CA903541A - Additives to negative photoresists which increase the sensitivity thereof - Google Patents

Additives to negative photoresists which increase the sensitivity thereof

Info

Publication number
CA903541A
CA903541A CA903541A CA903541DA CA903541A CA 903541 A CA903541 A CA 903541A CA 903541 A CA903541 A CA 903541A CA 903541D A CA903541D A CA 903541DA CA 903541 A CA903541 A CA 903541A
Authority
CA
Canada
Prior art keywords
additives
sensitivity
increase
negative photoresists
photoresists
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA903541A
Inventor
Broyde Barret
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Publication date
Application granted granted Critical
Publication of CA903541A publication Critical patent/CA903541A/en
Expired legal-status Critical Current

Links

CA903541A Additives to negative photoresists which increase the sensitivity thereof Expired CA903541A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA903541T

Publications (1)

Publication Number Publication Date
CA903541A true CA903541A (en) 1972-06-27

Family

ID=36411407

Family Applications (1)

Application Number Title Priority Date Filing Date
CA903541A Expired CA903541A (en) Additives to negative photoresists which increase the sensitivity thereof

Country Status (1)

Country Link
CA (1) CA903541A (en)

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