CA877586A - Plasticizer additive to photoresist for the reduction of pin holes - Google Patents

Plasticizer additive to photoresist for the reduction of pin holes

Info

Publication number
CA877586A
CA877586A CA877586A CA877586DA CA877586A CA 877586 A CA877586 A CA 877586A CA 877586 A CA877586 A CA 877586A CA 877586D A CA877586D A CA 877586DA CA 877586 A CA877586 A CA 877586A
Authority
CA
Canada
Prior art keywords
photoresist
reduction
pin holes
plasticizer additive
plasticizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA877586A
Inventor
H. Collins Robert
T. Deverse Frank
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA877586A publication Critical patent/CA877586A/en
Expired legal-status Critical Current

Links

CA877586A Plasticizer additive to photoresist for the reduction of pin holes Expired CA877586A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA877586T

Publications (1)

Publication Number Publication Date
CA877586A true CA877586A (en) 1971-08-03

Family

ID=36363446

Family Applications (1)

Application Number Title Priority Date Filing Date
CA877586A Expired CA877586A (en) Plasticizer additive to photoresist for the reduction of pin holes

Country Status (1)

Country Link
CA (1) CA877586A (en)

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