CA920107A - Rotary molecular vacuum pumps - Google Patents

Rotary molecular vacuum pumps

Info

Publication number
CA920107A
CA920107A CA067959A CA67959A CA920107A CA 920107 A CA920107 A CA 920107A CA 067959 A CA067959 A CA 067959A CA 67959 A CA67959 A CA 67959A CA 920107 A CA920107 A CA 920107A
Authority
CA
Canada
Prior art keywords
vacuum pumps
molecular vacuum
rotary molecular
rotary
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA067959A
Inventor
Becker Willi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ARTHUR PFEIFFER HOCHVAKUUMTECHNIK GmbH
Original Assignee
ARTHUR PFEIFFER HOCHVAKUUMTECHNIK GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ARTHUR PFEIFFER HOCHVAKUUMTECHNIK GmbH filed Critical ARTHUR PFEIFFER HOCHVAKUUMTECHNIK GmbH
Application granted granted Critical
Publication of CA920107A publication Critical patent/CA920107A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
CA067959A 1968-11-20 1969-11-20 Rotary molecular vacuum pumps Expired CA920107A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1809902A DE1809902C3 (en) 1968-11-20 1968-11-20 Multi-stage turbo molecular high vacuum pump

Publications (1)

Publication Number Publication Date
CA920107A true CA920107A (en) 1973-01-30

Family

ID=5713816

Family Applications (1)

Application Number Title Priority Date Filing Date
CA067959A Expired CA920107A (en) 1968-11-20 1969-11-20 Rotary molecular vacuum pumps

Country Status (9)

Country Link
US (1) US3666374A (en)
JP (1) JPS5017687B1 (en)
AT (1) AT299585B (en)
CA (1) CA920107A (en)
CH (1) CH501840A (en)
DE (1) DE1809902C3 (en)
FR (1) FR2023691A1 (en)
GB (1) GB1240744A (en)
NL (1) NL6917165A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE3317868A1 (en) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln FRICTION PUMP
FR2641582B1 (en) * 1989-01-09 1991-03-22 Cit Alcatel GAEDE CHANNEL TYPE VACUUM PUMP
DE4427153A1 (en) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Flooding device for magnetically mounted vacuum pumps
DE19821634A1 (en) 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Friction vacuum pump with staged rotor and stator
US6261052B1 (en) * 1999-01-08 2001-07-17 Fantom Technologies Inc. Prandtl layer turbine
DE19942410A1 (en) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vacuum pump
DE10111603A1 (en) * 2001-03-10 2002-09-12 Pfeiffer Vacuum Gmbh Gas friction pump with additional gas inlet
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump

Also Published As

Publication number Publication date
FR2023691A1 (en) 1970-08-21
US3666374A (en) 1972-05-30
JPS5017687B1 (en) 1975-06-23
AT299585B (en) 1972-06-26
NL6917165A (en) 1970-05-22
DE1809902B2 (en) 1973-04-26
CH501840A (en) 1971-01-15
DE1809902A1 (en) 1970-06-04
GB1240744A (en) 1971-07-28
DE1809902C3 (en) 1973-11-15

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