JPS5017687B1 - - Google Patents
Info
- Publication number
- JPS5017687B1 JPS5017687B1 JP44091762A JP9176269A JPS5017687B1 JP S5017687 B1 JPS5017687 B1 JP S5017687B1 JP 44091762 A JP44091762 A JP 44091762A JP 9176269 A JP9176269 A JP 9176269A JP S5017687 B1 JPS5017687 B1 JP S5017687B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1809902A DE1809902C3 (en) | 1968-11-20 | 1968-11-20 | Multi-stage turbo molecular high vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5017687B1 true JPS5017687B1 (en) | 1975-06-23 |
Family
ID=5713816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP44091762A Pending JPS5017687B1 (en) | 1968-11-20 | 1969-11-17 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3666374A (en) |
| JP (1) | JPS5017687B1 (en) |
| AT (1) | AT299585B (en) |
| CA (1) | CA920107A (en) |
| CH (1) | CH501840A (en) |
| DE (1) | DE1809902C3 (en) |
| FR (1) | FR2023691A1 (en) |
| GB (1) | GB1240744A (en) |
| NL (1) | NL6917165A (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
| DE3317868A1 (en) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | FRICTION PUMP |
| FR2641582B1 (en) * | 1989-01-09 | 1991-03-22 | Cit Alcatel | GAEDE CHANNEL TYPE VACUUM PUMP |
| DE4427153A1 (en) * | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Flooding device for magnetically mounted vacuum pumps |
| DE19821634A1 (en) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Friction vacuum pump with staged rotor and stator |
| US6261052B1 (en) * | 1999-01-08 | 2001-07-17 | Fantom Technologies Inc. | Prandtl layer turbine |
| DE19942410A1 (en) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
| DE10111603A1 (en) * | 2001-03-10 | 2002-09-12 | Pfeiffer Vacuum Gmbh | Gas friction pump with additional gas inlet |
| GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
-
1968
- 1968-11-20 DE DE1809902A patent/DE1809902C3/en not_active Expired
-
1969
- 1969-11-13 AT AT1065069A patent/AT299585B/en active
- 1969-11-13 US US876250A patent/US3666374A/en not_active Expired - Lifetime
- 1969-11-14 NL NL6917165A patent/NL6917165A/xx unknown
- 1969-11-17 JP JP44091762A patent/JPS5017687B1/ja active Pending
- 1969-11-18 FR FR6939574A patent/FR2023691A1/fr active Pending
- 1969-11-19 GB GB56705/69A patent/GB1240744A/en not_active Expired
- 1969-11-19 CH CH1718669A patent/CH501840A/en not_active IP Right Cessation
- 1969-11-20 CA CA067959A patent/CA920107A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH501840A (en) | 1971-01-15 |
| US3666374A (en) | 1972-05-30 |
| FR2023691A1 (en) | 1970-08-21 |
| DE1809902A1 (en) | 1970-06-04 |
| GB1240744A (en) | 1971-07-28 |
| AT299585B (en) | 1972-06-26 |
| DE1809902C3 (en) | 1973-11-15 |
| DE1809902B2 (en) | 1973-04-26 |
| CA920107A (en) | 1973-01-30 |
| NL6917165A (en) | 1970-05-22 |