CA914550A - Photoresist removal method - Google Patents

Photoresist removal method

Info

Publication number
CA914550A
CA914550A CA914550A CA914550DA CA914550A CA 914550 A CA914550 A CA 914550A CA 914550 A CA914550 A CA 914550A CA 914550D A CA914550D A CA 914550DA CA 914550 A CA914550 A CA 914550A
Authority
CA
Canada
Prior art keywords
removal method
photoresist removal
photoresist
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA914550A
Inventor
K. Stelter Manfred
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Publication date
Application granted granted Critical
Publication of CA914550A publication Critical patent/CA914550A/en
Expired legal-status Critical Current

Links

CA914550A Photoresist removal method Expired CA914550A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA914550T

Publications (1)

Publication Number Publication Date
CA914550A true CA914550A (en) 1972-11-14

Family

ID=36422064

Family Applications (1)

Application Number Title Priority Date Filing Date
CA914550A Expired CA914550A (en) Photoresist removal method

Country Status (1)

Country Link
CA (1) CA914550A (en)

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