A CA049944 A CA 049944A CA 49944 A CA49944 A CA 49944A CA 921312 A CA921312 A CA 921312A
Authority
CA
Canada
Prior art keywords
additives
sensitivity
increase
negative photoresists
photoresists
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA049944A
Other versions
CA49944S (en
Inventor
Broyde Barret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Priority to CA152,240A priority Critical patent/CA949922A/en
Application granted granted Critical
Publication of CA921312A publication Critical patent/CA921312A/en
Expired legal-status Critical Current

Links

CA049944A 1968-10-03 1969-04-28 Additives to negative photoresists which increase the sensitivity thereof Expired CA921312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA152,240A CA949922A (en) 1968-10-03 1972-09-21 Additives to negative photoresists which increase the sensitivity thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US76486668A 1968-10-03 1968-10-03

Publications (1)

Publication Number Publication Date
CA921312A true CA921312A (en) 1973-02-20

Family

ID=25072012

Family Applications (1)

Application Number Title Priority Date Filing Date
CA049944A Expired CA921312A (en) 1968-10-03 1969-04-28 Additives to negative photoresists which increase the sensitivity thereof

Country Status (1)

Country Link
CA (1) CA921312A (en)

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