CA922675A - Vacuum pump construction - Google Patents

Vacuum pump construction

Info

Publication number
CA922675A
CA922675A CA094789A CA94789A CA922675A CA 922675 A CA922675 A CA 922675A CA 094789 A CA094789 A CA 094789A CA 94789 A CA94789 A CA 94789A CA 922675 A CA922675 A CA 922675A
Authority
CA
Canada
Prior art keywords
vacuum pump
pump construction
construction
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA094789A
Other versions
CA94789S (en
Inventor
E. Osterstrom Gordon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sargent Welch Scientific Co
Original Assignee
Sargent Welch Scientific Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sargent Welch Scientific Co filed Critical Sargent Welch Scientific Co
Application granted granted Critical
Publication of CA922675A publication Critical patent/CA922675A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
CA094789A 1969-10-27 1970-10-05 Vacuum pump construction Expired CA922675A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86980669A 1969-10-27 1969-10-27

Publications (1)

Publication Number Publication Date
CA922675A true CA922675A (en) 1973-03-13

Family

ID=25354303

Family Applications (1)

Application Number Title Priority Date Filing Date
CA094789A Expired CA922675A (en) 1969-10-27 1970-10-05 Vacuum pump construction

Country Status (9)

Country Link
US (1) US3584966A (en)
JP (1) JPS5027882B1 (en)
BE (1) BE757353A (en)
CA (1) CA922675A (en)
CH (1) CH527368A (en)
DE (1) DE2046745A1 (en)
FR (1) FR2065418A5 (en)
GB (1) GB1321472A (en)
NL (1) NL7014717A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3722164C2 (en) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolecular pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US852030A (en) * 1906-09-08 1907-04-30 William A Nussbaumer Elastic-fluid turbine.
US1793179A (en) * 1927-06-17 1931-02-17 Lanterman Frank Elastic-fluid turbine
US2918208A (en) * 1956-02-02 1959-12-22 Becker Willi Molecular pump
FR1251606A (en) * 1960-03-15 1961-01-20 Arthur Pfeiffer G M B H Bearing for molecular pump
FR81075E (en) * 1962-01-23 1963-07-26 Snecma Advanced Turbomolecular Vacuum Pump
FR1338250A (en) * 1962-11-08 1963-09-20 Akad Wissenschaften Ddr Molecular pump
US3332610A (en) * 1965-09-08 1967-07-25 Welch Scient Company Shaft seal with cooling means

Also Published As

Publication number Publication date
FR2065418A5 (en) 1971-07-23
US3584966A (en) 1971-06-15
JPS5027882B1 (en) 1975-09-11
BE757353A (en) 1971-03-16
CH527368A (en) 1972-08-31
GB1321472A (en) 1973-06-27
DE2046745A1 (en) 1971-05-06
NL7014717A (en) 1971-04-29

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